0de6b55e37ef1011e583644ca450dd47 pmc_30405006.pdf db32423c7292aedf55c3c3f57f8e44ab40f88e2e pmc_30405006.pdf 17a721aabfd3b7e640d3bbb973f10b1b3cb30f94120ec1a651cd523898965990 pmc_30405006.pdf Title: High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer Subject: In this paper, a seesaw torsional relay monolithically integrated in a standard 0.35 m complementary metal oxide semiconductor (CMOS) technology is presented. The seesaw relay is fabricated using the Back-End-Of-Line (BEOL) layers available, specifically using the tungsten VIA3 layer of a 0.35 m CMOS technology. Three different contact materials are studied to discriminate which is the most adequate as a mechanical relay. The robustness of the relay is proved, and its main characteristics as a relay for the three different contact interfaces are provided. The seesaw relay is capable of a double hysteretic switching cycle, providing compactness for mechanical logic processing. The low contact resistance achieved with the TiN/W mechanical contact with high cycling life time is competitive in comparison with the state-of-the art. Keywords: MEMS relays; MEMS switches; mechanical relays; CMOS-MEMS; MEMS Author: Martín Riverola, Francesc Torres, Arantxa Uranga and Núria Barniol Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.18 CreationDate: Wed Nov 7 05:25:08 2018 CET ModDate: Wed Nov 7 05:25:08 2018 CET Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 13 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 10739817 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- LCLEMS+URWPalladioL-Ital Type 1 Custom yes yes no 83 0 WPCBFF+URWPalladioL-Bold Type 1 Custom yes yes no 84 0 LPYGPS+VnURWPalladioL-Bold Type 1 Custom yes yes no 85 0 TWBZUB+URWPalladioL-Roma Type 1 Custom yes yes no 86 0 GHPNQX+VnURWPalladioL Type 1 Custom yes yes no 87 0 OVNEXW+EURM10 Type 1 Builtin yes yes no 88 0 SPXLNH+PazoMath Type 1 Builtin yes yes no 89 0 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