cf5378a02e23671a27658f33c402252c sens_a2019v19n6.pdf 4ec46e1f252b3cb5803c4b2cee6647599732dc73 sens_a2019v19n6.pdf 30bd698bc5cf4f410a78ae46f5023a8c4b85e97af2256866465b10002d6dac42 sens_a2019v19n6.pdf Title: Thermoelectric Photosensor Based on Ultrathin Single-Crystalline Si Films "2279 Subject: Ultrathin Si films have a reduced thermal conductivity in comparison to Si bulk due to phonon scattering at the surfaces. Furthermore, the small thickness guarantees a reduced thermal mass (in the J/K range), which opens up the possibility of developing thermal sensors with a high sensitivity. Based on these premises, a thermoelectric (TE) microsensor based on ultrathin suspended Si films was developed and used as a thermal photosensor. The photoresponse of the device was evaluated with an argon laser ( = 457 nm) with a variable power ranging from 0 to 10 mW in air at atmospheric pressure, with laser diodes at 406 nm, 520 nm and 638 nm wavelengths, and fixed powers in high vacuum conditions. The responsivity per unit area, response time () and detectivity (D*) of the device were determined in air at ambient pressure, being 2.6 107 V/Wm2, ~4.3 ms and 2.86 107 cmHz(1/2)W- 1 , respectively. Temperature differences up to 30 K between the central hot region and the Si frame were achieved during open-circuit voltage measurements, with and without laser diodes. During illumination, the photogeneration of carriers caused a slight reduction of the Seebeck coefficient, which did not significantly change the sensitivity of the device. Moreover, the measurements performed with light beam chopped at different frequencies evidenced the quick response of the device. The temperature gradients applied to the thermoelectric Si legs were corrected using finite element modeling (FEM) due to the non-flat temperature profile generated during the experiments. Keywords: photosensor; thermoelectric effect; microsensor Author: Gustavo Gonçalves Dalkiranis, Pablo Ferrando-Villalba, Aitor Lopeandia-Fernández, Llibertat Abad-Muñoz and Javier Rodríguez-Viejo Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.17 CreationDate: Fri Mar 22 16:20:47 2019 CET ModDate: Fri Mar 22 16:20:47 2019 CET Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 8 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 1862911 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- KYDFEJ+URWPalladioL-Ital Type 1 Custom yes yes no 46 0 UJPZWE+URWPalladioL-Bold Type 1 Custom yes yes no 47 0 SSNIUI+VnURWPalladioL-Bold Type 1 Custom yes yes no 48 0 XELYDD+URWPalladioL-Roma Type 1 Custom yes yes no 49 0 BFTPJC+VnURWPalladioL Type 1 Custom yes yes no 50 0 XGOHGS+EURM10 Type 1 Builtin yes yes no 51 0 BXJJEL+CMSY10 Type 1 Builtin yes yes no 52 0 CZKGAS+CMR10 Type 1 Builtin yes yes no 53 0 RVSEMT+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 58 0 MCBCCI+SourceSansRoman-Regular Type 1C Custom yes yes no 71 0 MCBCCM+SourceSansRoman.613wght Type 1C Custom yes yes no 72 0 MCBCCO+SourceSansRoman-Bold Type 1C Custom yes yes no 73 0 ROWTUD+PazoMath Type 1 Builtin yes yes no 100 0 BCDIEE+PalatinoLinotype-Roman CID TrueType Identity-H yes yes yes 123 0 BCDFEE+PalatinoLinotype-Italic TrueType WinAnsi yes yes no 124 0 BCDGEE+PalatinoLinotype-Bold TrueType WinAnsi yes yes no 125 0 BCDEEE+PalatinoLinotype-Roman TrueType WinAnsi yes yes no 126 0 Arial-BoldMT TrueType WinAnsi no no no 127 0 DXJXEP+CMEX10 Type 1 Builtin yes yes no 167 0 BCDEEE+PalatinoLinotype-Roman TrueType WinAnsi yes yes no 173 0 BCDFEE+PalatinoLinotype-Italic TrueType WinAnsi yes yes no 174 0 BCDGEE+PalatinoLinotype-Bold TrueType WinAnsi yes yes no 175 0 BCDIEE+PalatinoLinotype-Roman CID TrueType Identity-H yes yes yes 176 0 BCDJEE+CambriaMath CID TrueType Identity-H yes yes yes 177 0 TimesNewRomanPSMT TrueType WinAnsi no no no 178 0 SymbolMT CID TrueType Identity-H yes no yes 199 0 ArialMT TrueType WinAnsi no no no 200 0 BCDEEE+PalatinoLinotype-Roman TrueType WinAnsi yes yes no 238 0 BCDFEE+PalatinoLinotype-Italic TrueType WinAnsi yes yes no 239 0 BCDGEE+PalatinoLinotype-Bold TrueType WinAnsi yes yes no 240 0 ArialMT TrueType WinAnsi no no no 241 0 TimesNewRomanPSMT TrueType WinAnsi no no no 242 0 SymbolMT CID TrueType Identity-H yes no yes 273 0 BCDEEE+PalatinoLinotype-Roman TrueType WinAnsi yes yes no 283 0 BCDFEE+PalatinoLinotype-Italic TrueType WinAnsi yes yes no 284 0 BCDGEE+PalatinoLinotype-Bold TrueType WinAnsi yes yes no 285 0 ArialMT TrueType WinAnsi no no no 286 0 TimesNewRomanPSMT TrueType WinAnsi no no no 287 0 SymbolMT CID TrueType Identity-H yes no yes 318 0 BCDEEE+PalatinoLinotype-Roman TrueType WinAnsi yes yes no 336 0 BCDFEE+PalatinoLinotype-Italic TrueType WinAnsi yes yes no 337 0 BCDGEE+PalatinoLinotype-Bold TrueType WinAnsi yes yes no 338 0 BCDIEE+PalatinoLinotype-Roman CID TrueType Identity-H yes yes yes 339 0 BCDJEE+CambriaMath CID TrueType Identity-H yes yes yes 340 0 TimesNewRomanPSMT TrueType WinAnsi no no no 341 0 SymbolMT CID TrueType Identity-H yes no yes 362 0 ArialMT TrueType WinAnsi no no no 363 0 java.lang.ClassCastException: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject cannot be cast to edu.harvard.hul.ois.jhove.module.pdf.PdfDictionary at edu.harvard.hul.ois.jhove.module.PdfModule.readDocCatalogDict(PdfModule.java:1284) at edu.harvard.hul.ois.jhove.module.PdfModule.parse(PdfModule.java:525) at edu.harvard.hul.ois.jhove.JhoveBase.processFile(JhoveBase.java:825) at edu.harvard.hul.ois.jhove.JhoveBase.process(JhoveBase.java:614) at edu.harvard.hul.ois.jhove.JhoveBase.dispatch(JhoveBase.java:465) at Jhove.main(Jhove.java:296) Jhove (Rel. 1.6, 2011-01-04) Date: 2019-07-20 05:21:46 CEST RepresentationInformation: sens_a2019v19n6.pdf ReportingModule: BYTESTREAM, Rel. 1.3 (2007-04-10) LastModified: 2019-04-29 12:02:37 CEST Size: 1862911 Format: bytestream Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/octet-stream Checksum: c4757d84 Type: CRC32 Checksum: cf5378a02e23671a27658f33c402252c Type: MD5 Checksum: 4ec46e1f252b3cb5803c4b2cee6647599732dc73 Type: SHA-1