911718955b5c7887832d75df5fa3e76f pmc_31947950.pdf c043135173a331c77b283e3c06225236de37d6db pmc_31947950.pdf 39604f02b89f77a34dad8fcc285bb635cf0ae76c926a7c540bef27afd14d45aa pmc_31947950.pdf Title: Grain-Boundary-Induced Alignment of Block Copolymer Thin Films Subject: We present and discuss the capability of grain boundaries to induce order in block copolymer thin films between horizontally and vertically assembled block copolymer grains. The system we use as a proof of principle is a thermally annealed 23.4 nm full-pitch lamellar Polystyrene-block-polymethylmetacrylate (PS-b-PMMA) di-block copolymer. In this paper, grain-boundary-induced alignment is achieved by the mechanical removal of the neutral brush layer via atomic force microscopy (AFM). The concept is also confirmed by a mask-less e-beam direct writing process. An elongated grain of vertically aligned lamellae is trapped between two grains of horizontally aligned lamellae. This configuration leads to the formation of 90 twist grain boundaries. The features maintain their orientation on a characteristic length scale, which is described by the material’s correlation length . As a result of an energy minimization process, the block copolymer domains in the vertically aligned grain orient perpendicularly to the grain boundary. The energy-minimizing feature is the grain boundary itself. The width of the manipulated area (e.g., the horizontally aligned grain) does not represent a critical process parameter. Keywords: nanolithography; block copolymers; directed self-assembly; grain boundaries; AFM; mechanical removal Author: Steven Gottlieb, Marta Fernández-Regúlez, Matteo Lorenzoni, Laura Evangelio and Francesc Perez-Murano Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.18 CreationDate: Sat Jan 4 09:09:44 2020 CET ModDate: Sat Jan 4 09:09:44 2020 CET Custom Metadata: yes Metadata Stream: no Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 19 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 6832889 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- DBLGEO+URWPalladioL-Ital Type 1 Custom yes yes no 124 0 DETNFD+URWPalladioL-Bold Type 1 Custom yes yes no 125 0 FYYAHQ+VnURWPalladioL-Bold Type 1 Custom yes yes no 126 0 LOEPGS+URWPalladioL-Roma Type 1 Custom yes yes no 127 0 AWHDWW+VnURWPalladioL Type 1 Custom yes yes no 128 0 OFLXAT+Rpxr Type 1 Builtin yes yes no 129 0 UKRELS+Pxsy Type 1 Builtin yes yes no 130 0 AZNKRZ+Rpxmi Type 1 Builtin yes yes no 131 0 NPLVPL+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 136 0 MCBCCI+SourceSansRoman-Regular Type 1C Custom yes yes no 153 0 MCBCCM+SourceSansRoman.613wght Type 1C Custom yes yes no 154 0 MCBCCO+SourceSansRoman-Bold Type 1C Custom yes yes no 155 0 NXMIKN+EURM10 Type 1 Builtin yes yes no 232 0 GOPOFF+PalatinoLinotype CID TrueType Identity-H yes yes yes 237 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 238 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 239 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 240 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 241 0 GOPOFF+PalatinoLinotype CID TrueType Identity-H yes yes yes 286 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 287 