7e6ed9f80123d79cd4e492e63166b20d evacomstr_a2016v34n6.pdf e2f6fce90ec002b982fc28b2a6a71cdf114c7d72 evacomstr_a2016v34n6.pdf 3caae82ba4d2183fc6b539ee9426fb9f4fadc2789a5af5f55e40602932e8d599 evacomstr_a2016v34n6.pdf Title: Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM Subject: Journal of Vacuum Science & Technology B 2016.34:06KK02 Keywords: atomic force microscopy,bending,buckling,compressive strength,internal stresses,nanostructured materials,silicon Author: Matteo Lorenzoni, Jordi Llobet, Federico Gramazio, Marc Sansa, Jordi Fraxedas, and Francesc Perez-Murano Creator: Arbortext Advanced Print Publisher 9.0.114/W Producer: iText 4.2.0 by 1T3XT CreationDate: Mon Nov 14 15:40:12 2016 CET ModDate: Mon Oct 7 15:04:07 2019 CEST Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 6 Encrypted: no Page size: 612 x 809.972 pts Page rot: 0 File size: 1182860 bytes Optimized: no PDF version: 1.4 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- Arial-BoldMT TrueType WinAnsi no no no 8 0 ArialMT TrueType WinAnsi no no no 9 0 CNEEJK+AdvP80675 Type 1C Custom yes yes yes 95 0 CNEEJL+AdvPSMP10 Type 1C WinAnsi yes yes no 96 0 CNEEGF+AdvHelv_B Type 1C WinAnsi yes yes no 97 0 CNEEGG+AdvHelv_R Type 1C WinAnsi yes yes no 98 0 CNEEGH+AdvP696A Type 1C WinAnsi yes yes no 99 0 CNEEHI+AdvP6975 Type 1C Custom yes yes no 100 0 CNEEHJ+AdvP80516 Type 1C Custom yes yes yes 101 0 CNEEJJ+AdvP4C4E74 Type 1C Custom yes yes yes 102 0 CNEMML+AdvHelv_BO Type 1C WinAnsi yes yes no 183 0 CNEENL+AdvP4C4E51 Type 1C Custom yes yes yes 184 0 CNEMNL+AdvP4C4E46 Type 1C Custom yes yes no 212 0 CNFEPL+AdvP4C4E59 Type 1C Custom yes yes yes 250 0 CNFFAL+AdvP6960 Type 1C WinAnsi yes yes no 251 0 Jhove (Rel. 1.6, 2011-01-04) Date: 2019-10-08 05:12:12 CEST RepresentationInformation: evacomstr_a2016v34n6.pdf ReportingModule: PDF-hul, Rel. 1.8 (2009-05-22) LastModified: 2019-10-07 15:24:39 CEST Size: 1182860 Format: PDF Version: 1.4 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 333 FreeObjects: 1 IncrementalUpdates: 0 DocumentCatalog: PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: s1 Destination: 1 Item: Title: s2 Destination: 1 Item: Title: l Destination: 1 Item: Title: n1 Destination: 1 Item: Title: s2A Destination: 1 Item: Title: f1 Destination: 1 Item: Title: d1 Destination: 1 Item: Title: d2 Destination: 1 Item: Title: f2 Destination: 1 Item: Title: f3 Destination: 1 Item: Title: d3 Destination: 1 Item: Title: d4 Destination: 1 Item: Title: d5 Destination: 1 Item: Title: s2B Destination: 1 Item: Title: d6 Destination: 1 Item: Title: d7 Destination: 1 Item: Title: t1 Destination: 1 Item: Title: f4 Destination: 1 Item: Title: s3 Destination: 1 Item: Title: c1 Destination: 1 Item: Title: c2 Destination: 1 Item: Title: c3 Destination: 1 Item: Title: c4 Destination: 1 Item: Title: c5 Destination: 1 Item: Title: c6 Destination: 1 Item: Title: c7 Destination: 1 Item: Title: c8 Destination: 1 Item: Title: c9 Destination: 1 Item: Title: c10 Destination: 1 Item: Title: c11 Destination: 1 Item: Title: c12 Destination: 1 Item: Title: c13 Destination: 1 Item: Title: c14 Destination: 1 Item: Title: c15 Destination: 1 Item: Title: c16 Destination: 1 Item: Title: c17 Destination: 1 Item: Title: c18 Destination: 1 Item: Title: c19 Destination: 1 Item: Title: c20 Destination: 1 Item: