350d5c6c1523473d331496a3dde64bd4  micromachines_a2016v7n2p30.pdf	/mnt/CLARIION/ddd/pub/artpub/2016/2016/pmc_30407403/pmc_30407403.pdf	/mnt/CLARIION/ddd/pub/artpub/2016/pmc_30407403/pmc_30407403.pdf