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 288 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 289 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 290 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 327 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 328 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 329 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 330 0 GOPOFF+PalatinoLinotype CID TrueType Identity-H yes yes yes 366 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 367 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 368 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 369 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 370 0 GOPOFF+PalatinoLinotype CID TrueType Identity-H yes yes yes 395 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 396 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 397 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 398 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 399 0 PVNGJA+Rpxi Type 1 Builtin yes yes no 444 0 URFODN+CMR10 Type 1 Builtin yes yes no 446 0 TXMXSV+Pxex Type 1 Builtin yes yes no 447 0 GOPOFF+PalatinoLinotype CID TrueType Identity-H yes yes yes 474 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 475 0 GOPOME+PalatinoLinotype,Italic CID TrueType Identity-H yes yes yes 476 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 477 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 478 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 479 0 GPAEKF+CambriaMath CID TrueType Identity-H yes yes yes 480 0 GOPOFF+PalatinoLinotype CID TrueType Identity-H yes yes yes 515 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 516 0 GOPOME+PalatinoLinotype,Italic CID TrueType Identity-H yes yes yes 517 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 518 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 519 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 520 0 GPAEKF+CambriaMath CID TrueType Identity-H yes yes yes 521 0 MHAKTA+URWPalladioL-BoldItal Type 1 Custom yes yes no 571 0 GOPOFF+PalatinoLinotype CID TrueType Identity-H yes yes yes 579 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 580 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 581 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 582 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 583 0 GOPOFF+PalatinoLinotype CID TrueType Identity-H yes yes yes 645 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 646 0 GOPOME+PalatinoLinotype,Italic CID TrueType Identity-H yes yes yes 647 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 648 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 649 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 650 0 GPAEKF+CambriaMath CID TrueType Identity-H yes yes yes 651 0 GOPOFF+PalatinoLinotype CID TrueType Identity-H yes yes yes 713 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 714 0 GOPOME+PalatinoLinotype,Italic CID TrueType Identity-H yes yes yes 715 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 716 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 717 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 718 0 GPAEKF+CambriaMath CID TrueType Identity-H yes yes yes 