8fa42f9e1ba659cf02cc2cd19d70ca04 pmc_33291745.pdf 8b77911f4aed14442c7c31c8205f1cf71715a6f7 pmc_33291745.pdf 03c6dbe9eb64b63a6d16b9b3245efa7b2a9c10ae45c4d8af2b70eb095c7f5b6e pmc_33291745.pdf Title: Stress-Induced In Situ Modification of Transition Temperature in VO2 Films Capped by Chalcogenide Subject: We attempted to modify the monoclinic–rutile structural phase transition temperature (Ttr) of a VO2 thin film in situ through stress caused by amorphous–crystalline phase change of a chalcogenide layer on it. VO2 films on C- or R-plane Al2O3 substrates were capped by Ge2Sb2Te5 (GST) films by means of rf magnetron sputtering. Ttr of the VO2 layer was evaluated through temperature-controlled measurements of optical reflection intensity and electrical resistance. Crystallization of the GST capping layer was accompanied by a significant drop in Ttr of the VO2 layer underneath, either with or without a SiNx diffusion barrier layer between the two. The shift of Ttr was by ~30 C for a GST/VO2 bilayered sample with thicknesses of 200/30 nm, and was by ~6 C for a GST/SiNx/VO2 trilayered sample of 200/10/6 nm. The lowering of Ttr was most probably caused by the volume reduction in GST during the amorphous–crystalline phase change. The stress-induced in in situ modification of Ttr in VO2 films could pave the way for the application of nonvolatile changes of optical properties in optoelectronic devices. Keywords: vanadium oxide; chalcogenide; insulator-metal phase transition; phase change material; strain engineering Author: Joe Sakai, Masashi Kuwahara, Kunio Okimura and Yoichi Uehara Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.18 CreationDate: Sun Dec 6 02:17:45 2020 CET ModDate: Sun Dec 6 12:33:33 2020 CET Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 11 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 17812455 bytes Optimized: no PDF version: 1.7 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- AUJAZN+VnURWPalladioL Type 1 Custom yes yes no 10 0 DCFSXK+URWPalladioL-Ital Type 1 Custom yes yes no 15 0 SFZMLS+URWPalladioL-Bold Type 1 Custom yes yes no 20 0 LELAIA+URWPalladioL-Roma Type 1 Custom yes yes no 24 0 SVVJCD+Rpxr Type 1 Builtin yes yes no 28 0 WBHGRA+Pxsy Type 1 Builtin yes yes no 32 0 YOTXCC+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 41 0 MCBCCI+SourceSansRoman-Regular Type 1C Custom yes yes no 63 0 MCBCCM+SourceSansRoman.613wght Type 1C Custom yes yes no 67 0 MCBCCO+SourceSansRoman-Bold Type 1C Custom yes yes no 71 0 AQZERJ+Rpxmi Type 1 Builtin yes yes no 93 0 IARUPY+URWPalladioL-BoldItal Type 1 Custom yes yes no 97 0 YWGLGW+Rpxi Type 1 Builtin yes yes no 112 0 OVNEXW+EURM10 Type 1 Builtin yes yes no 147 0 VSHNAE+Rpcxr Type 1 Builtin yes yes no 160 0 Jhove (Rel. 1.22.1, 2019-04-17) Date: 2022-03-16 02:29:00 CET RepresentationInformation: pmc_33291745.pdf ReportingModule: PDF-hul, Rel. 1.12.1 (2019-04-17) LastModified: 2020-12-14 03:45:48 CET Size: 17812455 Format: PDF Version: 1.7 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 311 FreeObjects: 11 IncrementalUpdates: 0 DocumentCatalog: PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: