67bfc9236262890c4e8d042048491951 pmc_33086559.pdf 63ef7f22de7ee7490bf2dea2aceca1e9af5a71cb pmc_33086559.pdf b6639da61923095ed2b0ce89a55797fc35a816dcf89736e22c64ea3b5fa1a434 pmc_33086559.pdf Title: A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation Subject: Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed as a replacement for magnetometers currently used in consumer electronics market. Being MEMS devices, they can be manufactured in the same die as accelerometers and gyroscopes, greatly reducing current solutions volume and costs. However, they still present low sensitivities and large offsets that hinder their performance. In this article, a 2-axis out-of-plane, lateral field sensing, CMOS-MEMS magnetometer designed using the Back-End-Of-Line (BEOL) metal and oxide layers of a standard CMOS (Complementary Metal–Oxide–Semiconductor) process is proposed. As a result, its integration in the same die area, side-by-side, not only with other MEMS devices, but with the readout electronics is possible. A shielding structure is proposed that cancels out the offset frequently reported in this kind of sensors. Full-wafer device characterization has been performed, which provides valuable information on device yield and performance. The proposed device has a minimum yield of 85.7% with a good uniformity of the resonance frequency fr = 56.8 kHz, fr = 5.1 kHz and quality factor Q = 7.3, Q = 1.6 at ambient pressure. Device sensitivity to magnetic field is 37.6 fAT-1 at P = 1130 Pa when driven with I = 1 mApp. Keywords: MEMS; magnetic sensor; magnetometer; Lorentz-force; offset suppression; micromachined Resonator; micromechanical oscillator Author: Josep Maria Sánchez-Chiva, Juan Valle, Daniel Fernández, Jordi Madrenas Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.18 CreationDate: Thu Oct 22 03:33:40 2020 CEST ModDate: Thu Oct 22 03:43:41 2020 CEST Custom Metadata: no Metadata Stream: no Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 20 Encrypted: no Page size: 612 x 792 pts (letter) Page rot: 0 File size: 9029652 bytes Optimized: no PDF version: 1.7 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- DWEIJC+URWPalladioL-Ital Type 1 Custom yes yes no 10 0 SWGZOW+URWPalladioL-Bold Type 1 Custom yes yes no 15 0 FBEOXT+URWPalladioL-Roma Type 1 Custom yes yes no 19 0 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Custom yes yes no 351 0 GPAHSM+DejaVuSans TrueType WinAnsi yes yes yes 361 0 Jhove (Rel. 1.28.0, 2023-05-18) Date: 2024-10-02 04:18:10 CEST RepresentationInformation: pmc_33086559.pdf ReportingModule: PDF-hul, Rel. 1.12.4 (2023-03-16) LastModified: 2023-03-31 11:43:30 CEST Size: 9029652 Format: PDF Version: 1.7 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 575 FreeObjects: 35 IncrementalUpdates: 0 DocumentCatalog: PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: Introduction Destination: section.1 Item: Title: Device Working Principle Destination: section.2 Children: Item: Title: Device Characterization Destination: subsection.2.1 Item: Title: Offset Problems in Lorentz-Force Magnetometers: State of the Art Destination: section.3 Children: Item: Title: Offset Arising from Voltage Driving Destination: subsection.3.1 Item: Title: Offset Arising from Current Driving Destination: subsection.3.2 Item: Title: Total Offset Destination: subsection.3.3 Item: Title: Proposed Device Destination: section.4 Item: Title: Experimental Results Destination: section.5 Children: Item: Title: Measurement Setups Destination: subsection.5.1 Children: Item: Title: Wafer Level Batch Measurements Destination: subsubsection.5.1.1 Item: Title: Packaged Sample Vacuum Measurements Destination: subsubsection.5.1.2 Item: Title: Thermal Characterization Destination: subsubsection.5.1.3 Item: Title: Optical Analysis Destination: subsection.5.2 Item: Title: Capacitance and C-V Variation Measurements Destination: subsection.5.3 Item: Title: Resonance Measurements at Ambient Pressure Destination: subsection.5.4 Item: Title: Current Driving to Sense Node Capacitive Coupling Destination: subsection.5.5 Item: Title: Device Sensitivity to Magnetic Field Destination: subsection.5.6 Item: Title: Device Sensitivity to Temperature Destination: subsection.5.7 Item: Title: Device Sensitivity to Pressure Destination: subsection.5.8 Item: Title: Discussion Destination: section.6 Children: Item: Title: Figures Recalculation Destination: subsection.6.1 Item: Title: BEOL Metal Layers Curvature Destination: subsection.6.2 Item: Title: Temperature Variations Destination: subsection.6.3 Item: Title: Conclusions Destination: section.7 Item: Title: References Destination: section.7 Info: Title: A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation Author: Josep Maria Sánchez-Chiva, Juan Valle, Daniel Fernández, Jordi Madrenas Subject: Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed as a replacement for magnetometers currently used in consumer electronics market. Being MEMS devices, they can be manufactured in the same die as accelerometers and gyroscopes, greatly reducing current solutions volume and costs. However, they still present low sensitivities and large offsets that hinder their performance. In this article, a 2-axis out-of-plane, lateral field sensing, CMOS-MEMS magnetometer designed using the Back-End-Of-Line (BEOL) metal and oxide layers of a standard CMOS (Complementary Metal Oxide Semiconductor) process is proposed. As a result, its integration in the same die area, side-by-side, not only with other MEMS devices, but with the readout electronics is possible. A shielding structure is proposed that cancels out the offset frequently reported in this kind of sensors. Full-wafer device characterization has been performed, which provides valuable information on device yield and performance. The proposed device has a minimum yield of 85.7% with a good uniformity of the resonance frequency fr = 56.8 kHz, fr = 5.1 kHz and quality factor Q = 7.3, Q = 1.6 at ambient pressure. 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