719 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 770 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 771 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 772 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 773 0 GPAKDG+Arial CID TrueType Identity-H yes yes yes 806 0 GOPOFG+PalatinoLinotype TrueType WinAnsi yes yes no 807 0 GOPOMF+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 808 0 GOPOMH+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 809 0 GOPPHE+TimesNewRoman CID TrueType Identity-H yes yes yes 810 0 VSHNAE+Rpcxr Type 1 Builtin yes yes no 934 0 Jhove (Rel. 1.28.0, 2023-05-18) Date: 2024-10-02 04:16:05 CEST RepresentationInformation: pmc_31947950.pdf ReportingModule: PDF-hul, Rel. 1.12.4 (2023-03-16) LastModified: 2023-03-31 11:43:52 CEST Size: 6832889 Format: PDF Version: 1.5 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 0 FreeObjects: 2 IncrementalUpdates: 0 DocumentCatalog: ViewerPreferences: HideToolbar: false HideMenubar: false HideWindowUI: false FitWindow: true CenterWindow: false DisplayDocTitle: false NonFullScreenPageMode: UseNone Direction: L2R ViewArea: CropBox ViewClip: CropBox PrintArea: CropBox PageClip: CropBox PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: ぉのぴひはつふっぴどはの〠 Item: Title: げづびふぬぴび〠 Children: Item: Title: ぁぬどでのねづのぴ〠ぉのつふっづつ〠ぶどち〠きづっとちのどっちぬ〠ぁうき〠〨ね〭ぁうき〩〠 Item: Title: ぁぬどでのねづのぴ〠ぉのつふっづつ〠ぶどち〠ぅぬづっぴひはの〠あづちね〠いどひづっぴ〠ぅへばはびふひづ〠 Item: Title: げづびふぬぴび〠はて〠ぐちぴぴづひの〠ごひちのびてづひ〠はて〠いどひづっぴづつ〠うづちぴふひづび〠どのぴは〠こどぬどっはの〠 Item: Title: いどびっふびびどはの〠 Children: Item: Title: こふひてちっづ〠ぅのづひでべ〠きはつどてどっちぴどはの〠ぢべ〠ね〭ぁうき〠 Item: Title: がどねどぴび〠はて〠ぇひちどの〭あはふのつちひべ〭ぉのつふっづつ〠ぁぬどでのねづのぴ〠 Item: Title: うちぢひどっちぴどはの〠はて〠ぐちぴぴづひのび〠はて〠ぁひぢどぴひちひべ〠ぇづはねづぴひべ〠 Item: Title: きちぴづひどちぬび〠ちのつ〠きづぴとはつび〠 Children: Item: Title: こふぢびぴひちぴづ〠 Item: Title: ぎづふぴひちぬ〠あひふびと〠がちべづひ〠いづばはびどぴどはの〠 Item: Title: ぇふどつどので〠ぐちぴぴづひの〠うちぢひどっちぴどはの〠 Item: Title: あぬはっに〠ぃはばはぬべねづひ〠いづばはびどぴどはの〠 Item: Title: ぐちぴぴづひの〠ごひちのびてづひ〠 Item: Title: ぇぉこぁじこ〠きづちびふひづねづのぴび〠 Item: Title: ぃはのっぬふびどはのび〠 Item: Title: Children: Item: Title: くぶづひぶどづぷ〠はて〠ぇひちどの〠あはふのつちひべ〠きはひばとはぬはでどづび〠どの〠あぬはっに〠ぃはばはぬべねづひび〠 Item: Title: うどへづつ〭えづどでとぴ〠こづぬて〭ぁびびづねぢぬべ〠 Item: Title: ぇひちどの〭あはふのつちひべ〭ぉのつふっづつ〠ぁぬどでのねづのぴ〠ぷどぴと〠ごづひのちひべ〠あぬづのつび〠 Item: Title: げづてづひづのっづび Filters: FilterPipeline: FlateDecode Fonts: Type1: Font: BaseFont: AWHDWW+VnURWPalladioL FontSubset: true FirstChar: 161 LastChar: 243 FontDescriptor: FontName: AWHDWW+VnURWPalladioL Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: OFLXAT+Rpxr FontSubset: true FirstChar: 11 LastChar: 62 FontDescriptor: FontName: OFLXAT+Rpxr Flags: Symbolic FontBBox: -40, -283, 904, 728 FontFile: true Font: BaseFont: UKRELS+Pxsy FontSubset: true FirstChar: 0 LastChar: 112 FontDescriptor: FontName: UKRELS+Pxsy Flags: Symbolic FontBBox: -21, -994, 1292, 912 FontFile: true Font: BaseFont: AZNKRZ+Rpxmi FontSubset: true FirstChar: 11 LastChar: 31 FontDescriptor: FontName: AZNKRZ+Rpxmi Flags: Symbolic FontBBox: -70, -289, 949, 802 FontFile: true Font: BaseFont: VSHNAE+Rpcxr FontSubset: true FirstChar: 169 LastChar: 169 FontDescriptor: FontName: VSHNAE+Rpcxr Flags: Symbolic FontBBox: -212, -286, 1344, 973 FontFile: true Font: BaseFont: NXMIKN+EURM10 FontSubset: true FirstChar: 11 LastChar: 