Introduction Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@7b69c6ba Item: Title: Experimental Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@46daef40 Children: Item: Title: Sample Preparation Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@12f41634 Item: Title: Characterization Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@13c27452 Item: Title: Results Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@262b2c86 Children: Item: Title: Optical Reflection Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@371a67ec Item: Title: Electrical Resistance Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@5ed828d Item: Title: Discussion Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@50d0686 Item: Title: Conclusions Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@7a3d45bd Item: Title: References Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@1e7c7811 Info: Title: Stress-Induced In Situ Modification of Transition Temperature in VO2 Films Capped by Chalcogenide Author: Joe Sakai, Masashi Kuwahara, Kunio Okimura and Yoichi Uehara Subject: We attempted to modify the monoclinic rutile structural phase transition temperature (Ttr) of a VO2 thin film in situ through stress caused by amorphous crystalline phase change of a chalcogenide layer on it. VO2 films on C- or R-plane Al2O3 substrates were capped by Ge2Sb2Te5 (GST) films by means of rf magnetron sputtering. Ttr of the VO2 layer was evaluated through temperature-controlled measurements of optical reflection intensity and electrical resistance. Crystallization of the GST capping layer was accompanied by a significant drop in Ttr of the VO2 layer underneath, either with or without a SiNx diffusion barrier layer between the two. The shift of Ttr was by ~30 C for a GST/VO2 bilayered sample with thicknesses of 200/30 nm, and was by ~6 C for a GST/SiNx/VO2 trilayered sample of 200/10/6 nm. The lowering of Ttr was most probably caused by the volume reduction in GST during the amorphous crystalline phase change. The stress-induced in in situ modification of Ttr in VO2 films could pave the way for the application of nonvolatile changes of optical properties in optoelectronic devices. Keywords: vanadium oxide; chalcogenide; insulator-metal phase transition; phase change material; strain engineering Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.18 CreationDate: Sun Dec 06 02:17:45 CET 2020 ModDate: Sun Dec 06 12:33:33 CET 2020 ID: 0x3a75f72c7157963fa3c0bff9fe087fe0, 0x3a75f72c7157963fa3c0bff9fe087fe0 Filters: FilterPipeline: FlateDecode Fonts: Type1: Font: BaseFont: WBHGRA+Pxsy FontSubset: true FirstChar: 0 LastChar: 14 FontDescriptor: FontName: WBHGRA+Pxsy Flags: Symbolic FontBBox: -21, -994, 1292, 912 FontFile: true Font: BaseFont: YWGLGW+Rpxi FontSubset: true FirstChar: 47 LastChar: 47 FontDescriptor: FontName: YWGLGW+Rpxi Flags: Symbolic FontBBox: -162, -280, 856, 733 FontFile: true Font: BaseFont: VSHNAE+Rpcxr FontSubset: true FirstChar: 169 LastChar: 169 FontDescriptor: FontName: VSHNAE+Rpcxr Flags: Symbolic FontBBox: -212, -286, 1344, 973 FontFile: true Font: BaseFont: IARUPY+URWPalladioL-BoldItal