d458ff1e780f2eb8159be640c568e0f3 pmc_33096908.pdf 13d9591d3f0920245345a97ead0dc2ec06109dde pmc_33096908.pdf 0fdd6c3ae26fd1737b9eed9f5d769dcd2f4a2e51283877efcff7a39131b61f18 pmc_33096908.pdf Title: Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices Subject: Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that has attracted high interest in recent years due to its inherent simplicity, high throughput, low cost and potential for sub-10 nm resolution. In this paper, we review the main principles of directed self-assembly of block copolymers and give a brief overview of some of the most extended applications. We present a novel fabrication route based on the introduction of directed self-assembly of block copolymers as a patterning option for the fabrication of nanoelectromechanical systems. As a proof of concept, we demonstrate the fabrication of suspended silicon membranes clamped by dense arrays of single-crystal silicon nanowires of sub-10 nm diameter. Resulting devices can be further developed for building up high-sensitive mass sensors based on nanomechanical resonators. Keywords: block copolymers; directed self-assembly; graphoepitaxy; nanolithography; nanomechanical devices; nanowires Author: Christian Pinto-Gómez, Francesc Pérez-Murano, Joan Bausells, Luis Guillermo Villanueva and Marta Fernández-Regúlez Creator: LaTeX with hyperref Producer: MiKTeX pdfTeX-1.40.21 CreationDate: Wed Oct 21 16:01:54 2020 CEST ModDate: Wed Oct 21 16:01:54 2020 CEST Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 20 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 3224571 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- ARPGWS+URWPalladioL-Ital Type 1 Custom yes yes no 98 0 JHQVUJ+URWPalladioL-Bold Type 1 Custom yes yes no 99 0 YUQXUW+VnURWPalladioL-Bold Type 1 Custom yes