24 FontDescriptor: FontName: NXMIKN+EURM10 Flags: Symbolic FontBBox: -32, -243, 1060, 720 FontFile: true Font: BaseFont: MHAKTA+URWPalladioL-BoldItal FontSubset: true FirstChar: 100 LastChar: 112 FontDescriptor: FontName: MHAKTA+URWPalladioL-BoldItal Flags: Symbolic FontBBox: -170, -300, 1073, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: DBLGEO+URWPalladioL-Ital FontSubset: true FirstChar: 2 LastChar: 121 FontDescriptor: FontName: DBLGEO+URWPalladioL-Ital Flags: Symbolic FontBBox: -170, -305, 1010, 941 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: PVNGJA+Rpxi FontSubset: true FirstChar: 47 LastChar: 61 FontDescriptor: FontName: PVNGJA+Rpxi Flags: Symbolic FontBBox: -162, -280, 856, 733 FontFile: true Font: BaseFont: DETNFD+URWPalladioL-Bold FontSubset: true FirstChar: 3 LastChar: 122 FontDescriptor: FontName: DETNFD+URWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: FYYAHQ+VnURWPalladioL-Bold FontSubset: true FirstChar: 161 LastChar: 243 FontDescriptor: FontName: FYYAHQ+VnURWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: URFODN+CMR10 FontSubset: true FirstChar: 40 LastChar: 93 FontDescriptor: FontName: URFODN+CMR10 Flags: Symbolic FontBBox: -40, -250, 1009, 750 FontFile: true Font: BaseFont: LOEPGS+URWPalladioL-Roma FontSubset: true FirstChar: 2 LastChar: 252 FontDescriptor: FontName: LOEPGS+URWPalladioL-Roma Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: TXMXSV+Pxex FontSubset: true FirstChar: 56 LastChar: 82 FontDescriptor: FontName: TXMXSV+Pxex Flags: Symbolic FontBBox: -5, -3116, 1694, 792 FontFile: true Pages: Page: Sequence: 1 Annotations: Annotation: Subtype: Link Rect: 75, 757, 212, 793 Annotation: Subtype: Link Rect: 474, 757, 519, 793 Annotation: Subtype: Link Rect: 188, 650, 199, 662 Annotation: Subtype: Link Rect: 466, 570, 518, 589 Annotation: Subtype: Link Rect: 120, 277, 127, 286 ActionDest: 850 Annotation: Subtype: Link Rect: 445, 236, 452, 246 ActionDest: 850 Annotation: Subtype: Link Rect: 455, 236, 462, 246 ActionDest: 850 Annotation: Subtype: Link Rect: 508, 236, 515, 246 ActionDest: 850 Annotation: Subtype: Link Rect: 157, 223, 164, 232 ActionDest: 850 Annotation: Subtype: Link Rect: 356, 182, 363, 191 ActionDest: 850 Annotation: Subtype: Link Rect: 349, 128, 356, 137 ActionDest: 850 Annotation: Subtype: Link Rect: 186, 38, 265, 50 Annotation: Subtype: Link Rect: 380, 38, 519, 50 Page: Sequence: 2 Annotations: Annotation: Subtype: Link Rect: 381, 742, 388, 752 ActionDest: 850 Annotation: Subtype: Link Rect: 391, 743, 403, 752 ActionDest: 882 Annotation: Subtype: Link Rect: 245, 715, 257, 725 ActionDest: 882 Annotation: Subtype: Link Rect: 260, 715, 272, 725 ActionDest: 882 Annotation: Subtype: Link Rect: 372, 702, 379, 711 ActionDest: 850 Annotation: Subtype: Link Rect: 379, 702, 391, 711 ActionDest: 882 Annotation: Subtype: Link Rect: 252, 688, 264, 698 ActionDest: 882 Annotation: Subtype: Link Rect: 444, 688, 456, 698 ActionDest: 882 Annotation: Subtype: Link Rect: 199, 648, 211, 657 ActionDest: 882 Annotation: Subtype: Link Rect: 353, 648, 365, 657 ActionDest: 882 Annotation: Subtype: Link Rect: 396, 621, 408, 630 ActionDest: 882 Annotation: Subtype: Link Rect: 503, 621, 515, 630 