FontSubset: true FirstChar: 84 LastChar: 120 FontDescriptor: FontName: IARUPY+URWPalladioL-BoldItal Flags: Symbolic FontBBox: -170, -300, 1073, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: OVNEXW+EURM10 FontSubset: true FirstChar: 22 LastChar: 22 FontDescriptor: FontName: OVNEXW+EURM10 Flags: Symbolic FontBBox: -32, -243, 1060, 720 FontFile: true Font: BaseFont: SFZMLS+URWPalladioL-Bold FontSubset: true FirstChar: 2 LastChar: 121 FontDescriptor: FontName: SFZMLS+URWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: LELAIA+URWPalladioL-Roma FontSubset: true FirstChar: 2 LastChar: 252 FontDescriptor: FontName: LELAIA+URWPalladioL-Roma Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: AUJAZN+VnURWPalladioL FontSubset: true FirstChar: 160 LastChar: 254 FontDescriptor: FontName: AUJAZN+VnURWPalladioL Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: SVVJCD+Rpxr FontSubset: true FirstChar: 11 LastChar: 61 FontDescriptor: FontName: SVVJCD+Rpxr Flags: Symbolic FontBBox: -40, -283, 904, 728 FontFile: true Font: BaseFont: AQZERJ+Rpxmi FontSubset: true FirstChar: 18 LastChar: 33 FontDescriptor: FontName: AQZERJ+Rpxmi Flags: Symbolic FontBBox: -70, -289, 949, 802 FontFile: true Font: BaseFont: DCFSXK+URWPalladioL-Ital FontSubset: true FirstChar: 3 LastChar: 150 FontDescriptor: FontName: DCFSXK+URWPalladioL-Ital Flags: Symbolic FontBBox: -170, -305, 1010, 941 FontFile: true EncodingDictionary: Differences: true Pages: Page: Sequence: 1 Annotations: Annotation: Subtype: Link Rect: 75, 757, 210, 793 Annotation: Subtype: Link Rect: 474, 757, 519, 793 Annotation: Subtype: Link Rect: 315, 660, 326, 674 Annotation: Subtype: Link Rect: 434, 145, 441, 154 ActionDest: 151 Annotation: Subtype: Link Rect: 441, 145, 448, 154 ActionDest: 151 Annotation: Subtype: Link Rect: 209, 91, 216, 100 ActionDest: 151 Annotation: Subtype: Link Rect: 217, 91, 224, 100 ActionDest: 151 Annotation: Subtype: Link Rect: 256, 91, 263, 100 ActionDest: 151 Annotation: Subtype: Link Rect: 264, 91, 271, 100 ActionDest: 151 Annotation: Subtype: Link Rect: 380, 91, 387, 100 ActionDest: 151 Annotation: Subtype: Link Rect: 173, 38, 246, 50 Annotation: Subtype: Link Rect: 398, 38, 519, 50 Annotation: Subtype: Link Rect: 466, 521, 518, 540 Page: Sequence: 2 Annotations: Annotation: Subtype: Link Rect: 405, 661, 412, 671 ActionDest: 151 Annotation: Subtype: Link Rect: 415, 661, 427, 671 ActionDest: 151 Annotation: Subtype: Link Rect: 201, 594, 213, 603 ActionDest: 151 Annotation: Subtype: Link Rect: 127, 567, 134, 576 ActionDest: 151 Annotation: Subtype: Link Rect: 246, 526, 258, 535 ActionDest: 151 Annotation: Subtype: Link Rect: 261, 526, 273, 535 ActionDest: 151 Annotation: Subtype: Link Rect: 441, 526, 453, 535 ActionDest: 151 Annotation: Subtype: Link Rect: 454, 526, 466, 535 ActionDest: 151 Annotation: Subtype: Link Rect: 352, 472, 364, 481 ActionDest: 151 Annotation: Subtype: Link Rect: 367, 472, 379, 481 ActionDest: 154 Annotation: Subtype: Link Rect: 352, 459, 364, 468 ActionDest: 151 Annotation: Subtype: Link Rect: 367, 459, 379, 468 ActionDest: 151 Annotation: Subtype: Link Rect: 421, 459, 433, 468 ActionDest: 