8f57e77618d7d7484a54910743fba7e4 pmc_32098323.pdf 011af8edd320270de84aebb11fba9610ec30455c pmc_32098323.pdf 743aecaf2de8ad1a81b7ad428c120b103a6eed2bd58d98834042ec50b702df67 pmc_32098323.pdf Title: Miniaturized 0.13-m CMOS Front-End Analog for AlN PMUT Arrays Subject: This paper presents an analog front-end transceiver for an ultrasound imaging system based on a high-voltage (HV) transmitter, a low-noise front-end amplifier (RX), and a complementary-metal-oxide-semiconductor, aluminum nitride, piezoelectric micromachined ultrasonic transducer (CMOS-AlN-PMUT). The system was designed using the 0.13-m Silterra CMOS process and the MEMS-on-CMOS platform, which allowed for the implementation of an AlN PMUT on top of the CMOS-integrated circuit. The HV transmitter drives a column of six 80-m-square PMUTs excited with 32 V in order to generate enough acoustic pressure at a 2.1-mm axial distance. On the reception side, another six 80-m-square PMUT columns convert the received echo into an electric charge that is amplified by the receiver front-end amplifier. A comparative analysis between a voltage front-end amplifier (VA) based on capacitive integration and a charge-sensitive front-end amplifier (CSA) is presented. Electrical and acoustic experiments successfully demonstrated the functionality of the designed low-power analog front-end circuitry, which outperformed a state-of-the art front-end application-specific integrated circuit (ASIC) in terms of power consumption, noise performance, and area. Keywords: ultrasound; PMUT; high-voltage (HV) transmitter; low-voltage receiver (RX) amplifier; ultrasound application-specific integrated circuit (ASIC); monolithical integration; CMOS; MEMS Author: Iván Zamora, Eyglis Ledesma, Arantxa Uranga and Núria Barniol Creator: LaTeX with hyperref package Producer: pdfTeX-1.40.18 CreationDate: Sat Feb 22 08:16:42 2020 CET ModDate: Sat Feb 22 08:16:42 2020 CET Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 18 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 7543617 bytes Optimized: no PDF version: 1.5 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- JGVSKR+URWPalladioL-Ital Type 1 Custom yes yes no 104 0 CSJZOS+URWPalladioL-Bold Type 1 Custom yes yes no 105 0 XIRVNA+EURB10 Type 1 Builtin yes yes no 106 0 FYYAHQ+VnURWPalladioL-Bold Type 1 Custom yes yes no 107 0 RXMJXT+URWPalladioL-Roma Type 1 Custom yes yes no 108 0 XHDYZV+VnURWPalladioL Type 1 Custom yes yes no 109 0 OVNEXW+EURM10 Type 1 Builtin yes yes no 110 0 SVVJCD+Rpxr Type 1 Builtin yes yes no 111 0 RVSEMT+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 116 0 MCBCCI+SourceSansRoman-Regular Type 1C Custom yes yes no 133 0 MCBCCM+SourceSansRoman.613wght Type 1C Custom yes yes no 134 0 MCBCCO+SourceSansRoman-Bold Type 1C Custom yes yes no 135 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 174 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 175 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 176 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 177 0 OHHNRZ+Pxsy Type 1 Builtin yes yes no 209 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 233 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 234 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 235 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 236 0 PLPNFC+TimesNewRoman,Bold CID TrueType Identity-H yes yes yes 237 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 264 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 265 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 266 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 267 0 PLPNFC+TimesNewRoman,Bold CID TrueType Identity-H yes yes yes 268 0 MFIGJL+Rpxb Type 1 Builtin yes yes no 307 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 314 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 315 0 PLPKMO+PalatinoLinotype,Bold CID TrueType Identity-H yes yes yes 316 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 317 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 318 0 SOSTRQ+CMR10 Type 1 Builtin yes yes no 348 0 XKNNUY+Pxex Type 1 Builtin yes yes no 350 0 ROWTUD+PazoMath Type 1 Builtin yes yes no 352 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 375 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 376 