ActionDest: 882 Annotation: Subtype: Link Rect: 153, 594, 165, 603 ActionDest: 882 Annotation: Subtype: Link Rect: 165, 594, 177, 603 ActionDest: 882 Annotation: Subtype: Link Rect: 320, 526, 332, 535 ActionDest: 882 Annotation: Subtype: Link Rect: 335, 526, 347, 535 ActionDest: 882 Annotation: Subtype: Link Rect: 422, 526, 434, 535 ActionDest: 882 Annotation: Subtype: Link Rect: 437, 526, 449, 535 ActionDest: 916 Annotation: Subtype: Link Rect: 463, 510, 480, 522 ActionDest: 637 Annotation: Subtype: Link Rect: 428, 486, 440, 495 ActionDest: 916 Annotation: Subtype: Link Rect: 142, 445, 154, 454 ActionDest: 916 Annotation: Subtype: Link Rect: 504, 432, 516, 441 ActionDest: 916 Annotation: Subtype: Link Rect: 381, 418, 393, 427 ActionDest: 916 Annotation: Subtype: Link Rect: 326, 364, 338, 373 ActionDest: 916 Annotation: Subtype: Link Rect: 281, 351, 293, 360 ActionDest: 916 Annotation: Subtype: Link Rect: 371, 307, 378, 319 ActionDest: 229 Annotation: Subtype: Link Rect: 444, 175, 456, 184 ActionDest: 916 Page: Sequence: 3 Annotations: Annotation: Subtype: Link Rect: 105, 605, 112, 617 ActionDest: 229 Annotation: Subtype: Link Rect: 197, 154, 204, 166 ActionDest: 229 Annotation: Subtype: Link Rect: 191, 127, 198, 139 ActionDest: 229 Annotation: Subtype: Link Rect: 270, 87, 277, 98 ActionDest: 229 Page: Sequence: 4 Annotations: Annotation: Subtype: Link Rect: 183, 740, 190, 752 ActionDest: 229 Annotation: Subtype: Link Rect: 109, 686, 116, 698 ActionDest: 278 Annotation: Subtype: Link Rect: 119, 537, 126, 549 ActionDest: 278 Annotation: Subtype: Link Rect: 457, 537, 464, 549 ActionDest: 278 Annotation: Subtype: Link Rect: 300, 483, 307, 495 ActionDest: 278 Annotation: Subtype: Link Rect: 424, 483, 431, 495 ActionDest: 278 Annotation: Subtype: Link Rect: 203, 456, 210, 468 ActionDest: 278 Annotation: Subtype: Link Rect: 331, 416, 349, 427 ActionDest: 762 Annotation: Subtype: Link Rect: 354, 155, 360, 166 ActionDest: 229 Page: Sequence: 5 Annotations: Annotation: Subtype: Link Rect: 163, 696, 175, 705 ActionDest: 882 Annotation: Subtype: Link Rect: 274, 639, 280, 651 ActionDest: 317 Annotation: Subtype: Link Rect: 199, 626, 206, 638 ActionDest: 317 Annotation: Subtype: Link Rect: 382, 626, 388, 638 ActionDest: 317 Annotation: Subtype: Link Rect: 459, 283, 466, 295 ActionDest: 357 Annotation: Subtype: Link Rect: 467, 269, 474, 281 ActionDest: 357 Annotation: Subtype: Link Rect: 187, 256, 193, 268 ActionDest: 357 Annotation: Subtype: Link Rect: 328, 242, 335, 254 ActionDest: 357 Annotation: Subtype: Link Rect: 468, 161, 475, 173 ActionDest: 357 Page: Sequence: 6 Annotations: Annotation: Subtype: Link Rect: 170, 461, 182, 470 ActionDest: 882 Annotation: Subtype: Link Rect: 491, 420, 503, 430 ActionDest: 882 Annotation: Subtype: Link Rect: 503, 421, 515, 430 ActionDest: 916 Annotation: Subtype: Link Rect: 416, 337, 423, 349 ActionDest: 441 Annotation: Subtype: Link Rect: 459, 337, 466, 349 ActionDest: 441 Annotation: Subtype: Link Rect: 323, 310, 330, 322 ActionDest: 441 Page: Sequence: 7 Annotations: Annotation: Subtype: Link Rect: 457, 647, 464, 659 ActionDest: 441 Annotation: Subtype: Link Rect: 119, 634, 126, 646 ActionDest: 441 Annotation: Subtype: Link Rect: 154, 582, 166, 592 ActionDest: 916 Annotation: Subtype: Link Rect: 491, 569, 503, 578 ActionDest: 916 Annotation: Subtype: Link Rect: 503, 569, 515, 578 ActionDest: 916 Annotation: Subtype: Link Rect: 283, 499, 290, 511 ActionDest: 441 Annotation: Subtype: Link Rect: 141, 361, 148, 373 ActionDest: 463 Annotation: Subtype: Link Rect: 440, 348, 447, 360 ActionDest: 463 Annotation: Subtype: Link Rect: 324, 337, 336, 346 ActionDest: 916 Annotation: Subtype: Link Rect: 337, 337, 349, 346 ActionDest: 916 Annotation: Subtype: Link Rect: 359, 321, 366, 333 ActionDest: 463 Annotation: Subtype: Link Rect: 235, 307, 242, 319 ActionDest: 463 Annotation: Subtype: Link Rect: 342, 283, 354, 292 ActionDest: 916 Annotation: Subtype: Link Rect: 400, 270, 412, 279 ActionDest: 916 Annotation: Subtype: Link Rect: 254, 256, 266, 265 ActionDest: 916 Annotation: Subtype: Link Rect: 445, 256, 457, 265 ActionDest: 916 Annotation: Subtype: Link Rect: 443, 202, 455, 211 ActionDest: 916 Page: Sequence: 8 Annotations: Annotation: Subtype: Link Rect: 163, 554, 175, 564 ActionDest: 916 Annotation: Subtype: Link Rect: 158, 442, 165, 454 ActionDest: 463 Annotation: Subtype: Link Rect: 283, 307, 290, 319 ActionDest: 463 Page: Sequence: 9 Annotations: Annotation: Subtype: Link Rect: 237, 647, 244, 659 ActionDest: 566 Annotation: Subtype: Link Rect: 233, 607, 240, 618 ActionDest: 278 Annotation: Subtype: Link Rect: 439, 607, 446, 618 ActionDest: 317 Annotation: Subtype: Link Rect: 471, 566, 478, 578 ActionDest: 566 Annotation: Subtype: Link Rect: 108, 74, 120, 83 ActionDest: 916 Annotation: Subtype: Link Rect: 120, 74, 132, 83 ActionDest: 916 Annotation: Subtype: Link Rect: 133, 73, 145, 83 ActionDest: 916 Annotation: Subtype: Link Rect: 145, 73, 157, 83 ActionDest: 916 Page: Sequence: 10 Annotations: Annotation: Subtype: Link Rect: 503, 729, 515, 738 ActionDest: 916 Annotation: Subtype: Link Rect: 318, 702, 330, 711 ActionDest: 916 Annotation: Subtype: Link Rect: 255, 618, 272, 630 ActionDest: 799 Annotation: Subtype: Link Rect: 390, 548, 397, 560 ActionDest: 566 Annotation: Subtype: Link Rect: 298, 521, 305, 533 ActionDest: 566 Annotation: Subtype: Link Rect: 359, 521, 366, 533 ActionDest: 566 Annotation: Subtype: Link Rect: 107, 481, 114, 493 ActionDest: 566 Annotation: Subtype: Link Rect: 221, 481, 228, 493 ActionDest: 566 Annotation: Subtype: Link Rect: 484, 456, 496, 466 ActionDest: 916 Annotation: Subtype: Link Rect: 391, 386, 397, 398 ActionDest: 566 Page: Sequence: 11 Annotations: Annotation: Subtype: Link Rect: 291, 713, 298, 725 ActionDest: 229 Annotation: Subtype: Link Rect: 336, 594, 348, 603 ActionDest: 882 Annotation: Subtype: Link Rect: 133, 400, 145, 410 ActionDest: 916 Annotation: Subtype: Link Rect: 367, 276, 379, 286 ActionDest: 931 Page: Sequence: 12 Annotations: Annotation: Subtype: Link Rect: 221, 688, 233, 698 ActionDest: 882 Annotation: Subtype: Link Rect: 502, 364, 517, 376 ActionDest: 637 Annotation: Subtype: Link Rect: 340, 351, 355, 363 ActionDest: 705 Page: Sequence: 13 Annotations: Annotation: Subtype: Link Rect: 235, 480, 247, 490 ActionDest: 916 Annotation: Subtype: Link Rect: 248, 480, 260, 490 ActionDest: 916 Annotation: Subtype: Link