154 Annotation: Subtype: Link Rect: 477, 459, 489, 468 ActionDest: 154 Annotation: Subtype: Link Rect: 405, 445, 417, 454 ActionDest: 154 Annotation: Subtype: Link Rect: 419, 445, 431, 454 ActionDest: 154 Annotation: Subtype: Link Rect: 438, 418, 450, 427 ActionDest: 154 Annotation: Subtype: Link Rect: 503, 418, 515, 427 ActionDest: 154 Annotation: Subtype: Link Rect: 161, 391, 173, 400 ActionDest: 154 Annotation: Subtype: Link Rect: 174, 391, 186, 400 ActionDest: 154 Annotation: Subtype: Link Rect: 248, 270, 260, 279 ActionDest: 154 Annotation: Subtype: Link Rect: 263, 270, 275, 279 ActionDest: 154 Annotation: Subtype: Link Rect: 488, 270, 500, 279 ActionDest: 154 Annotation: Subtype: Link Rect: 503, 270, 515, 279 ActionDest: 154 Annotation: Subtype: Link Rect: 503, 256, 515, 265 ActionDest: 154 Annotation: Subtype: Link Rect: 161, 189, 168, 198 ActionDest: 151 Annotation: Subtype: Link Rect: 491, 175, 503, 184 ActionDest: 151 Annotation: Subtype: Link Rect: 503, 175, 515, 184 ActionDest: 157 Page: Sequence: 3 Annotations: Annotation: Subtype: Link Rect: 160, 742, 172, 752 ActionDest: 157 Annotation: Subtype: Link Rect: 308, 633, 315, 645 ActionDest: 78 Annotation: Subtype: Link Rect: 206, 596, 218, 605 ActionDest: 157 Annotation: Subtype: Link Rect: 112, 359, 124, 368 ActionDest: 157 Annotation: Subtype: Link Rect: 125, 359, 137, 368 ActionDest: 157 Annotation: Subtype: Link Rect: 500, 316, 515, 327 ActionDest: 123 Annotation: Subtype: Link Rect: 481, 248, 488, 260 ActionDest: 89 Annotation: Subtype: Link Rect: 247, 140, 254, 152 ActionDest: 89 Page: Sequence: 4 Annotations: Annotation: Subtype: Link Rect: 227, 217, 239, 226 ActionDest: 154 Page: Sequence: 5 Annotations: Annotation: Subtype: Link Rect: 150, 684, 157, 695 ActionDest: 108 Annotation: Subtype: Link Rect: 495, 657, 502, 668 ActionDest: 108 Annotation: Subtype: Link Rect: 460, 643, 467, 655 ActionDest: 108 Page: Sequence: 6 Annotations: Annotation: Subtype: Link Rect: 127, 740, 134, 752 ActionDest: 108 Annotation: Subtype: Link Rect: 503, 699, 510, 711 ActionDest: 108 Annotation: Subtype: Link Rect: 415, 686, 422, 698 ActionDest: 108 Annotation: Subtype: Link Rect: 367, 661, 379, 671 ActionDest: 157 Annotation: Subtype: Link Rect: 490, 648, 502, 657 ActionDest: 157 Annotation: Subtype: Link Rect: 503, 648, 515, 657 ActionDest: 157 Annotation: Subtype: Link Rect: 129, 510, 136, 522 ActionDest: 108 Annotation: Subtype: Link Rect: 241, 335, 253, 344 ActionDest: 157 Annotation: Subtype: Link Rect: 288, 308, 300, 317 ActionDest: 157 Annotation: Subtype: Link Rect: 300, 308, 312, 317 ActionDest: 157 Annotation: Subtype: Link Rect: 128, 211, 135, 223 ActionDest: 126 Annotation: Subtype: Link Rect: 136, 157, 143, 169 ActionDest: 126 Page: Sequence: 7 Annotations: Annotation: Subtype: Link Rect: 355, 360, 362, 372 ActionDest: 126 Annotation: Subtype: Link Rect: 398, 333, 405, 345 ActionDest: 126 Annotation: Subtype: Link Rect: 274, 292, 281, 304 ActionDest: 126 Page: Sequence: 8 Annotations: Annotation: Subtype: Link Rect: 100, 707, 107, 719 ActionDest: 89 Annotation: Subtype: Link Rect: 381, 628, 393, 638 ActionDest: 154 