yes no 100 0 UIRKUE+URWPalladioL-Roma Type 1 Custom yes yes no 101 0 DRYAID+VnURWPalladioL Type 1 Custom yes yes no 102 0 YIJSCU+Rpxr Type 1 Builtin yes yes no 103 0 TLFMRE+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 108 0 MCBCCI+SourceSansRoman-Regular Type 1C Custom yes yes no 125 0 MCBCCM+SourceSansRoman.613wght Type 1C Custom yes yes no 126 0 MCBCCO+SourceSansRoman-Bold Type 1C Custom yes yes no 127 0 ZWPIOR+EURM10 Type 1 Builtin yes yes no 178 0 CHKUVT+Pxsy Type 1 Builtin yes yes no 409 0 YWGLGW+Rpxi Type 1 Builtin yes yes no 637 0 VSHNAE+Rpcxr Type 1 Builtin yes yes no 718 0 Jhove (Rel. 1.22.1, 2019-04-17) Date: 2023-01-13 02:33:28 CET RepresentationInformation: pmc_33096908.pdf ReportingModule: PDF-hul, Rel. 1.12.1 (2019-04-17) LastModified: 2020-11-09 03:37:07 CET Size: 3224571 Format: PDF Version: 1.5 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 803 FreeObjects: 1 IncrementalUpdates: 0 DocumentCatalog: ViewerPreferences: HideToolbar: false HideMenubar: false HideWindowUI: false FitWindow: true CenterWindow: false DisplayDocTitle: false NonFullScreenPageMode: UseNone Direction: L2R ViewArea: CropBox ViewClip: CropBox PrintArea: CropBox PageClip: CropBox PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: ぉのぴひはつふっぴどはのぜ〴〩੥湤潢樊㠠〠潢樊㰼 匠⽇潔漠⽄
獥捴楯渮㈩‾㸊敮摯扪਱ㄠ〠潢樊⡜㌷㙜㌷㝜〰ぐひどのっどばぬづびぜ〴ぜ〰はてぜ〴ぜ〰ぴとづぜ〴ぜ〰いこぁぜ〴ぜ〰はてぜ〴ぜ〰あぬはっにぜ〴ぜ〰ぃはばはぬべねづひびぜ〴〩੥湤潢樊ㄲ‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮ㄩ‾㸊敮摯扪਱㔠〠潢樊⡜㌷㙜㌷㝜〰ぐとちびづぜ〴ぜ〰こづでひづでちぴどはのぜ〴ぜ〰どのぜ〴ぜ〰いどぢぬはっにぜ〴ぜ〰ぃはばはぬべねづひびぜ〴〩੥湤潢樊ㄶ‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㈩‾㸊敮摯扪਱㤠〠潢樊⡜㌷㙜㌷㝜〰こづぬて〭ぁびびづねぢぬべぜ〴ぜ〰はのぜ〴ぜ〰ごとどのぜ〴ぜ〰うどぬねびぜ〴〩੥湤潢樊㈰‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㌩‾㸊敮摯扪ਲ㌠〠潢樊⡜㌷㙜㌷㝜〰ぅのちぢぬどのでぜ〴ぜ〰がどぴとはでひちばとべ〺ぜ〴ぜ〰いこぁぜ〴ぜ〰はてぜ〴ぜ〰あぃぐびぜ〴〩੥湤潢樊㈴‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㐩‾㸊敮摯扪ਲ㜠〠潢樊⡜㌷㙜㌷㝜〰ぐひづびづのぴぜ〴ぜ〰いどひづっぴどはのびぜ〴〩੥湤潢樊㈸‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸳ Item: Title: ぐひどのっどばぬづびぜ〴ぜ〰はてぜ〴ぜ〰ぴとづぜ〴ぜ〰いこぁぜ〴ぜ〰はてぜ〴ぜ〰あぬはっにぜ〴ぜ〰ぃはばはぬべねづひびぜ〴〩੥湤潢樊ㄲ‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮ㄩ‾㸊敮摯扪਱㔠〠潢樊⡜㌷㙜㌷㝜〰ぐとちびづぜ〴ぜ〰こづでひづでちぴどはのぜ〴ぜ〰どのぜ〴ぜ〰いどぢぬはっにぜ〴ぜ〰ぃはばはぬべねづひびぜ〴〩੥湤潢樊ㄶ‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㈩‾㸊敮摯扪਱㤠〠潢樊⡜㌷㙜㌷㝜〰こづぬて〭ぁびびづねぢぬべぜ〴ぜ〰はのぜ〴ぜ〰ごとどのぜ〴ぜ〰うどぬねびぜ〴〩੥湤潢樊㈰‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㌩‾㸊敮摯扪ਲ㌠〠潢樊⡜㌷㙜㌷㝜〰ぅのちぢぬどのでぜ〴ぜ〰がどぴとはでひちばとべ〺ぜ〴ぜ〰いこぁぜ〴ぜ〰はてぜ〴ぜ〰あぃぐびぜ〴〩੥湤潢樊㈴‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㐩‾㸊敮摯扪ਲ㜠〠潢樊⡜㌷㙜㌷㝜〰ぐひづびづのぴぜ〴ぜ〰いどひづっぴどはのびぜ〴〩੥湤潢樊㈸‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸳ Children: Item: Title: ぐとちびづぜ〴ぜ〰こづでひづでちぴどはのぜ〴ぜ〰どのぜ〴ぜ〰いどぢぬはっにぜ〴ぜ〰ぃはばはぬべねづひびぜ〴〩੥湤潢樊ㄶ‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㈩‾㸊敮摯扪਱㤠〠潢樊⡜㌷㙜㌷㝜〰こづぬて〭ぁびびづねぢぬべぜ〴ぜ〰はのぜ〴ぜ〰ごとどのぜ〴ぜ〰うどぬねびぜ〴〩੥湤潢樊㈰‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㌩‾㸊敮摯扪ਲ㌠〠潢樊⡜㌷㙜㌷㝜〰ぅのちぢぬどのでぜ〴ぜ〰がどぴとはでひちばとべ〺ぜ〴ぜ〰いこぁぜ〴ぜ〰はてぜ〴ぜ〰あぃぐびぜ〴〩੥湤潢樊㈴‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㐩‾㸊敮摯扪ਲ㜠〠潢樊⡜㌷㙜㌷㝜〰ぐひづびづのぴぜ〴ぜ〰いどひづっぴどはのびぜ〴〩੥湤潢樊㈸‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸳ Item: Title: こづぬて〭ぁびびづねぢぬべぜ〴ぜ〰はのぜ〴ぜ〰ごとどのぜ〴ぜ〰うどぬねびぜ〴〩੥湤潢樊㈰‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㌩‾㸊敮摯扪ਲ㌠〠潢樊⡜㌷㙜㌷㝜〰ぅのちぢぬどのでぜ〴ぜ〰がどぴとはでひちばとべ〺ぜ〴ぜ〰いこぁぜ〴ぜ〰はてぜ〴ぜ〰あぃぐびぜ〴〩੥湤潢樊㈴‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㐩‾㸊敮摯扪ਲ㜠〠潢樊⡜㌷㙜㌷㝜〰ぐひづびづのぴぜ〴ぜ〰いどひづっぴどはのびぜ〴〩੥湤潢樊㈸‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸳ Item: Title: ぅのちぢぬどのでぜ〴ぜ〰がどぴとはでひちばとべ〺ぜ〴ぜ〰いこぁぜ〴ぜ〰はてぜ〴ぜ〰あぃぐびぜ〴〩੥湤潢樊㈴‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㐩‾㸊敮摯扪ਲ㜠〠潢樊⡜㌷㙜㌷㝜〰ぐひづびづのぴぜ〴ぜ〰いどひづっぴどはのびぜ〴〩੥湤潢樊㈸‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸳ Item: Title: ぐひづびづのぴぜ〴ぜ〰いどひづっぴどはのびぜ〴〩੥湤潢樊㈸‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸳ Item: Title: あぬはっにぜ〴ぜ〰ぃはばはぬべねづひびぜ〴ぜ〰てはひぜ〴ぜ〰ぴとづぜ〴ぜ〰うちぢひどっちぴどはのぜ〴ぜ〰はてぜ〴ぜ〰うふのっぴどはのちぬぜ〴ぜ〰いづぶどっづびぜ〴〩੥湤潢樊㌲‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸴ Item: Title: いこぁぜ〴ぜ〰はてぜ〴ぜ〰あぃぐびぜ〴ぜ〰てはひぜ〴ぜ〰ぴとづぜ〴ぜ〰うちぢひどっちぴどはのぜ〴ぜ〰はてぜ〴ぜ〰ぎちのはづぬづっぴひはねづっとちのどっちぬぜ〴ぜ〰いづぶどっづびぜ〴〩੥湤潢樊㌶‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮ㄩ‾㸊敮摯扪ਲ਼㤠〠潢樊⡜㌷㙜㌷㝜〰ぃひづちぴどはのぜ〴ぜ〰はてぜ〴ぜ〰くへどつづぜ〴ぜ〰ぇぐびぜ〴ぜ〰ぢべぜ〴ぜ〰ぅあがぜ〴〩੥湤潢樊㐰‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㈩‾㸊敮摯扪਴㌠〠潢樊⡜㌷㙜㌷㝜〰ぇひちばとはづばどぴちへべぜ〴ぜ〰はてぜ〴ぜ〰ぐこ〭ぢ〭ぐききぁぜ〴〩੥湤潢樊㐴‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㌩‾㸊敮摯扪਴㜠〠潢樊⡜㌷㙜㌷㝜〰こづぬづっぴどぶづぜ〴ぜ〰ぐききぁぜ〴ぜ〰げづねはぶちぬぜ〴ぜ〰ちのつぜ〴ぜ〰ぐちぴぴづひのぜ〴ぜ〰ごひちのびてづひぜ〴〩੥湤潢樊㐸‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㐩‾㸊敮摯扪ਵㄠ〠潢樊⡜㌷㙜㌷㝜〰いどびばはびちぬぜ〴ぜ〰はてぜ〴ぜ〰さのつづびどひづつぜ〴ぜ〰こどぎしびぜ〴〩੥湤潢樊㔲‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㔩‾㸊敮摯扪ਵ㔠〠潢樊⡜㌷㙜㌷㝜〰げづぬづちびづぜ〴ぜ〰はてぜ〴ぜ〰ぴとづぜ〴ぜ〰こぴひふっぴふひづびぜ〴〩੥湤潢樊㔶‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸵ Children: Item: Title: ぃひづちぴどはのぜ〴ぜ〰はてぜ〴ぜ〰くへどつづぜ〴ぜ〰ぇぐびぜ〴ぜ〰ぢべぜ〴ぜ〰ぅあがぜ〴〩੥湤潢樊㐰‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㈩‾㸊敮摯扪਴㌠〠潢樊⡜㌷㙜㌷㝜〰ぇひちばとはづばどぴちへべぜ〴ぜ〰はてぜ〴ぜ〰ぐこ〭ぢ〭ぐききぁぜ〴〩੥湤潢樊㐴‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㌩‾㸊敮摯扪਴㜠〠潢樊⡜㌷㙜㌷㝜〰こづぬづっぴどぶづぜ〴ぜ〰ぐききぁぜ〴ぜ〰げづねはぶちぬぜ〴ぜ〰ちのつぜ〴ぜ〰ぐちぴぴづひのぜ〴ぜ〰ごひちのびてづひぜ〴〩੥湤潢樊㐸‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㐩‾㸊敮摯扪ਵㄠ〠潢樊⡜㌷㙜㌷㝜〰いどびばはびちぬぜ〴ぜ〰はてぜ〴ぜ〰さのつづびどひづつぜ〴ぜ〰こどぎしびぜ〴〩੥湤潢樊㔲‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㔩‾㸊敮摯扪ਵ㔠〠潢樊⡜㌷㙜㌷㝜〰げづぬづちびづぜ〴ぜ〰はてぜ〴ぜ〰ぴとづぜ〴ぜ〰こぴひふっぴふひづびぜ〴〩੥湤潢樊㔶‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸵ Item: Title: ぇひちばとはづばどぴちへべぜ〴ぜ〰はてぜ〴ぜ〰ぐこ〭ぢ〭ぐききぁぜ〴〩੥湤潢樊㐴‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㌩‾㸊敮摯扪਴㜠〠潢樊⡜㌷㙜㌷㝜〰こづぬづっぴどぶづぜ〴ぜ〰ぐききぁぜ〴ぜ〰げづねはぶちぬぜ〴ぜ〰ちのつぜ〴ぜ〰ぐちぴぴづひのぜ〴ぜ〰ごひちのびてづひぜ〴〩੥湤潢樊㐸‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㐩‾㸊敮摯扪ਵㄠ〠潢樊⡜㌷㙜㌷㝜〰いどびばはびちぬぜ〴ぜ〰はてぜ〴ぜ〰さのつづびどひづつぜ〴ぜ〰こどぎしびぜ〴〩੥湤潢樊㔲‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㔩‾㸊敮摯扪ਵ㔠〠潢樊⡜㌷㙜㌷㝜〰げづぬづちびづぜ〴ぜ〰はてぜ〴ぜ〰ぴとづぜ〴ぜ〰こぴひふっぴふひづびぜ〴〩੥湤潢樊㔶‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸵ Item: Title: こづぬづっぴどぶづぜ〴ぜ〰ぐききぁぜ〴ぜ〰げづねはぶちぬぜ〴ぜ〰ちのつぜ〴ぜ〰ぐちぴぴづひのぜ〴ぜ〰ごひちのびてづひぜ〴〩੥湤潢樊㐸‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㐩‾㸊敮摯扪ਵㄠ〠潢樊⡜㌷㙜㌷㝜〰いどびばはびちぬぜ〴ぜ〰はてぜ〴ぜ〰さのつづびどひづつぜ〴ぜ〰こどぎしびぜ〴〩੥湤潢樊㔲‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㔩‾㸊敮摯扪ਵ㔠〠潢樊⡜㌷㙜㌷㝜〰げづぬづちびづぜ〴ぜ〰はてぜ〴ぜ〰ぴとづぜ〴ぜ〰こぴひふっぴふひづびぜ〴〩੥湤潢樊㔶‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸵ Item: Title: いどびばはびちぬぜ〴ぜ〰はてぜ〴ぜ〰さのつづびどひづつぜ〴ぜ〰こどぎしびぜ〴〩੥湤潢樊㔲‰扪਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㐮㔩‾㸊敮摯扪ਵ㔠〠潢樊⡜㌷㙜㌷㝜〰げづぬづちびづぜ〴ぜ〰はてぜ〴ぜ〰ぴとづぜ〴ぜ〰こぴひふっぴふひづびぜ〴〩੥湤潢樊㔶‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸵ Item: Title: げづぬづちびづぜ〴ぜ〰はてぜ〴ぜ〰ぴとづぜ〴ぜ〰こぴひふっぴふひづびぜ〴〩੥湤潢樊㔶‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸵ Item: Title: ぃはのっぬふびどはのびぜ〴〩੥湤潢樊㘰‰扪਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸵ Item: Title: げづてづひづのっづび Info: Title: いどひづっぴづつぜ〴ぜ〰こづぬて〭ぁびびづねぢぬべぜ〴ぜ〰はてぜ〴ぜ〰あぬはっにぜ〴ぜ〰ぃはばはぬべねづひびぜ〴ぜ〰てはひぜ〴ぜ〰ぴとづぜ〴ぜ〰うちぢひどっちぴどはのぜ〴ぜ〰はてぜ〴ぜ〰うふのっぴどはのちぬぜ〴ぜ〰いづぶどっづび Author: ぃとひどびぴどちのぜ〴ぜ〰ぐどのぴは〭ぇぜ㌶㍜〰ねづぺ〬ぜ〴ぜ〰うひちのっづびっぜ〴ぜ〰ぐぜ㌵ㅜ〰ひづぺ〭きふひちのは〬ぜ〴ぜ〰おはちのぜ〴ぜ〰あちふびづぬぬび〬ぜ〴ぜ〰がふどびぜ〴ぜ〰ぇふどぬぬづひねはぜ〴ぜ〰ざどぬぬちのふづぶちぜ〴ぜ〰ちのつぜ〴ぜ〰きちひぴちぜ〴ぜ〰うづひのぜ㌴ㅜ〰のつづぺ〭げづでぜ㌷㉜〰ぬづぺ Subject: いどひづっぴづつぜ〴ぜ〰びづぬて〭ちびびづねぢぬべぜ〴ぜ〰はてぜ〴ぜ〰ぢぬはっにぜ〴ぜ〰っはばはぬべねづひびぜ〴ぜ〰どびぜ〴ぜ〰ちぜ〴ぜ〰ぢはぴぴはね〭ふばぜ〴ぜ〰ちばばひはちっとぜ〴ぜ〰ぴはぜ〴ぜ〰のちのはてちぢひどっちぴどはのぜ〴ぜ〰ぴとちぴぜ〴ぜ〰とちびぜ〴ぜ〰ちぴぴひちっぴづつぜ〴ぜ〰とどでとぜ〴ぜ〰どのぴづひづびぴぜ〴ぜ〰どのぜ〴ぜ〰ひづっづのぴぜ〴ぜ〰べづちひびぜ〴ぜ〰つふづぜ〴ぜ〰ぴはぜ〴ぜ〰どぴびぜ〴ぜ〰どのとづひづのぴぜ〴ぜ〰びどねばぬどっどぴべ〬ぜ〴ぜ〰とどでとぜ〴ぜ〰ぴとひはふでとばふぴ〬ぜ〴ぜ〰ぬはぷぜ〴ぜ〰っはびぴぜ〴ぜ〰ちのつぜ〴ぜ〰ばはぴづのぴどちぬぜ〴ぜ〰てはひぜ〴ぜ〰びふぢ〭〱〰ぜ〴ぜ〰のねぜ〴ぜ〰ひづびはぬふぴどはの〮ぜ〴ぜ〰ぉのぜ〴ぜ〰ぴとどびぜ〴ぜ〰ばちばづひ〬ぜ〴ぜ〰ぷづぜ〴ぜ〰ひづぶどづぷぜ〴ぜ〰ぴとづぜ〴ぜ〰ねちどのぜ〴ぜ〰ばひどのっどばぬづびぜ〴ぜ〰はてぜ〴ぜ〰つどひづっぴづつぜ〴ぜ〰びづぬて〭ちびびづねぢぬべぜ〴ぜ〰はてぜ〴ぜ〰ぢぬはっにぜ〴ぜ〰っはばはぬべねづひびぜ〴ぜ〰ちのつぜ〴ぜ〰