Rect: 300, 464, 315, 476 ActionDest: 637 Annotation: Subtype: Link Rect: 408, 437, 423, 449 ActionDest: 637 Annotation: Subtype: Link Rect: 503, 426, 515, 436 ActionDest: 882 Annotation: Subtype: Link Rect: 240, 399, 252, 409 ActionDest: 931 Annotation: Subtype: Link Rect: 344, 397, 358, 409 ActionDest: 637 Annotation: Subtype: Link Rect: 146, 346, 158, 355 ActionDest: 882 Annotation: Subtype: Link Rect: 158, 345, 170, 355 ActionDest: 882 Annotation: Subtype: Link Rect: 282, 329, 297, 341 ActionDest: 637 Annotation: Subtype: Link Rect: 216, 235, 231, 247 ActionDest: 705 Annotation: Subtype: Link Rect: 225, 197, 237, 206 ActionDest: 916 Annotation: Subtype: Link Rect: 490, 194, 505, 206 ActionDest: 705 Annotation: Subtype: Link Rect: 101, 170, 113, 179 ActionDest: 916 Annotation: Subtype: Link Rect: 450, 154, 465, 165 ActionDest: 705 Annotation: Subtype: Link Rect: 381, 127, 396, 138 ActionDest: 705 Annotation: Subtype: Link Rect: 411, 113, 426, 125 ActionDest: 637 Annotation: Subtype: Link Rect: 450, 113, 465, 125 ActionDest: 705 Page: Sequence: 14 Annotations: Annotation: Subtype: Link Rect: 488, 729, 500, 738 ActionDest: 916 Annotation: Subtype: Link Rect: 291, 661, 303, 671 ActionDest: 931 Annotation: Subtype: Link Rect: 119, 467, 134, 479 ActionDest: 762 Annotation: Subtype: Link Rect: 157, 427, 171, 439 ActionDest: 762 Annotation: Subtype: Link Rect: 406, 427, 421, 439 ActionDest: 762 Annotation: Subtype: Link Rect: 224, 373, 239, 385 ActionDest: 762 Annotation: Subtype: Link Rect: 127, 112, 142, 123 ActionDest: 762 Page: Sequence: 15 Annotations: Annotation: Subtype: Link Rect: 356, 729, 368, 738 ActionDest: 931 Annotation: Subtype: Link Rect: 199, 602, 214, 614 ActionDest: 637 Annotation: Subtype: Link Rect: 443, 602, 458, 614 ActionDest: 705 Annotation: Subtype: Link Rect: 156, 565, 168, 574 ActionDest: 916 Annotation: Subtype: Link Rect: 294, 400, 308, 412 ActionDest: 799 Annotation: Subtype: Link Rect: 105, 386, 120, 398 ActionDest: 799 Annotation: Subtype: Link Rect: 499, 386, 514, 398 ActionDest: 799 Page: Sequence: 16 Annotations: Annotation: Subtype: Link Rect: 410, 713, 425, 725 ActionDest: 799 Annotation: Subtype: Link Rect: 106, 632, 120, 644 ActionDest: 799 Annotation: Subtype: Link Rect: 451, 594, 463, 603 ActionDest: 931 Annotation: Subtype: Link Rect: 159, 486, 171, 495 ActionDest: 931 Annotation: Subtype: Link Rect: 132, 405, 144, 414 ActionDest: 931 Annotation: Subtype: Link Rect: 480, 357, 516, 368 Annotation: Subtype: Link Rect: 304, 318, 342, 329 Annotation: Subtype: Link Rect: 348, 318, 384, 329 Annotation: Subtype: Link Rect: 338, 293, 376, 303 Annotation: Subtype: Link Rect: 382, 293, 418, 303 Annotation: Subtype: Link Rect: 100, 255, 137, 265 Annotation: Subtype: Link Rect: 473, 215, 511, 226 Annotation: Subtype: Link Rect: 100, 177, 137, 187 Annotation: Subtype: Link Rect: 352, 151, 390, 161 Annotation: Subtype: Link Rect: 100, 126, 137, 136 Annotation: Subtype: Link Rect: 352, 99, 389, 110 Annotation: Subtype: Link Rect: 422, 73, 460, 84 Page: Sequence: 17 Annotations: Annotation: Subtype: Link Rect: 418, 727, 455, 738 Annotation: Subtype: Link Rect: 462, 727, 498, 738 Annotation: Subtype: Link Rect: 177, 689, 214, 