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Title:          Characterization of Carbon-Contaminated B4C-Coated Optics after Chemically Selective Cleaning with Low-Pressure RF Plasma
Subject:        Scientific Reports, doi:10.1038/s41598-018-19273-6
Keywords:       
Author:         H. Moreno Fernamp#x000E1;ndez
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     Item: 
      Title: Characterization of Carbon-Contaminated B4C-Coated Optics after Chemically Selective Cleaning with Low-Pressure RF Plasma
      Children: 
       Item: 
        Title: Experiment
        Children: 
         Item: 
          Title: Coating processes. 
          Children: 
           Item: 
            Title: B4C coating. 
           Item: 
            Title: Amorphous carbon contamination coating. 
         Item: 
          Title: Si wafer and mirror test objects and systematic approach. 
          Children: 
           Item: 
            Title: Si test wafers. 
           Item: 
            Title: Optical Test mirrors. 
         Item: 
          Title: Cleaning test setup. 
         Item: 
          Title: GV10x inductively coupled RF plasma source. 
         Item: 
          Title: B4C bulk thin film and surface characterization. 
       Item: 
        Title: Results and Discussion
        Children: 
         Item: 
          Title: O2/Ar plasma cleaning. 
          Children: 
           Item: 
            Title: X-ray Photoelectron Spectroscopy (XPS) analysis from B4C-coated Si test wafer. 
           Item: 
            Title: X-Ray Reflectometry (XRR) analysis. 
           Item: 
            Title: SEM results. 
         Item: 
          Title: H2/Ar plasma cleaning. 
          Children: 
           Item: 
            Title: X-ray Photoelectron Spectroscopy (XPS) analysis. 
           Item: 
            Title: X-Ray Reflectometry (XRR) analysis. 
           Item: 
            Title: SEM results. 
         Item: 
          Title: Pure O2 plasma cleaning. 
          Children: 
           Item: 
            Title: X-ray Photoelectron Spectroscopy (XPS) analysis. 
           Item: 
            Title: X-Ray Reflectometry (XRR) analysis. 
           Item: 
            Title: SEM results. 
         Item: 
          Title: Considerations on a-C plasma cleaning mechanisms and cleaning speed. 
       Item: 
        Title: Summary and Outlook
       Item: 
        Title: Acknowledgements
       Item: 
        Title: Figure 1 High-resolution C1s and B1s XPS spectra of the B4C-coated test wafer before (black solid lines) and after O2/Ar RF plasma cleaning (red solid lines).
       Item: 
        Title: Figure 2 XRR data from B4C-coated test mirror right after O2/Ar plasma cleaning.
       Item: 
        Title: Figure 3 Comparison of XRR total reflection data at low grazing incidence angles for a pristine B4C-coated test mirror (black line) and after a-C coating plus subsequent O2/Ar plasma cleaning (green line: formerly a-C coated area red line: non a-C coated 
       Item: 
        Title: Figure 4 SEM images of B4C-coated test wafers taken at 20 kV electron acceleration voltage with a 250 k-fold magnification: (a) Pristine B4C-coated test wafer, (b) O2/Ar-plasma cleaned – formerly a-C coated part, and (c) O2/Ar-plasma cleaned – non a-C coa
       Item: 
        Title: Figure 5 High-resolution C1s and B1s XPS spectra of the B4C-coated test wafer before (black solid lines) and after H2/Ar RF plasma cleaning (red solid lines).
       Item: 
        Title: Figure 6 XRR data from B4C-coated test mirror right after H2/Ar plasma cleaning.
       Item: 
        Title: Figure 7 Comparison of XRR total reflection data at low grazing incidence angles for a pristine B4C-coated test mirror (black line) and after a-C coating plus subsequent H2/Ar plasma cleaning (green line: formerly a-C coated area red line: non a-C coated 
       Item: 
        Title: Figure 8 SEM images of B4C-coated test wafers taken at 20 kV electron acceleration voltage with a 250 k-fold magnification after cleaning with H2/Ar plasma: (a) Formerly a-C coated part, and (b) non a-C coated part.