Title: c21 Destination: 1 Item: Title: c22 Destination: 1 Item: Title: c23 Destination: 1 Item: Title: c24 Destination: 1 Item: Title: c25 Destination: 1 Item: Title: c26 Destination: 1 Info: Title: Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM Author: Matteo Lorenzoni, Jordi Llobet, Federico Gramazio, Marc Sansa, Jordi Fraxedas, and Francesc Perez-Murano Subject: Journal of Vacuum Science & Technology B 2016.34:06KK02 Keywords: atomic force microscopy,bending,buckling,compressive strength,internal stresses,nanostructured materials,silicon Creator: Arbortext Advanced Print Publisher 9.0.114/W Producer: iText 4.2.0 by 1T3XT CreationDate: Mon Nov 14 16:10:12 CET 2016 ModDate: Mon Oct 07 08:04:07 CEST 2019 ID: 0xde95cdc10febf4edf6433b34cbecf5be, 0x3e5749c9bc92513e5cdb60f037fa00d9 Filters: FilterPipeline: FlateDecode FilterPipeline: DCTDecode Images: Image: NisoImageMetadata: CompressionScheme: JPEG ImageWidth: 1640 ImageHeight: 440 ColorSpace: RGB BitsPerSample: 8 BitsPerSampleUnit: integer Name: Im1 Image: NisoImageMetadata: CompressionScheme: JPEG ImageWidth: 189 ImageHeight: 66 ColorSpace: black is zero BitsPerSample: 8 BitsPerSampleUnit: integer Image: NisoImageMetadata: CompressionScheme: JPEG ImageWidth: 150 ImageHeight: 63 ColorSpace: RGB BitsPerSample: 8 BitsPerSampleUnit: integer Image: NisoImageMetadata: CompressionScheme: JPEG ImageWidth: 2107 ImageHeight: 1313 ColorSpace: RGB BitsPerSample: 8 BitsPerSampleUnit: integer Image: NisoImageMetadata: CompressionScheme: JPEG ImageWidth: 1018 ImageHeight: 1056 ColorSpace: RGB BitsPerSample: 8 BitsPerSampleUnit: integer Image: NisoImageMetadata: ImageWidth: 902 ImageHeight: 648 ColorSpace: RGB BitsPerSample: 8 BitsPerSampleUnit: integer Filter: FlateDecode Image: NisoImageMetadata: CompressionScheme: JPEG ImageWidth: 1017 ImageHeight: 1150 ColorSpace: RGB BitsPerSample: 8 BitsPerSampleUnit: integer Fonts: Type1: Font: BaseFont: CNEEJL+AdvPSMP10 FontSubset: true FirstChar: 104 LastChar: 114 FontDescriptor: FontName: CNEEJL+AdvPSMP10 Flags: Serif, Nonsymbolic FontBBox: 0, -302, 989, 802 FontFile3: true Encoding: WinAnsiEncoding Font: BaseFont: CNEEGF+AdvHelv_B FontSubset: true FirstChar: 40 LastChar: 122 FontDescriptor: FontName: CNEEGF+AdvHelv_B Flags: Nonsymbolic FontBBox: -166, -218, 1000, 770 FontFile3: true Encoding: WinAnsiEncoding Font: BaseFont: CNEEGG+AdvHelv_R FontSubset: true FirstChar: 41 LastChar: 122 FontDescriptor: FontName: CNEEGG+AdvHelv_R Flags: Nonsymbolic FontBBox: -156, -218, 1000, 770 FontFile3: true Encoding: WinAnsiEncoding Font: BaseFont: CNEEGH+AdvP696A FontSubset: true FirstChar: 32 LastChar: 121 FontDescriptor: FontName: CNEEGH+AdvP696A Flags: Nonsymbolic FontBBox: -166, -250, 989, 750 FontFile3: true Encoding: WinAnsiEncoding Font: BaseFont: CNEEHI+AdvP6975 FontSubset: true FirstChar: 30 LastChar: 150 FontDescriptor: FontName: CNEEHI+AdvP6975 Flags: Serif, Nonsymbolic FontBBox: -166, -208, 1020, 729 FontFile3: true EncodingDictionary: BaseEncoding: WinAnsiEncoding Differences: true Font: BaseFont: CNEEHJ+AdvP80516 FontSubset: true FirstChar: 86 LastChar: 86 FontDescriptor: FontName: CNEEHJ+AdvP80516 Flags: Symbolic FontBBox: 0, -218, 989, 760 FontFile3: true EncodingDictionary: Differences: true ToUnicode: true Font: BaseFont: CNEEJJ+AdvP4C4E74 FontSubset: true