c48faf417c6f193334204661e73cb50e pmc_30407413.pdf ca187475dc2f87e263e957eb7f49436ca0d98c06 pmc_30407413.pdf b82b5afc2428fc0c4c9703ce2ccbb12f5d4102ccc20eccecf4fedc40a5eee6a0 pmc_30407413.pdf Title: Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry Subject: We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line (BEOL) layers of the AMS 0.35 m commercial CMOS technology, interconnecting two metal layers with a contact layer. The fabricated device has a 6 fL capacity and has one of the smallest embedded channels so far. It is able to attain a mass sensitivity of 25 ag/Hz using a fully integrable electrical transduction. Keywords: nanochannel; suspended channel; resonators; CMOS-NEMS; NEMS Author: Gabriel Vidal-Álvarez, Eloi Marigó, Francesc Torres and Núria Barniol Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.15 CreationDate: Wed Mar 2 04:38:30 2016 CET ModDate: Wed Mar 2 04:38:30 2016 CET Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 9 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 5383769 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- SKSWXA+URWPalladioL-Ital Type 1 Custom yes yes no 48 0 FNQOIE+URWPalladioL-Bold Type 1 Custom yes yes no 49 0 VPRINF+URWPalladioL-Roma Type 1 Custom yes yes no 50 0 OVNEXW+EURM10 Type 1 Builtin yes yes no 51 0 BEQZXU+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 55 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 101 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 102 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 103 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 104 0 GFNCOC+HelveticaNeue-Bold Type 1C MacRoman yes yes no 130 0 GFNCOD+HelveticaNeue Type 1C WinAnsi yes yes no 131 0 GFNDAD+HelveticaNeue-Medium Type 1C WinAnsi yes yes no 132 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 133 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 134 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 135 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 136 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 183 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 184 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 185 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 186 0 GFNDNO+CambriaMath CID TrueType Identity-H yes yes yes 187 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 232 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 233 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 234 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 235 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 270 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 271 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 272 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 273 0 GFNDAD+HelveticaNeue-Medium Type 1C WinAnsi yes yes no 300 0 GFNAJK+PalatinoLinotype CID TrueType Identity-H yes yes yes 301 0 GFNIOP+TimesNewRoman TrueType WinAnsi yes yes no 302 0 GFNAKK+PalatinoLinotype TrueType WinAnsi yes yes no 303 0 GFNAPK+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 304 0 GFNBBL+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 305 0 Jhove (Rel. 1.22.1, 2019-04-17) Date: 2023-02-16 02:39:38 CET RepresentationInformation: pmc_30407413.pdf ReportingModule: PDF-hul, Rel. 1.12.1 (2019-04-17) LastModified: 2020-08-10 03:46:06 CEST Size: 5383769 Format: PDF Version: 1.5 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 0 FreeObjects: 1 IncrementalUpdates: 0 DocumentCatalog: ViewerPreferences: HideToolbar: false HideMenubar: false HideWindowUI: false FitWindow: true CenterWindow: false DisplayDocTitle: false NonFullScreenPageMode: UseNone Direction: L2R ViewArea: CropBox ViewClip: CropBox PrintArea: CropBox PageClip: CropBox PageLayout: SinglePage PageMode: None Outlines: Item: Title: ぉのぴひはつふっぴどはのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸲ Item: Title: こふびばづのつづつぜ〴ぜ〰ぎちのはっとちののづぬぜ〴ぜ〰げづびはのちぴはひぜ〴ぜ〰ぜ〵ぜ〰こぎげぜ〵ㅜ〰ぜ〴ぜ〰いづびどでのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸳ Item: Title: いづぶどっづぜ〴ぜ〰うちぢひどっちぴどはのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸴ Item: Title: ぅへばづひどねづのぴちぬぜ〴ぜ〰ぁのちぬべびどびぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸵ Item: Title: ぃはのっぬふびどはのびぜ〴〩਼㰠⽓ 䝯呯 䐠嬲㘠〠删⽆楴䡝‾㸊㰼ਯ呹灥 偡来ਯ䍯湴敮瑳‴㔠〠刊⽒敳潵牣敳‴㐠〠刊⽍敤楡䉯砠嬰‰‵㤵⸲㜶‸㐱⸸㥝ਯ偡牥湴‵㈠〠刊⽁湮潴猠嬠㈷‰⁒′㤠〠删㌱‰⁒″㈠〠删㌳‰⁒″㐠〠删㌵‰⁒‴㌠〠删崊㸾਼㰊⽐牯摵捥爠⡇偌⁇桯獴獣物灴‹⸱〩ਯ䍲敡瑩潮䑡瑥
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