5fb0a4fe0b2fcc26a893cf6a96e17577 sensors_a2016m10v16n10p1690.pdf 8977cefe99c7fc5e2f8a09157b7ace9c8b3aeaf5 sensors_a2016m10v16n10p1690.pdf cbd5c3c4c79584b23a2a5f52e48abed9cf6012552fbd6e29307d1d2044952713 sensors_a2016m10v16n10p1690.pdf Title: Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors Subject: Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, thereby preserving mass responsivity. The authors present an array of five cantilevers (CMOS-MEMS system) that are forced to vibrate synchronously to enhance their frequency stability. The frequency stability has been determined in closed-loop configuration for long periods of time by calculating the Allan deviation. An Allan deviation of 0.013 ppm (@ 1 s averaging time) for a 1 MHz cantilever array MEMS system was obtained at the synchronized mode, which represents a 23-fold improvement in comparison with the non-synchronized operation mode (0.3 ppm). Keywords: MEMS; synchronization; resonators; CMOS-MEMS; cantilevers; arrays; coupling Author: Francesc Torres, Arantxa Uranga, Martí Riverola, Guillermo Sobreviela and Núria Barniol Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.15 CreationDate: Thu Oct 13 10:25:39 2016 ModDate: Thu Oct 13 10:25:39 2016 Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 15 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 4338737 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- AODQTK+URWPalladioL-Ital Type 1 Custom yes yes no 87 0 JTBPIS+URWPalladioL-Bold Type 1 Custom yes yes no 88 0 IOLEFS+URWPalladioL-Roma Type 1 Custom yes yes no 89 0 RVSEMT+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 93 0 ZYBJLO+EURM10 Type 1 Builtin yes yes no 132 0 GBBEAF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 160 0 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