c48faf417c6f193334204661e73cb50e micromachines_a2016m3v7n3p40.pdf ca187475dc2f87e263e957eb7f49436ca0d98c06 micromachines_a2016m3v7n3p40.pdf b82b5afc2428fc0c4c9703ce2ccbb12f5d4102ccc20eccecf4fedc40a5eee6a0 micromachines_a2016m3v7n3p40.pdf Title: Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry Subject: We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line (BEOL) layers of the AMS 0.35 m commercial CMOS technology, interconnecting two metal layers with a contact layer. The fabricated device has a 6 fL capacity and has one of the smallest embedded channels so far. It is able to attain a mass sensitivity of 25 ag/Hz using a fully integrable electrical transduction. Keywords: nanochannel; suspended channel; resonators; CMOS-NEMS; NEMS Author: Gabriel Vidal-Álvarez, Eloi Marigó, Francesc Torres and Núria Barniol Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.15 CreationDate: Wed Mar 2 11:38:30 2016 ModDate: Wed Mar 2 11:38:30 2016 Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 9 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 5383769 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- SKSWXA+URWPalladioL-Ital Type 1 Custom yes yes no 48 0 FNQOIE+URWPalladioL-Bold Type 1 Custom yes yes no 49 0 VPRINF+URWPalladioL-Roma Type 1 Custom yes yes no 50 0 OVNEXW+EURM10 Type 1 Builtin yes yes no 51 0 BEQZXU+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 55 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 101 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 102 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 103 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 104 0 GFNCOC+HelveticaNeue-Bold Type 1C MacRoman yes yes no 130 0 GFNCOD+HelveticaNeue Type 1C WinAnsi yes yes no 131 0 GFNDAD+HelveticaNeue-Medium Type 1C WinAnsi yes yes no 132 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 133 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 134 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 135 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 136 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 183 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 184 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 185 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 186 0 GFNDNO+CambriaMath CID TrueType Identity-H yes yes yes 187 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 232 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 233 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 234 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 235 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 270 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 271 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 272 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 273 0 GFNDAD+HelveticaNeue-Medium Type 1C WinAnsi yes yes no 300 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 301 0 GFNIOP+TimesNewRoman TrueType WinAnsi yes yes no 302 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 303 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 304 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 305 0 java.lang.ClassCastException: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject cannot be cast to edu.harvard.hul.ois.jhove.module.pdf.PdfDictionary at edu.harvard.hul.ois.jhove.module.PdfModule.readDocCatalogDict(PdfModule.java:1284) at edu.harvard.hul.ois.jhove.module.PdfModule.parse(PdfModule.java:525) at edu.harvard.hul.ois.jhove.JhoveBase.processFile(JhoveBase.java:825) at edu.harvard.hul.ois.jhove.JhoveBase.process(JhoveBase.java:614) at edu.harvard.hul.ois.jhove.JhoveBase.dispatch(JhoveBase.java:465) at Jhove.main(Jhove.java:296) Jhove (Rel. 1.6, 2011-01-04) Date: 2017-03-29 11:28:23 CEST RepresentationInformation: micromachines_a2016m3v7n3p40.pdf ReportingModule: BYTESTREAM, Rel. 1.3 (2007-04-10) LastModified: 2016-12-09 11:53:05 CET Size: 5383769 Format: bytestream Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/octet-stream Checksum: ffed3d5b Type: CRC32 Checksum: c48faf417c6f193334204661e73cb50e Type: MD5 Checksum: ca187475dc2f87e263e957eb7f49436ca0d98c06 Type: SHA-1