でどぶづぜ〴ぜ〰ちぜ〴ぜ〰ぢひどづてぜ〴ぜ〰はぶづひぶどづぷぜ〴ぜ〰はてぜ〴ぜ〰びはねづぜ〴ぜ〰はてぜ〴ぜ〰ぴとづぜ〴ぜ〰ねはびぴぜ〴ぜ〰づへぴづのつづつぜ〴ぜ〰ちばばぬどっちぴどはのび〮ぜ〴ぜ〰しづぜ〴ぜ〰ばひづびづのぴぜ〴ぜ〰ちぜ〴ぜ〰のはぶづぬぜ〴ぜ〰てちぢひどっちぴどはのぜ〴ぜ〰ひはふぴづぜ〴ぜ〰ぢちびづつぜ〴ぜ〰はのぜ〴ぜ〰ぴとづぜ〴ぜ〰どのぴひはつふっぴどはのぜ〴ぜ〰はてぜ〴ぜ〰つどひづっぴづつぜ〴ぜ〰びづぬて〭ちびびづねぢぬべぜ〴ぜ〰はてぜ〴ぜ〰ぢぬはっにぜ〴ぜ〰っはばはぬべねづひびぜ〴ぜ〰ちびぜ〴ぜ〰ちぜ〴ぜ〰ばちぴぴづひのどのでぜ〴ぜ〰はばぴどはのぜ〴ぜ〰てはひぜ〴ぜ〰ぴとづぜ〴ぜ〰てちぢひどっちぴどはのぜ〴ぜ〰はてぜ〴ぜ〰のちのはづぬづっぴひはねづっとちのどっちぬぜ〴ぜ〰びべびぴづねび〮ぜ〴ぜ〰ぁびぜ〴ぜ〰ちぜ〴ぜ〰ばひははてぜ〴ぜ〰はてぜ〴ぜ〰っはのっづばぴ〬ぜ〴ぜ〰ぷづぜ〴ぜ〰つづねはのびぴひちぴづぜ〴ぜ〰ぴとづぜ〴ぜ〰てちぢひどっちぴどはのぜ〴ぜ〰はてぜ〴ぜ〰びふびばづのつづつぜ〴ぜ〰びどぬどっはのぜ〴ぜ〰ねづねぢひちのづびぜ〴ぜ〰っぬちねばづつぜ〴ぜ〰ぢべぜ〴ぜ〰つづのびづぜ〴ぜ〰ちひひちべびぜ〴ぜ〰はてぜ〴ぜ〰びどのでぬづ〭っひべびぴちぬぜ〴ぜ〰びどぬどっはのぜ〴ぜ〰のちのはぷどひづびぜ〴ぜ〰はてぜ〴ぜ〰びふぢ〭〱〰ぜ〴ぜ〰のねぜ〴ぜ〰つどちねづぴづひ〮ぜ〴ぜ〰げづびふぬぴどのでぜ〴ぜ〰つづぶどっづびぜ〴ぜ〰っちのぜ〴ぜ〰ぢづぜ〴ぜ〰てふひぴとづひぜ〴ぜ〰つづぶづぬはばづつぜ〴ぜ〰てはひぜ〴ぜ〰ぢふどぬつどのでぜ〴ぜ〰ふばぜ〴ぜ〰とどでと〭びづのびどぴどぶづぜ〴ぜ〰ねちびびぜ〴ぜ〰びづのびはひびぜ〴ぜ〰ぢちびづつぜ〴ぜ〰はのぜ〴ぜ〰のちのはねづっとちのどっちぬぜ〴ぜ〰ひづびはのちぴはひび〮 Keywords: ぢぬはっにぜ〴ぜ〰っはばはぬべねづひび〻ぜ〴ぜ〰つどひづっぴづつぜ〴ぜ〰びづぬて〭ちびびづねぢぬべ〻ぜ〴ぜ〰でひちばとはづばどぴちへべ〻ぜ〴ぜ〰のちのはぬどぴとはでひちばとべ〻ぜ〴ぜ〰のちのはねづっとちのどっちぬぜ〴ぜ〰つづぶどっづび〻ぜ〴ぜ〰のちのはぷどひづび Creator: LaTeX with hyperref Producer: MiKTeX pdfTeX-1.40.21 CreationDate: Wed Oct 21 16:01:54 CEST 2020 ModDate: Wed Oct 21 16:01:54 CEST 2020 ID: 0x277dcc9c538281a645a83a21296fba84, 0x277dcc9c538281a645a83a21296fba84 Filters: FilterPipeline: FlateDecode Fonts: Type1: Font: BaseFont: ARPGWS+URWPalladioL-Ital FontSubset: true FirstChar: 38 LastChar: 150 FontDescriptor: FontName: ARPGWS+URWPalladioL-Ital Flags: Symbolic FontBBox: -170, -305, 1010, 941 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: ZWPIOR+EURM10 FontSubset: true FirstChar: 22 LastChar: 33 FontDescriptor: FontName: ZWPIOR+EURM10 Flags: Symbolic FontBBox: -32, -243, 1060, 720 FontFile: true Font: BaseFont: JHQVUJ+URWPalladioL-Bold FontSubset: true FirstChar: 3 LastChar: 122 FontDescriptor: FontName: JHQVUJ+URWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 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