350d5c6c1523473d331496a3dde64bd4 pmc_30407403.pdf cad56ecd340defcec3f679eac4a8b23ea1e6da68 pmc_30407403.pdf 1e5e6c211610dcfe90954396c440f1c1f7086c1cf88d4a1e8ee037bc465ffa5a pmc_30407403.pdf Title: CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology Subject: This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switches obtaining low operating voltage (5.5 V), good ION/IOFF (103) ratio, abrupt subthreshold swing (4.3 mV/decade) and minimum dimensions (3.50 m 100 nm 180 nm, and gap of 100 nm). With these dimensions, the operable Cell area of the switch will be 3.5 m (length) 0.2 m (100 nm width + 100 nm gap) = 0.7 m2 which is the smallest reported one using a top-down fabrication approach. Keywords: CMOS-NEMS; NEMS; NEMS switch; copper switch Author: Jose Luis Muñoz-Gamarra, Arantxa Uranga and Nuria Barniol Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.15 CreationDate: Mon Feb 15 10:40:40 2016 CET ModDate: Mon Feb 15 10:40:40 2016 CET Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 7 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 3742682 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- MRZIJT+URWPalladioL-Ital Type 1 Custom yes yes no 52 0 JFIHHV+URWPalladioL-Bold Type 1 Custom yes yes no 53 0 TYCKSG+URWPalladioL-Roma Type 1 Custom yes yes no 54 0 RHFKGB+EURM10 Type 1 Builtin yes yes no 55 0 YKIFYS+TeX-matha10 Type 1 Builtin yes yes no 56 0 BEQZXU+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 60 0 VKQCMX+TeX-mathx10 Type 1 Builtin yes yes no 106 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 112 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 113 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 114 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 115 0 IDNGJO+CambriaMath CID TrueType Identity-H yes yes yes 116 0 CYAQZX+TeX-matha8 Type 1 Builtin yes yes no 151 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 156 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 157 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 158 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 159 0 IDNGJO+CambriaMath CID TrueType Identity-H yes yes yes 160 0 IDOANN+TimesNewRoman TrueType WinAnsi yes yes no 161 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 197 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 198 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 199 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 200 0 IDNGJO+CambriaMath CID TrueType Identity-H yes yes yes 201 0 IDOANN+TimesNewRoman TrueType WinAnsi yes yes no 202 0 SPXLNH+PazoMath Type 1 Builtin yes yes no 259 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 266 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 267 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 268 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 269 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 289 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 290 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 291 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 292 0 IDOLDM+Symbol Type 1C Custom yes yes yes 319 0 IDOLCL+Arial TrueType WinAnsi yes yes no 320 0 IDNFNO+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 321 0 IDNFNP+PalatinoLinotype CID TrueType Identity-H yes yes yes 322 0 IDNFOA+PalatinoLinotype TrueType WinAnsi yes yes no 323 0 IDNFOC+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 324 0 LTQZXI+TeX-matha7 Type 1 Builtin yes yes no 370 0 Jhove (Rel. 1.22.1, 2019-04-17) Date: 2023-02-16 02:39:41 CET RepresentationInformation: pmc_30407403.pdf ReportingModule: PDF-hul, Rel. 1.12.1 (2019-04-17) LastModified: 2020-08-17 03:38:06 CEST Size: 3742682 Format: PDF Version: 