Annotation: Subtype: Link Rect: 434, 628, 446, 638 ActionDest: 154 Annotation: Subtype: Link Rect: 434, 601, 446, 611 ActionDest: 157 Annotation: Subtype: Link Rect: 215, 372, 227, 381 ActionDest: 157 Page: Sequence: 9 Annotations: Annotation: Subtype: Link Rect: 158, 646, 196, 656 Annotation: Subtype: Link Rect: 227, 621, 265, 631 Annotation: Subtype: Link Rect: 149, 569, 187, 579 Annotation: Subtype: Link Rect: 100, 530, 137, 540 Annotation: Subtype: Link Rect: 289, 504, 326, 514 Annotation: Subtype: Link Rect: 181, 466, 219, 476 Annotation: Subtype: Link Rect: 181, 427, 219, 437 Annotation: Subtype: Link Rect: 445, 400, 483, 411 Annotation: Subtype: Link Rect: 100, 362, 137, 372 Annotation: Subtype: Link Rect: 238, 336, 276, 347 Annotation: Subtype: Link Rect: 223, 298, 261, 308 Annotation: Subtype: Link Rect: 267, 298, 303, 308 Annotation: Subtype: Link Rect: 480, 271, 516, 282 Annotation: Subtype: Link Rect: 270, 232, 308, 243 Annotation: Subtype: Link Rect: 100, 195, 137, 205 Annotation: Subtype: Link Rect: 100, 156, 137, 166 Annotation: Subtype: Link Rect: 314, 116, 352, 127 Annotation: Subtype: Link Rect: 287, 90, 325, 101 Page: Sequence: 10 Annotations: Annotation: Subtype: Link Rect: 288, 714, 326, 725 Annotation: Subtype: Link Rect: 262, 675, 300, 686 Annotation: Subtype: Link Rect: 441, 650, 479, 661 Annotation: Subtype: Link Rect: 477, 624, 515, 635 Annotation: Subtype: Link Rect: 172, 586, 210, 596 Annotation: Subtype: Link Rect: 469, 559, 506, 570 Annotation: Subtype: Link Rect: 100, 521, 137, 531 Annotation: Subtype: Link Rect: 480, 495, 516, 506 Annotation: Subtype: Link Rect: 216, 457, 253, 467 Annotation: Subtype: Link Rect: 468, 430, 505, 441 Annotation: Subtype: Link Rect: 316, 391, 354, 402 Annotation: Subtype: Link Rect: 158, 354, 196, 364 Annotation: Subtype: Link Rect: 100, 315, 137, 325 Annotation: Subtype: Link Rect: 252, 275, 289, 286 Annotation: Subtype: Link Rect: 295, 275, 331, 286 Annotation: Subtype: Link Rect: 154, 237, 192, 247 Annotation: Subtype: Link Rect: 172, 199, 210, 209 Annotation: Subtype: Link Rect: 190, 160, 228, 170 Annotation: Subtype: Link Rect: 268, 120, 306, 131 Annotation: Subtype: Link Rect: 405, 94, 442, 105 Annotation: Subtype: Link Rect: 257, 69, 294, 80 Page: Sequence: 11 Annotations: Annotation: Subtype: Link Rect: 449, 727, 486, 738 Annotation: Subtype: Link Rect: 431, 701, 468, 712 Annotation: Subtype: Link Rect: 100, 663, 137, 673 Annotation: Subtype: Link Rect: 404, 637, 441, 648 Annotation: Subtype: Link Rect: 447, 637, 483, 648 Annotation: Subtype: Link Rect: 100, 599, 137, 609 Annotation: Subtype: Link Rect: 377, 572, 414, 583 Annotation: Subtype: Link Rect: 420, 572, 456, 583 Annotation: Subtype: Link Rect: 145, 521, 183, 531 Annotation: Subtype: Link Rect: 100, 483, 137, 493 Annotation: Subtype: Link Rect: 431, 456, 469, 467 Annotation: Subtype: Link Rect: 293, 417, 330, 428 Annotation: Subtype: Link Rect: 76, 307, 166, 338 Annotation: Subtype: Link Rect: 234, 301, 407, 312 Checksum: 99957d7f Type: CRC32 Checksum: 8fa42f9e1ba659cf02cc2cd19d70ca04 Type: MD5 Checksum: 8b77911f4aed14442c7c31c8205f1cf71715a6f7 Type: SHA-1