699 Annotation: Subtype: Link Rect: 204, 663, 242, 673 Annotation: Subtype: Link Rect: 304, 611, 342, 622 Annotation: Subtype: Link Rect: 348, 611, 384, 622 Annotation: Subtype: Link Rect: 296, 585, 333, 596 Annotation: Subtype: Link Rect: 243, 559, 280, 570 Annotation: Subtype: Link Rect: 287, 559, 323, 570 Annotation: Subtype: Link Rect: 392, 521, 429, 531 Annotation: Subtype: Link Rect: 307, 495, 344, 506 Annotation: Subtype: Link Rect: 145, 457, 183, 467 Annotation: Subtype: Link Rect: 236, 418, 274, 428 Annotation: Subtype: Link Rect: 100, 379, 137, 389 Annotation: Subtype: Link Rect: 143, 379, 179, 389 Annotation: Subtype: Link Rect: 471, 353, 508, 364 Annotation: Subtype: Link Rect: 154, 289, 192, 299 Annotation: Subtype: Link Rect: 198, 289, 234, 299 Annotation: Subtype: Link Rect: 302, 249, 340, 260 Annotation: Subtype: Link Rect: 145, 212, 183, 222 Annotation: Subtype: Link Rect: 256, 185, 294, 196 Annotation: Subtype: Link Rect: 242, 160, 279, 170 Annotation: Subtype: Link Rect: 303, 134, 340, 144 Annotation: Subtype: Link Rect: 150, 95, 187, 105 Annotation: Subtype: Link Rect: 360, 69, 397, 80 Page: Sequence: 18 Annotations: Annotation: Subtype: Link Rect: 340, 727, 377, 738 Annotation: Subtype: Link Rect: 242, 702, 279, 712 Annotation: Subtype: Link Rect: 385, 675, 423, 686 Annotation: Subtype: Link Rect: 362, 637, 400, 648 Annotation: Subtype: Link Rect: 480, 611, 516, 622 Annotation: Subtype: Link Rect: 437, 585, 474, 596 Annotation: Subtype: Link Rect: 177, 547, 214, 557 Annotation: Subtype: Link Rect: 352, 521, 389, 531 Annotation: Subtype: Link Rect: 100, 483, 137, 493 Annotation: Subtype: Link Rect: 314, 456, 351, 467 Annotation: Subtype: Link Rect: 280, 418, 318, 428 Annotation: Subtype: Link Rect: 395, 404, 519, 415 Annotation: Subtype: Link Rect: 97, 391, 175, 402 Annotation: Subtype: Link Rect: 380, 353, 417, 364 Annotation: Subtype: Link Rect: 154, 315, 191, 325 Annotation: Subtype: Link Rect: 198, 315, 234, 325 Annotation: Subtype: Link Rect: 303, 288, 340, 299 Annotation: Subtype: Link Rect: 403, 263, 440, 273 Annotation: Subtype: Link Rect: 258, 237, 295, 247 Annotation: Subtype: Link Rect: 132, 212, 169, 222 Annotation: Subtype: Link Rect: 327, 173, 364, 183 Annotation: Subtype: Link Rect: 445, 146, 483, 157 Annotation: Subtype: Link Rect: 461, 120, 499, 131 Annotation: Subtype: Link Rect: 413, 94, 450, 105 Annotation: Subtype: Link Rect: 342, 69, 380, 80 Page: Sequence: 19 Annotations: Annotation: Subtype: Link Rect: 169, 702, 207, 712 Annotation: Subtype: Link Rect: 213, 702, 249, 712 Annotation: Subtype: Link Rect: 167, 676, 205, 686 Annotation: Subtype: Link Rect: 158, 651, 196, 661 Annotation: Subtype: Link Rect: 202, 651, 238, 661 Annotation: Subtype: Link Rect: 397, 624, 434, 635 Annotation: Subtype: Link Rect: 371, 598, 408, 609 Annotation: Subtype: Link Rect: 329, 559, 366, 570 Annotation: Subtype: Link Rect: 76, 517, 166, 548 Annotation: Subtype: Link Rect: 234, 512, 407, 522 Checksum: d70b443f Type: CRC32 Checksum: 911718955b5c7887832d75df5fa3e76f Type: MD5 Checksum: c043135173a331c77b283e3c06225236de37d6db Type: SHA-1 Checksum: 39604f02b89f77a34dad8fcc285bb635cf0ae76c926a7c540bef27afd14d45aa Type: SHA-256