FirstChar: 2 LastChar: 254 FontDescriptor: FontName: CNEEJJ+AdvP4C4E74 Flags: Symbolic FontBBox: -20, -958, 1114, 770 FontFile3: true EncodingDictionary: Differences: true ToUnicode: true Font: BaseFont: CNEMNL+AdvP4C4E46 FontSubset: true FirstChar: 2 LastChar: 3 FontDescriptor: FontName: CNEMNL+AdvP4C4E46 Flags: Serif, Symbolic FontBBox: 34, -2359, 700, 40 FontFile3: true EncodingDictionary: Differences: true Font: BaseFont: CNEMML+AdvHelv_BO FontSubset: true FirstChar: 46 LastChar: 116 FontDescriptor: FontName: CNEMML+AdvHelv_BO Flags: Nonsymbolic FontBBox: -166, -218, 1114, 770 FontFile3: true Encoding: WinAnsiEncoding Font: BaseFont: CNEENL+AdvP4C4E51 FontSubset: true FirstChar: 58 LastChar: 62 FontDescriptor: FontName: CNEENL+AdvP4C4E51 Flags: Symbolic FontBBox: -31, -239, 1041, 750 FontFile3: true EncodingDictionary: Differences: true ToUnicode: true Font: BaseFont: CNFEPL+AdvP4C4E59 FontSubset: true FirstChar: 2 LastChar: 160 FontDescriptor: FontName: CNFEPL+AdvP4C4E59 Flags: Serif, Symbolic FontBBox: -31, -250, 1000, 750 FontFile3: true EncodingDictionary: Differences: true ToUnicode: true Font: BaseFont: CNFFAL+AdvP6960 FontSubset: true FirstChar: 48 LastChar: 57 FontDescriptor: FontName: CNFFAL+AdvP6960 Flags: Serif, Nonsymbolic FontBBox: -166, -250, 1000, 750 FontFile3: true Encoding: WinAnsiEncoding Font: BaseFont: CNEEJK+AdvP80675 FontSubset: true FirstChar: 54 LastChar: 54 FontDescriptor: FontName: CNEEJK+AdvP80675 Flags: Symbolic FontBBox: -20, -229, 1010, 812 FontFile3: true EncodingDictionary: Differences: true ToUnicode: true TrueType: Font: BaseFont: Arial-BoldMT FirstChar: 0 LastChar: 255 FontDescriptor: FontName: Arial-BoldMT Flags: Nonsymbolic FontBBox: -627, -376, 2033, 1047 Encoding: WinAnsiEncoding Font: BaseFont: ArialMT FirstChar: 0 LastChar: 255 FontDescriptor: FontName: ArialMT Flags: Nonsymbolic FontBBox: -664, -324, 2028, 1037 Encoding: WinAnsiEncoding XMP: application/pdfdoi:10.1116/1.4967930 10.1116/1.4967930https://doi.org/10.1116/1.4967930 2016-11-22trueavs.scitation.org10.1116/1.4967930 avs.scitation.orgtrue2016-11-2210.1116/1.4967930 VoR Pages: Page: Sequence: 1 Annotations: Annotation: Subtype: Link Rect: 49, 39, 549, 215 Annotation: Subtype: Link Rect: 55, 730, 132, 739 Annotation: Subtype: Link Rect: 138, 730, 189, 739 Annotation: Subtype: Link Rect: 195, 730, 280, 739 Annotation: Subtype: Link Rect: 285, 730, 339, 739 Annotation: Subtype: Link Rect: 344, 730, 410, 739 Annotation: Subtype: Link Rect: 435, 730, 543, 739 Annotation: Subtype: Link Rect: 94, 694, 287, 703 Annotation: Subtype: Link Rect: 111, 678, 259, 687 Annotation: Subtype: Link Rect: 162, 662, 319, 671 Annotation: Subtype: Link Rect: 132, 646, 248, 655 Annotation: Subtype: Link Rect: 55, 586, 469, 596 Annotation: Subtype: Link Rect: 254, 575, 404, 584 Annotation: Subtype: Link Rect: 55, 553, 347, 562 Annotation: Subtype: Link Rect: 338, 541, 486, 551 Annotation: Subtype: Link Rect: 55, 519, 540, 529 Annotation: Subtype: Link Rect: 55, 509, 113, 519 Annotation: Subtype: Link Rect: 336, 498, 484, 507 Annotation: Subtype: Link Rect: 55, 476, 360, 485 Annotation: Subtype: Link Rect: 342, 464, 490, 474 Annotation: Subtype: Link Rect: 55, 442, 451, 452 Annotation: Subtype: Link Rect: 338, 431, 486, 440 Annotation: Subtype: Link Rect: 55, 409, 336, 418 