1.5 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 0 FreeObjects: 1 IncrementalUpdates: 0 DocumentCatalog: ViewerPreferences: HideToolbar: false HideMenubar: false HideWindowUI: false FitWindow: true CenterWindow: false DisplayDocTitle: false NonFullScreenPageMode: UseNone Direction: L2R ViewArea: CropBox ViewClip: CropBox PrintArea: CropBox PageClip: CropBox PageLayout: SinglePage PageMode: None Outlines: Item: Title: Introduction Item: Title: CMOS-NEMS Switch Device Design Item: Title: Results and Discussion Item: Title: Conclusions Filters: FilterPipeline: FlateDecode Fonts: Type1: Font: BaseFont: LTQZXI+TeX-matha7 FontSubset: true FirstChar: 5 LastChar: 5 FontDescriptor: FontName: LTQZXI+TeX-matha7 Flags: Symbolic FontBBox: -151, -957, 1074, 952 FontFile: true Font: BaseFont: SPXLNH+PazoMath FontSubset: true FirstChar: 87 LastChar: 87 FontDescriptor: FontName: SPXLNH+PazoMath Flags: Symbolic FontBBox: -40, -283, 878, 946 FontFile: true Font: BaseFont: MRZIJT+URWPalladioL-Ital FontSubset: true FirstChar: 46 LastChar: 121 FontDescriptor: FontName: MRZIJT+URWPalladioL-Ital Flags: Symbolic FontBBox: -170, -305, 1010, 941 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: JFIHHV+URWPalladioL-Bold FontSubset: true FirstChar: 3 LastChar: 241 FontDescriptor: FontName: JFIHHV+URWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: TYCKSG+URWPalladioL-Roma FontSubset: true FirstChar: 2 LastChar: 243 FontDescriptor: FontName: TYCKSG+URWPalladioL-Roma Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: RHFKGB+EURM10 FontSubset: true FirstChar: 22 LastChar: 34 FontDescriptor: FontName: RHFKGB+EURM10 Flags: Symbolic FontBBox: -32, -243, 1060, 720 FontFile: true Font: BaseFont: CYAQZX+TeX-matha8 FontSubset: true FirstChar: 1 LastChar: 1 FontDescriptor: FontName: CYAQZX+TeX-matha8 Flags: Symbolic FontBBox: -137, -962, 1024, 940 FontFile: true Font: BaseFont: YKIFYS+TeX-matha10 FontSubset: true FirstChar: 0 LastChar: 123 FontDescriptor: FontName: YKIFYS+TeX-matha10 Flags: Symbolic FontBBox: -127, -970, 966, 914 FontFile: true Font: BaseFont: VKQCMX+TeX-mathx10 FontSubset: true FirstChar: 1 LastChar: 100 FontDescriptor: FontName: VKQCMX+TeX-mathx10 Flags: Symbolic FontBBox: -12, -2972, 2309, 776 FontFile: true Pages: Page: Sequence: 1 Annotations: Annotation: Subtype: Link Rect: 75, 757, 206, 793 Annotation: Subtype: Link Rect: 478, 757, 523, 793 Annotation: Subtype: Link Rect: 119, 350, 126, 359 ActionDest: 366 Annotation: Subtype: Link Rect: 129, 350, 136, 359 ActionDest: 366 Annotation: Subtype: Link Rect: 353, 309, 360, 318 ActionDest: 366 Annotation: Subtype: Link Rect: 360, 309, 367, 318 ActionDest: 366 Annotation: Subtype: Link Rect: 488, 309, 495, 318 ActionDest: 366 Annotation: Subtype: Link Rect: 406, 296, 413, 305 ActionDest: 366 Annotation: Subtype: Link Rect: 414, 296, 421, 305 ActionDest: 366 Annotation: Subtype: Link Rect: 465, 282, 472, 291 ActionDest: 366 Annotation: Subtype: Link Rect: 508, 269, 515, 278 ActionDest: 366 Annotation: Subtype: Link Rect: 271, 201, 278, 210 ActionDest: 366 Annotation: Subtype: Link Rect: 123, 188, 135, 197 ActionDest: 366 Annotation: Subtype: Link Rect: 136, 188, 148, 197 ActionDest: 366 Annotation: Subtype: Link Rect: 380, 147, 392, 156 ActionDest: 366 Annotation: Subtype: Link Rect: 395, 147, 407, 156 ActionDest: 366 Annotation: Subtype: Link Rect: 205, 134, 217, 143 ActionDest: 366 Annotation: Subtype: Link Rect: 220, 134, 232, 143 ActionDest: 366 Annotation: Subtype: Link Rect: 324, 120, 331, 129 ActionDest: 366 Annotation: Subtype: Link Rect: 331, 120, 343, 129 ActionDest: 385 Annotation: Subtype: Link Rect: 344, 120, 356, 129 ActionDest: 385 Annotation: Subtype: Link Rect: 