       Item: 
        Title: Figure 9 High-resolution C1s and B1s XPS spectra of the B4C-coated test wafer before (black solid lines) and after pure O2 RF plasma cleaning (red solid lines).
       Item: 
        Title: Figure 10 XRR data from B4C-coated test mirror after cleaning with pure O2 plasma cleaning.
       Item: 
        Title: Figure 11 Comparison of XRR total reflection data at low grazing incidence angles for a pristine B4C-coated test mirror (black line), after a-C coating (red line), and after subsequent cleaning with pure O2 plasma (green line).
       Item: 
        Title: Figure 12 SEM images of B4C-coated test wafers taken at 20 kV electron acceleration voltage with a 250k-fold magnification after cleaning with pure O2 plasma: (a) Formerly a-C coated part, and (b) non a-C coated part.
       Item: 
        Title: Table 1 Plasma parameters used for the different cleaning runs.
       Item: 
        Title: Table 2 XPS core level line assignments (“BOC” refers to boron oxy-carbides).
       Item: 
        Title: Table 3 Results from the IMD simulations of the XRR measurements as shown in Fig.
       Item: 
        Title: Table 4 Results from the IMD simulations of the XRR measurements as shown in Fig.
       Item: 
        Title: Table 5 Results from the IMD simulations of the XRR measurements as shown in Fig.
       Item: 
        Title: Table 6 Experimentally derived a-C cleaning rates for different types of plasma feedstock gases for either B4C-coated Si test wafers and Au-coated QCM crystals.
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                           <pdfaProperty:description>Conformance level of PDF/X standard</pdfaProperty:description>
                           <pdfaProperty:name>GTS_PDFXConformance</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>internal</pdfaProperty:category>
                           <pdfaProperty:description>Company creating the PDF</pdfaProperty:description>
                           <pdfaProperty:name>Company</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>internal</pdfaProperty:category>
                           <pdfaProperty:description>Date when document was last modified</pdfaProperty:description>
                           <pdfaProperty:name>SourceModified</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>internal</pdfaProperty:category>
                           <pdfaProperty:description>Mirrors crossmark:DOI</pdfaProperty:description>
                           <pdfaProperty:name>doi</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                     </rdf:Seq>
                  </pdfaSchema:property>
               </rdf:li>
               <rdf:li rdf:parseType="Resource">
                  <pdfaSchema:namespaceURI>http://www.aiim.org/pdfa/ns/id/</pdfaSchema:namespaceURI>
                  <pdfaSchema:prefix>pdfaid</pdfaSchema:prefix>
                  <pdfaSchema:schema>PDF/A ID Schema</pdfaSchema:schema>
                  <pdfaSchema:property>
                     <rdf:Seq>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>internal</pdfaProperty:category>
                           <pdfaProperty:description>Part of PDF/A standard</pdfaProperty:description>
                           <pdfaProperty:name>part</pdfaProperty:name>
                           <pdfaProperty:valueType>Integer</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>internal</pdfaProperty:category>
                           <pdfaProperty:description>Amendment of PDF/A standard</pdfaProperty:description>
                           <pdfaProperty:name>amd</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>internal</pdfaProperty:category>
                           <pdfaProperty:description>Conformance level of PDF/A standard</pdfaProperty:description>
                           <pdfaProperty:name>conformance</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                     </rdf:Seq>
                  </pdfaSchema:property>
               </rdf:li>
               <rdf:li rdf:parseType="Resource">
                  <pdfaSchema:namespaceURI>http://prismstandard.org/namespaces/basic/2.0/</pdfaSchema:namespaceURI>
                  <pdfaSchema:prefix>prism</pdfaSchema:prefix>
                  <pdfaSchema:schema>Prism</pdfaSchema:schema>
                  <pdfaSchema:property>
                     <rdf:Seq>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>external</pdfaProperty:category>
                           <pdfaProperty:description>The aggregation type specifies the unit of aggregation for a content collection. 
Comment 
PRISM recommends that the PRISM Aggregation Type Controlled Vocabulary be used to provide values for this element. 