Annotation: Subtype: Link Rect: 341, 397, 489, 407 Page: Sequence: 2 Annotations: Annotation: Subtype: Link Rect: 51, 737, 555, 751 Annotation: Subtype: Link Rect: 51, 721, 254, 735 Annotation: Subtype: Link Rect: 164, 708, 170, 718 Destination: 1 Annotation: Subtype: Link Rect: 284, 434, 460, 444 Annotation: Subtype: Link Rect: 90, 422, 236, 432 Annotation: Subtype: Link Rect: 287, 302, 291, 312 Destination: 1 Annotation: Subtype: Link Rect: 293, 302, 297, 312 Destination: 1 Annotation: Subtype: Link Rect: 172, 290, 176, 300 Destination: 1 Annotation: Subtype: Link Rect: 83, 278, 87, 288 Destination: 1 Annotation: Subtype: Link Rect: 88, 121, 92, 131 Destination: 1 Annotation: Subtype: Link Rect: 93, 121, 97, 131 Destination: 1 Annotation: Subtype: Link Rect: 341, 271, 345, 281 Destination: 1 Annotation: Subtype: Link Rect: 349, 271, 356, 281 Destination: 1 Annotation: Subtype: Link Rect: 502, 170, 509, 180 Destination: 1 Annotation: Subtype: Link Rect: 511, 170, 519, 180 Destination: 1 Annotation: Subtype: Link Rect: 394, 146, 402, 156 Destination: 1 Annotation: Subtype: Link Rect: 451, 146, 458, 156 Destination: 1 Annotation: Subtype: Link Rect: 346, 134, 353, 144 Destination: 1 Annotation: Subtype: Link Rect: 109, 58, 223, 66 Annotation: Subtype: Link Rect: 485, 789, 535, 768 Page: Sequence: 3 Annotations: Annotation: Subtype: Link Rect: 163, 586, 171, 596 Destination: 1 Annotation: Subtype: Link Rect: 51, 463, 67, 473 Destination: 1 Annotation: Subtype: Link Rect: 485, 741, 502, 751 Destination: 1 Annotation: Subtype: Link Rect: 339, 717, 376, 727 Destination: 1 Annotation: Subtype: Link Rect: 389, 681, 404, 691 Destination: 1 Annotation: Subtype: Link Rect: 334, 552, 342, 562 Destination: 1 Annotation: Subtype: Link Rect: 314, 475, 331, 485 Destination: 1 Annotation: Subtype: Link Rect: 415, 439, 431, 449 Destination: 1 Page: Sequence: 4 Annotations: Annotation: Subtype: Link Rect: 151, 500, 167, 510 Destination: 1 Annotation: Subtype: Link Rect: 189, 500, 205, 510 Destination: 1 Annotation: Subtype: Link Rect: 74, 379, 90, 389 Destination: 1 Annotation: Subtype: Link Rect: 183, 342, 199, 352 Destination: 1 Annotation: Subtype: Link Rect: 208, 334, 216, 344 Destination: 1 Annotation: Subtype: Link Rect: 157, 220, 165, 230 Destination: 1 Annotation: Subtype: Link Rect: 166, 220, 174, 230 Destination: 1 Annotation: Subtype: Link Rect: 87, 195, 94, 205 Destination: 1 Annotation: Subtype: Link Rect: 116, 81, 126, 91 Destination: 1 Annotation: Subtype: Link Rect: 172, 81, 183, 91 Destination: 1 Annotation: Subtype: Link Rect: 402, 293, 405, 303 Destination: 1 Annotation: Subtype: Link Rect: 432, 285, 436, 295 Destination: 1 Annotation: Subtype: Link Rect: 414, 213, 426, 223 Destination: 1 Annotation: Subtype: Link Rect: 491, 134, 499, 144 Destination: 1 Page: Sequence: 5 Annotations: Annotation: Subtype: Link Rect: 115, 584, 125, 594 Destination: 1 Annotation: Subtype: Link Rect: 113, 449, 130, 459 Destination: 1 Annotation: Subtype: Link Rect: 275, 449, 287, 459 Destination: 1 Annotation: Subtype: Link Rect: 69, 437, 80, 447 Destination: 1 Annotation: Subtype: Link Rect: 248, 400, 259, 410 Destination: 1 Annotation: Subtype: Link Rect: 282, 400, 294, 410 Destination: 1 Annotation: Subtype: Link Rect: 271, 327, 274, 337 Destination: 1 Annotation: Subtype: Link Rect: 280, 256, 287, 266 Destination: 1 Annotation: Subtype: Link Rect: 289, 256, 297, 266 Destination: 1 Annotation: Subtype: Link Rect: 246, 215, 251, 225 Destination: 1 Annotation: Subtype: Link Rect: 131, 179, 148, 189 Destination: 1 Annotation: Subtype: Link Rect: 72, 167, 88, 176 Destination: 1 Annotation: Subtype: Link Rect: 229, 147, 236, 157 Destination: 1 Annotation: Subtype: Link Rect: 139, 94, 155, 104 Destination: 1 Annotation: Subtype: Link Rect: 145, 62, 152, 72 Destination: 1 Annotation: Subtype: Link Rect: 426, 285, 442, 295 Destination: 1 Annotation: Subtype: Link Rect: 487, 285, 498, 295 Destination: 1 Annotation: Subtype: Link Rect: 334, 266, 338, 275 Destination: 1 Annotation: Subtype: Link Rect: 340, 266, 347, 275 Destination: 1 Annotation: Subtype: Link Rect: 386, 253, 394, 264 Destination: 1 Annotation: Subtype: Link Rect: 395, 253, 403, 264 Destination: 1 Annotation: Subtype: Link Rect: 528, 158, 535, 167 Destination: 1 Annotation: Subtype: Link Rect: 444, 141, 456, 151 Destination: 1 Annotation: Subtype: Link Rect: 450, 109, 457, 120 Destination: 1 Annotation: Subtype: Link Rect: 338, 86, 345, 95 Destination: 1 Annotation: Subtype: Link Rect: 111, 733, 120, 741 Destination: 1 Page: Sequence: 6 Annotations: Annotation: Subtype: Link Rect: 88, 682, 99, 692 Destination: 1 Annotation: Subtype: Link Rect: 278, 670, 285, 680 Destination: 1 Annotation: Subtype: Link Rect: 287, 670, 294, 680 Destination: 1 Annotation: Subtype: Link Rect: 175, 650, 182, 660 Destination: 1 Annotation: Subtype: Link Rect: 244, 646, 256, 656 Destination: 1 Annotation: Subtype: Link Rect: 104, 574, 116, 584 Destination: 1 Annotation: Subtype: Link Rect: 164, 430, 175, 440 Destination: 1 Annotation: Subtype: Link Rect: 126, 346, 136, 356 Destination: 1 Annotation: Subtype: Link Rect: 377, 492, 402, 500 Annotation: Subtype: Link Rect: 473, 482, 507, 490 Annotation: Subtype: Link Rect: 460, 473, 485, 481 Annotation: Subtype: Link Rect: 447, 463, 533, 471 Annotation: Subtype: Link Rect: 417, 444, 498, 452 Annotation: Subtype: Link Rect: 404, 415, 458, 423 Annotation: Subtype: Link Rect: 534, 406, 560, 414 Annotation: Subtype: Link Rect: 320, 396, 338, 404 Annotation: Subtype: Link Rect: 370, 377, 423, 385 Annotation: Subtype: Link Rect: 370, 357, 446, 365 Annotation: Subtype: Link Rect: 350, 338, 404, 346 Annotation: Subtype: Link Rect: 543, 329, 560, 337 Annotation: Subtype: Link Rect: 320, 319, 337, 327 Annotation: Subtype: Link Rect: 534, 309, 560, 317 Annotation: Subtype: Link Rect: 320, 299, 338, 307 Annotation: Subtype: Link Rect: 465, 280, 514, 288 Annotation: Subtype: Link Rect: 405, 242, 432, 250 Annotation: Subtype: Link Rect: 526, 232, 560, 240 Annotation: Subtype: Link Rect: 450, 213, 505, 221 Annotation: Subtype: Link Rect: 422, 203, 486, 211 Annotation: Subtype: Link Rect: 529, 194, 560, 202 Annotation: Subtype: Link Rect: 320, 184, 347, 192 Annotation: Subtype: Link Rect: 413, 165, 448, 173 Annotation: Subtype: Link Rect: 382, 155, 416, 163 Annotation: Subtype: Link Rect: 449, 146, 486, 154 Annotation: Subtype: Link Rect: 544, 136, 560, 144 Annotation: Subtype: Link Rect: 320, 126, 364, 134 Checksum: 1b599b4d Type: CRC32 Checksum: 7e6ed9f80123d79cd4e492e63166b20d Type: MD5 Checksum: e2f6fce90ec002b982fc28b2a6a71cdf114c7d72 Type: SHA-1