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INTRODUCTION Destination: 1 Item: Title: II. EXPERIMENT Destination: 1 Item: Title: III. RESULTS AND DISCUSSION Destination: 1 Children: Item: Title: A. Configuration of the as-formed nanopillars Destination: 1 Item: Title: B. Influence of sample temperature, processing time, and ion beam energy on nanopillar formation Destination: 1 Item: Title: C. Influence of the ion beam incidence angle on the geometry and spatial arrangement of the (c-GaInP) nanopillars Destination: 1 Item: Title: D. Tentative model for nanopillar formation Destination: 1 Item: Title: E. Photoluminescence and Raman characterization Destination: 1 Item: Title: IV. SUMMARY AND CONCLUSIONS Destination: 1 Item: Title: References Destination: 1 Info: Title: Ion bombardment induced formation of self-organized wafer-scale GaInP nanopillar assemblies Subject: Journal of Vacuum Science & Technology B 2020.38:012801 Creator: Arbortext Advanced Print Publisher 10.0.1465/W Unicode Producer: iText 4.2.0 by 1T3XT CreationDate: Wed Dec 18 17:02:49 CET 2019 ModDate: Fri Dec 04 04:11:28 CET 2020 ID: 0x5fa4b4b37a8f442f57a137330eae3e69, 0xaa630018faa3aebdebdd02464c8ca441 Filters: FilterPipeline: FlateDecode FilterPipeline: DCTDecode Images: Image: NisoImageMetadata: FormatName: image/png ImageWidth: 16 ImageHeight: 16 BitsPerSample: 8 BitsPerSampleUnit: integer Filter: FlateDecode ColorSpace: ICCBased Name: Im5 Image: NisoImageMetadata: FormatName: image/png ImageWidth: 16 ImageHeight: 16 ColorSpace: black is zero BitsPerSample: 8 BitsPerSampleUnit: integer Filter: FlateDecode Name: Im4 Image: NisoImageMetadata: FormatName: image/png ImageWidth: 120 ImageHeight: 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M. Sotomayor Torres Srinivasan Anand J. Vac. Sci. Technol. 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Annotation: Subtype: Link Rect: 220, 681, 297, 689 Annotation: Subtype: Link Rect: 243, 662, 284, 670 Annotation: Subtype: Link Rect: 213, 643, 260, 651 Annotation: Subtype: Link Rect: 86, 615, 108, 622 Annotation: Subtype: Link Rect: 208, 605, 258, 613 Annotation: Subtype: Link Rect: 249, 586, 297, 594 Annotation: Subtype: Link Rect: 259, 567, 297, 575 Annotation: Subtype: Link Rect: 255, 548, 297, 556 Annotation: Subtype: Link Rect: 163, 529, 200, 537 Annotation: Subtype: Link Rect: 273, 520, 296, 527 Annotation: Subtype: Link Rect: 53, 510, 68, 518 Annotation: Subtype: Link Rect: 205, 501, 265, 508 Annotation: Subtype: Link Rect: 214, 472, 284, 480 Annotation: Subtype: Link Rect: 118, 444, 179, 451 Annotation: Subtype: Link Rect: 100, 425, 132, 432 Annotation: Subtype: Link Rect: 169, 415, 281, 423 Annotation: Subtype: Link Rect: 152, 396, 202, 404 Annotation: Subtype: Link Rect: 210, 387, 285, 394 Annotation: Subtype: Link Rect: 483, 700, 529, 708 Annotation: Subtype: Link Rect: 382, 681, 432, 689 Annotation: Subtype: Link Rect: 487, 672, 526, 679 Annotation: Subtype: Link Rect: 503, 653, 558, 660 Annotation: Subtype: Link Rect: 314, 643, 342, 651 Annotation: Subtype: Link Rect: 428, 634, 500, 641 Annotation: Subtype: Link Rect: 343, 615, 403, 622 Annotation: Subtype: Link Rect: 403, 596, 558, 603 Annotation: Subtype: Link Rect: 314, 586, 337, 594 Annotation: Subtype: Link Rect: 458, 577, 497, 584 Annotation: Subtype: Link Rect: 426, 567, 466, 575 Annotation: Subtype: Link Rect: 467, 558, 558, 565 Annotation: Subtype: Link Rect: 314, 548, 333, 556 Annotation: Subtype: Link Rect: 415, 539, 480, 546 Annotation: Subtype: Link Rect: 527, 529, 558, 537 Annotation: Subtype: Link Rect: 314, 520, 345, 527 Annotation: Subtype: Link Rect: 507, 510, 533, 518 Annotation: Subtype: Link Rect: 399, 491, 425, 499 Annotation: Subtype: Link Rect: 464, 482, 508, 489 Annotation: Subtype: Link Rect: 523, 472, 558, 480 Annotation: Subtype: Link Rect: 314, 463, 328, 470 Annotation: Subtype: Link Rect: 361, 444, 406, 451 Annotation: Subtype: Link Rect: 414, 434, 433, 442 Annotation: Subtype: Link Rect: 414, 434, 515, 442 Annotation: Subtype: Link Rect: 447, 752, 546, 761 Checksum: ef43c8a7 Type: CRC32 Checksum: 2acd710748467e0db56fa52db1d3d63f Type: MD5 Checksum: 0e688d95fc5cbc790a7bd095b83dc2b8b3179157 Type: SHA-1