cf5378a02e23671a27658f33c402252c pmc_30909519.pdf 4ec46e1f252b3cb5803c4b2cee6647599732dc73 pmc_30909519.pdf 30bd698bc5cf4f410a78ae46f5023a8c4b85e97af2256866465b10002d6dac42 pmc_30909519.pdf Title: Thermoelectric Photosensor Based on Ultrathin Single-Crystalline Si Films "2279 Subject: Ultrathin Si films have a reduced thermal conductivity in comparison to Si bulk due to phonon scattering at the surfaces. Furthermore, the small thickness guarantees a reduced thermal mass (in the J/K range), which opens up the possibility of developing thermal sensors with a high sensitivity. Based on these premises, a thermoelectric (TE) microsensor based on ultrathin suspended Si films was developed and used as a thermal photosensor. The photoresponse of the device was evaluated with an argon laser ( = 457 nm) with a variable power ranging from 0 to 10 mW in air at atmospheric pressure, with laser diodes at 406 nm, 520 nm and 638 nm wavelengths, and fixed powers in high vacuum conditions. The responsivity per unit area, response time () and detectivity (D*) of the device were determined in air at ambient pressure, being 2.6 107 V/Wm2, ~4.3 ms and 2.86 107 cmHz(1/2)W- 1 , respectively. Temperature differences up to 30 K between the central hot region and the Si frame were achieved during open-circuit voltage measurements, with and without laser diodes. During illumination, the photogeneration of carriers caused a slight reduction of the Seebeck coefficient, which did not significantly change the sensitivity of the device. Moreover, the measurements performed with light beam chopped at different frequencies evidenced the quick response of the device. The temperature gradients applied to the thermoelectric Si legs were corrected using finite element modeling (FEM) due to the non-flat temperature profile generated during the experiments. Keywords: photosensor; thermoelectric effect; microsensor Author: Gustavo Gonçalves Dalkiranis, Pablo Ferrando-Villalba, Aitor Lopeandia-Fernández, Llibertat Abad-Muñoz and Javier Rodríguez-Viejo Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.17 CreationDate: Fri Mar 22 16:20:47 2019 CET ModDate: Fri Mar 22 16:20:47 2019 CET Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 8 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 1862911 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- KYDFEJ+URWPalladioL-Ital Type 1 Custom yes yes no 46 0 UJPZWE+URWPalladioL-Bold Type 1 Custom yes yes no 47 0 SSNIUI+VnURWPalladioL-Bold Type 1 Custom yes yes no 48 0 XELYDD+URWPalladioL-Roma Type 1 Custom yes yes no 49 0 BFTPJC+VnURWPalladioL Type 1 Custom yes yes no 50 0 XGOHGS+EURM10 Type 1 Builtin yes yes no 51 0 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