Note: PRISM recommends against the use of the #other value currently allowed in this controlled vocabulary. In lieu of using #other please reach out to the PRISM group at info@prismstandard.org to request addition of your term to the Aggregation Type Controlled Vocabulary. 

</pdfaProperty:description>
                           <pdfaProperty:name>aggregationType</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>external</pdfaProperty:category>
                           <pdfaProperty:description>Copyright </pdfaProperty:description>
                           <pdfaProperty:name>copyright</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>external</pdfaProperty:category>
                           <pdfaProperty:description>The Digital Object Identifier for the article.
The DOI may also be used as the dc:identifier. If used as a dc:identifier, the URI form should be captured, and the bare identifier should also be captured using prism:doi. If an alternate unique identifier is used as the required dc:identifier, then the DOI should be specified as a bare identifier within prism:doi only. 
If the URL associated with a DOI is to be specified, then prism:url may be used in conjunction with prism:doi in order to provide the service endpoint (i.e. the URL). 
</pdfaProperty:description>
                           <pdfaProperty:name>doi</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>external</pdfaProperty:category>
                           <pdfaProperty:description>ISSN for an electronic version of the issue in which the resource occurs. 
Permits publishers to include a second ISSN, identifying an electronic version of the issue in which the resource occurs (therefore e(lectronic)Issn. If used, prism:eIssn MUST contain the ISSN of the electronic version. See prism:issn. 
</pdfaProperty:description>
                           <pdfaProperty:name>issn</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>external</pdfaProperty:category>
                           <pdfaProperty:description>Title of the magazine, or other publication, in which a resource was/will be published. 
Typically this will be used to provide the name of the magazine an article appeared in as metadata for the article, along with information such as the article title, the publisher, volume, number, and cover date. 

Note: Publication name can be used to differentiate between a print magazine and the online version if the names are different such as “magazine” and “magazine.com.” 
</pdfaProperty:description>
                           <pdfaProperty:name>publicationName</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>external</pdfaProperty:category>
                           <pdfaProperty:description>This element provides the url for an article or unit of content. 
The attribute platform is optionally allowed for situations in which multiple URLs must be specified. PRISM recommends that a subset of the PCV platform values, namely “mobile” and “web”, be used in conjunction with this element. 
NOTE: PRISM recommends against the use of the #other value allowed in the PRISM Platform controlled vocabulary. In lieu of using #other please reach out to the PRISM group at prism-wg@yahoogroups.com to request addition of your term to the Platform Controlled Vocabulary. 
</pdfaProperty:description>
                           <pdfaProperty:name>url</pdfaProperty:name>
                           <pdfaProperty:valueType>Text</pdfaProperty:valueType>
                        </rdf:li>
                     </rdf:Seq>
                  </pdfaSchema:property>
               </rdf:li>
               <rdf:li rdf:parseType="Resource">
                  <pdfaSchema:namespaceURI>http://www.niso.org/schemas/jav/1.0/</pdfaSchema:namespaceURI>
                  <pdfaSchema:prefix>jav</pdfaSchema:prefix>
                  <pdfaSchema:schema>NISO</pdfaSchema:schema>
                  <pdfaSchema:property>
                     <rdf:Seq>
                        <rdf:li rdf:parseType="Resource">
                           <pdfaProperty:category>external</pdfaProperty:category>
                           <pdfaProperty:description>Values for Journal Article Version are one of the following:
AO = Author’s Original
SMUR = Submitted Manuscript Under Review
AM = Accepted Manuscript
P = Proof
VoR = Version of Record
CVoR = Corrected Version of Record
EVoR = Enhanced Version of Record</pdfaProperty:description>
                           <pdfaProperty:name>journal_article_version</pdfaProperty:name>
                           <pdfaProperty:valueType>Closed Choice of Text</pdfaProperty:valueType>
                        </rdf:li>
                     </rdf:Seq>
                  </pdfaSchema:property>
               </rdf:li>
            </rdf:Bag>
         </pdfaExtension:schemas>
      </rdf:Description>
   </rdf:RDF>
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