372, 39, 519, 49 Page: Sequence: 2 Annotations: Annotation: Subtype: Link Rect: 107, 715, 119, 724 ActionDest: 385 Annotation: Subtype: Link Rect: 483, 659, 495, 668 ActionDest: 385 Annotation: Subtype: Link Rect: 142, 646, 154, 655 ActionDest: 385 Annotation: Subtype: Link Rect: 300, 646, 312, 655 ActionDest: 385 Annotation: Subtype: Link Rect: 156, 592, 168, 601 ActionDest: 385 Annotation: Subtype: Link Rect: 207, 562, 214, 574 ActionDest: 101 Annotation: Subtype: Link Rect: 175, 521, 182, 533 ActionDest: 101 Annotation: Subtype: Link Rect: 266, 508, 272, 520 ActionDest: 101 Annotation: Subtype: Link Rect: 245, 176, 252, 188 ActionDest: 147 Annotation: Subtype: Link Rect: 304, 176, 311, 188 ActionDest: 147 Annotation: Subtype: Link Rect: 480, 163, 487, 175 ActionDest: 147 Annotation: Subtype: Link Rect: 128, 125, 140, 134 ActionDest: 385 Page: Sequence: 3 Annotations: Annotation: Subtype: Link Rect: 120, 742, 132, 751 ActionDest: 385 Annotation: Subtype: Link Rect: 428, 742, 440, 751 ActionDest: 385 Annotation: Subtype: Link Rect: 238, 675, 250, 684 ActionDest: 385 Page: Sequence: 4 Annotations: Annotation: Subtype: Link Rect: 129, 666, 136, 678 ActionDest: 256 Annotation: Subtype: Link Rect: 149, 572, 156, 584 ActionDest: 256 Annotation: Subtype: Link Rect: 328, 531, 335, 543 ActionDest: 256 Annotation: Subtype: Link Rect: 420, 439, 432, 448 ActionDest: 385 Page: Sequence: 5 Annotations: Annotation: Subtype: Link Rect: 127, 740, 134, 752 ActionDest: 311 Annotation: Subtype: Link Rect: 478, 715, 490, 724 ActionDest: 366 Annotation: Subtype: Link Rect: 491, 715, 503, 724 ActionDest: 366 Annotation: Subtype: Link Rect: 503, 715, 515, 724 ActionDest: 366 Annotation: Subtype: Link Rect: 228, 688, 240, 697 ActionDest: 366 Annotation: Subtype: Link Rect: 241, 688, 253, 697 ActionDest: 366 Annotation: Subtype: Link Rect: 306, 607, 318, 616 ActionDest: 366 Annotation: Subtype: Link Rect: 325, 540, 337, 549 ActionDest: 366 Annotation: Subtype: Link Rect: 332, 486, 344, 495 ActionDest: 385 Annotation: Subtype: Link Rect: 345, 486, 357, 495 ActionDest: 385 Annotation: Subtype: Link Rect: 291, 472, 303, 481 ActionDest: 385 Annotation: Subtype: Link Rect: 476, 472, 488, 481 ActionDest: 385 Page: Sequence: 6 Annotations: Annotation: Subtype: Link Rect: 100, 638, 137, 648 Annotation: Subtype: Link Rect: 143, 638, 179, 648 Annotation: Subtype: Link Rect: 234, 586, 271, 596 Annotation: Subtype: Link Rect: 352, 521, 390, 532 Annotation: Subtype: Link Rect: 262, 495, 300, 506 Annotation: Subtype: Link Rect: 306, 495, 342, 506 Annotation: Subtype: Link Rect: 479, 469, 516, 480 Annotation: Subtype: Link Rect: 185, 444, 223, 454 Annotation: Subtype: Link Rect: 229, 444, 265, 454 Annotation: Subtype: Link Rect: 399, 379, 436, 390 Annotation: Subtype: Link Rect: 442, 379, 478, 390 Annotation: Subtype: Link Rect: 393, 353, 431, 364 Annotation: Subtype: Link Rect: 437, 353, 473, 364 Annotation: Subtype: Link Rect: 236, 327, 274, 338 Annotation: Subtype: Link Rect: 343, 301, 381, 312 Page: Sequence: 7 Annotations: Annotation: Subtype: Link Rect: 100, 715, 137, 725 Annotation: Subtype: Link Rect: 435, 688, 472, 699 Annotation: Subtype: Link Rect: 149, 638, 187, 648 Annotation: Subtype: Link Rect: 144, 599, 182, 609 Annotation: Subtype: Link Rect: 444, 572, 481, 583 Annotation: Subtype: Link Rect: 402, 469, 439, 480 Annotation: Subtype: Link Rect: 353, 366, 390, 377 Annotation: Subtype: Link Rect: 467, 340, 505, 351 Annotation: Subtype: Link Rect: 75, 249, 158, 279 Annotation: Subtype: Link Rect: 234, 243, 424, 254 Checksum: 8c7f507a Type: CRC32 Checksum: 350d5c6c1523473d331496a3dde64bd4 Type: MD5 Checksum: cad56ecd340defcec3f679eac4a8b23ea1e6da68 Type: SHA-1