350d5c6c1523473d331496a3dde64bd4 micromachines_a2016v7n2p30.pdf cad56ecd340defcec3f679eac4a8b23ea1e6da68 micromachines_a2016v7n2p30.pdf 1e5e6c211610dcfe90954396c440f1c1f7086c1cf88d4a1e8ee037bc465ffa5a micromachines_a2016v7n2p30.pdf Title: CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology Subject: This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switches obtaining low operating voltage (5.5 V), good ION/IOFF (103) ratio, abrupt subthreshold swing (4.3 mV/decade) and minimum dimensions (3.50 m 100 nm 180 nm, and gap of 100 nm). With these dimensions, the operable Cell area of the switch will be 3.5 m (length) 0.2 m (100 nm width + 100 nm gap) = 0.7 m2 which is the smallest reported one using a top-down fabrication approach. Keywords: CMOS-NEMS; NEMS; NEMS switch; copper switch Author: Jose Luis Muñoz-Gamarra, Arantxa Uranga and Nuria Barniol Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.15 CreationDate: Mon Feb 15 17:40:40 2016 ModDate: Mon Feb 15 17:40:40 2016 Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 7 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 3742682 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- MRZIJT+URWPalladioL-Ital Type 1 Custom yes yes no 52 0 JFIHHV+URWPalladioL-Bold Type 1 Custom yes yes no 53 0 TYCKSG+URWPalladioL-Roma Type 1 Custom yes yes no 54 0 RHFKGB+EURM10 Type 1 Builtin yes yes no 55 0 YKIFYS+TeX-matha10 Type 1 Builtin yes yes no 56 0 BEQZXU+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 60 0 VKQCMX+TeX-mathx10 Type 1 Builtin yes yes no 106 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 112 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 113 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 114 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 115 0 IDNGJO+CambriaMath CID TrueType Identity-H yes yes yes 116 0 CYAQZX+TeX-matha8 Type 1 Builtin yes yes no 151 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 156 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 157 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 158 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 159 0 IDNGJO+CambriaMath CID TrueType Identity-H yes yes yes 160 0 IDOANN+TimesNewRoman TrueType WinAnsi yes yes no 161 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 197 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 198 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 199 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 200 0 IDNGJO+CambriaMath CID TrueType Identity-H yes yes yes 201 0 IDOANN+TimesNewRoman TrueType WinAnsi yes yes no 202 0 SPXLNH+PazoMath Type 1 Builtin yes yes no 259 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 266 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 267 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 268 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 269 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 289 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 290 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 291 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 292 0 IDOLDM+Symbol Type 1C Custom yes yes yes 319 0 IDOLCL+Arial TrueType WinAnsi yes yes no 320 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 321 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 322 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 323 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 324 0 LTQZXI+TeX-matha7 Type 1 Builtin yes yes no 370 0 Jhove (Rel. 1.6, 2011-01-04) Date: 2016-12-14 02:23:34 CET RepresentationInformation: micromachines_a2016v7n2p30.pdf ReportingModule: BYTESTREAM, Rel. 1.3 (2007-04-10) LastModified: 2016-12-12 12:22:44 CET Size: 3742682 Format: bytestream Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/octet-stream Checksum: 8c7f507a Type: CRC32 Checksum: 350d5c6c1523473d331496a3dde64bd4 Type: MD5 Checksum: cad56ecd340defcec3f679eac4a8b23ea1e6da68 Type: SHA-1