8cf29ac9fe18d459b6c6cc41f20d7c22 pmc_30791460.pdf c739789ef0b92e7d0db82b4dc2bcc637dc4c503a pmc_30791460.pdf 23f6c8bf6b9f9562d6c3ab262635014459d260b091d0b8154f35b77021ee7ada pmc_30791460.pdf Title: Luminescence from Si-Implanted SiO2-Si3N4 Nano Bi-Layers for Electrophotonic Integrated Si Light Sources Subject: In this paper, we present structural and luminescence studies of silicon-rich silicon oxide (SRO) and SRO-Si3N4 bi-layers for integration in emitter-waveguide pairs that can be used for photonic lab-on-a-chip sensing applications. The results from bi and mono layers are also compared. Two clearly separated emission bands are respectively attributed to a combination of defect and quantum confinement–related emission in the SRO, as well as to defects found in an oxynitride transition zone that forms between the oxide and the nitride films, while ruling out quantum-confinement phenomena in the silicon nitride. Keywords: integrated photonics; electrophotonics; SRO; oxynitride; photoluminescence; XPS Author: A. A. González-Fernández, Joan Juvert, Mariano Aceves-Mijares and Carlos Domínguez Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.18 CreationDate: Tue Feb 19 13:27:33 2019 CET ModDate: Tue Feb 19 13:27:33 2019 CET Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 9 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 565594 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- KCHTFF+URWPalladioL-Ital Type 1 Custom yes yes no 56 0 BKYSKX+URWPalladioL-Bold Type 1 Custom yes yes no 57 0 JWYRIJ+URWPalladioL-Roma Type 1 Custom yes yes no 58 0 RVSEMT+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 63 0 MCBCCI+SourceSansRoman-Regular Type 1C Custom yes yes no 80 0 MCBCCM+SourceSansRoman.613wght Type 1C Custom yes yes no 81 0 MCBCCO+SourceSansRoman-Bold Type 1C Custom yes yes no 82 0 RRMVKV+CMSY10 Type 1 Builtin yes 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