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 377 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 378 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 379 0 PLPPIF+CambriaMath CID TrueType Identity-H yes yes yes 380 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 424 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 425 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 426 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 427 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 428 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 458 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 459 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 460 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 461 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 462 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 501 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 502 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 503 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 504 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 505 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 533 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 534 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 535 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 536 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 537 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 572 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 573 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 574 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 575 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 576 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 602 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 603 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 604 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 605 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 606 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 643 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 644 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 645 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 646 0 PMAMIH+Symbol Type 1C Custom yes yes yes 666 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 667 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 668 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 669 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 670 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 671 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 710 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 711 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 712 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 713 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 714 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 740 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 741 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 742 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 743 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 744 0 HHGXKW+Rpxmi Type 1 Builtin yes yes no 778 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 784 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 785 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 786 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 787 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 788 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 827 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 828 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 829 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 830 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 831 0 PLPKFN+PalatinoLinotype CID TrueType Identity-H yes yes yes 857 0 PLPKFO+PalatinoLinotype TrueType WinAnsi yes yes no 858 0 PLPKMN+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 859 0 PLPKMP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 860 0 PLPLOK+TimesNewRoman CID TrueType Identity-H yes yes yes 861 0 PLPPIF+CambriaMath CID TrueType Identity-H yes yes yes 862 0 VSHNAE+Rpcxr Type 1 Builtin yes yes no 938 0 Jhove (Rel. 1.22.1, 2019-04-17) Date: 2023-05-27 03:45:30 CEST RepresentationInformation: pmc_32098323.pdf ReportingModule: PDF-hul, Rel. 1.12.1 (2019-04-17) LastModified: 2023-03-31 11:44:14 CEST Size: 7543617 Format: PDF Version: 1.5 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 0 FreeObjects: 2 IncrementalUpdates: 0 DocumentCatalog: ViewerPreferences: HideToolbar: false HideMenubar: false HideWindowUI: false FitWindow: true CenterWindow: false DisplayDocTitle: false NonFullScreenPageMode: UseNone Direction: L2R ViewArea: CropBox ViewClip: CropBox PrintArea: CropBox PageClip: CropBox PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: ぉのぴひはつふっぴどはのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸲ Item: Title: うひはのぴ〭ぅのつぜ〴ぜ〰ぁのちぬはでぜ〴ぜ〰ぃどひっふどぴぜ〴ぜ〰いづびどでのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮ㄩ‾㸊⡜㌷㙜㌷㝜〰さぬぴひちびはのどっぜ〴ぜ〰ごひちのびつふっづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㈩‾㸊⡜㌷㙜㌷㝜〰えどでと〭ざはぬぴちでづぜ〴ぜ〰ごひちのびねどぴぴづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㌩‾㸊⡜㌷㙜㌷㝜〰うひはのぴ〭ぅのつぜ〴ぜ〰ぁねばぬどてどづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獵扳散瑩潮⸲⸳⸱ Children: Item: Title: さぬぴひちびはのどっぜ〴ぜ〰ごひちのびつふっづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㈩‾㸊⡜㌷㙜㌷㝜〰えどでと〭ざはぬぴちでづぜ〴ぜ〰ごひちのびねどぴぴづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㌩‾㸊⡜㌷㙜㌷㝜〰うひはのぴ〭ぅのつぜ〴ぜ〰ぁねばぬどてどづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獵扳散瑩潮⸲⸳⸱ Item: Title: えどでと〭ざはぬぴちでづぜ〴ぜ〰ごひちのびねどぴぴづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㌩‾㸊⡜㌷㙜㌷㝜〰うひはのぴ〭ぅのつぜ〴ぜ〰ぁねばぬどてどづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獵扳散瑩潮⸲⸳⸱ Item: Title: うひはのぴ〭ぅのつぜ〴ぜ〰ぁねばぬどてどづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獵扳散瑩潮⸲⸳⸱ Children: Item: Title: ざはぬぴちでづぜ〴ぜ〰ぁねばぬどてどづひぜ〴ぜ〰ぜ〵ぜ〰ざぁぜ〵ㅜ〰ぜ〴ぜ〰いづびっひどばぴどはのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獵扳散瑩潮⸲⸳⸲ Item: Title: ぃとちひでづ〭こづのびどぴどぶづぜ〴ぜ〰ぁねばぬどてどづひぜ〴ぜ〰ぜ〵ぜ〰ぃこぁぜ〵ㅜ〰ぜ〴ぜ〰いづびっひどばぴどはのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㈮㐩‾㸊⡜㌷㙜㌷㝜〰うひはのぴ〭ぅのつぜ〴ぜ〰ぁねばぬどてどづひぜ〴ぜ〰こどねふぬちぴどはのぜ〴ぜ〰げづびふぬぴびぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獵扳散瑩潮⸲⸴⸱ Item: Title: うひはのぴ〭ぅのつぜ〴ぜ〰ぁねばぬどてどづひぜ〴ぜ〰こどねふぬちぴどはのぜ〴ぜ〰げづびふぬぴびぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獵扳散瑩潮⸲⸴⸱ Children: Item: Title: ごひちのびどねばづつちのっづぜ〴ぜ〰ぇちどのぜ〴ぜ〰ちのつぜ〴ぜ〰ぉのばふぴぜ〴ぜ〰ぉねばづつちのっづぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獵扳散瑩潮⸲⸴⸲ Item: Title: ぎはどびづぜ〴ぜ〰ぐづひてはひねちのっづぜ〴ぜ〰ちのつぜ〴ぜ〰いべのちねどっぜ〴ぜ〰げちのでづぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸳ Item: Title: ぅぬづっぴひどっちぬぜ〴ぜ〰ぃとちひちっぴづひどぺちぴどはのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㌮ㄩ‾㸊⡜㌷㙜㌷㝜〰えどでと〭ざはぬぴちでづぜ〴ぜ〰ごひちのびねどぴぴづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㌮㈩‾㸊⡜㌷㙜㌷㝜〰うひはのぴ〭ぅのつぜ〴ぜ〰ぁねばぬどてどづひびぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸴ Children: Item: Title: えどでと〭ざはぬぴちでづぜ〴ぜ〰ごひちのびねどぴぴづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㌮㈩‾㸊⡜㌷㙜㌷㝜〰うひはのぴ〭ぅのつぜ〴ぜ〰ぁねばぬどてどづひびぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸴ Item: Title: うひはのぴ〭ぅのつぜ〴ぜ〰ぁねばぬどてどづひびぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸴ Item: Title: ぁっはふびぴどっぜ〴ぜ〰ぃとちひちっぴづひどぺちぴどはのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸵ Item: Title: いどびっふびびどはのぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㔮ㄩ‾㸊⡜㌷㙜㌷㝜〰えざぜ〴ぜ〰ごひちのびねどぴぴづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㔮㈩‾㸊⡜㌷㙜㌷㝜〰うひはのぴ〭ぅのつぜ〴ぜ〰げづっづどぶづひぜ〴ぜ〰ぁねばぬどてどづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸶ Children: Item: Title: えざぜ〴ぜ〰ごひちのびねどぴぴづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳畢獥捴楯渮㔮㈩‾㸊⡜㌷㙜㌷㝜〰うひはのぴ〭ぅのつぜ〴ぜ〰げづっづどぶづひぜ〴ぜ〰ぁねばぬどてどづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸶ Item: Title: うひはのぴ〭ぅのつぜ〴ぜ〰げづっづどぶづひぜ〴ぜ〰ぁねばぬどてどづひぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸶ Item: Title: ぃはのっぬふびどはのびぜ〴〩਼㰠⽓ 䝯呯 䐠⡳散瑩潮⸶ Item: Title: げづてづひづのっづび Filters: FilterPipeline: FlateDecode Fonts: Type1: Font: BaseFont: ROWTUD+PazoMath FontSubset: true FirstChar: 68 LastChar: 87 FontDescriptor: FontName: ROWTUD+PazoMath Flags: Symbolic FontBBox: -40, -283, 878, 946 FontFile: true Font: BaseFont: JGVSKR+URWPalladioL-Ital FontSubset: true FirstChar: 2 LastChar: 121 FontDescriptor: FontName: JGVSKR+URWPalladioL-Ital Flags: Symbolic FontBBox: -170, -305, 1010, 941 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: CSJZOS+URWPalladioL-Bold FontSubset: true FirstChar: 3 LastChar: 122 FontDescriptor: FontName: CSJZOS+URWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: XIRVNA+EURB10 FontSubset: true FirstChar: 22 LastChar: 22 FontDescriptor: FontName: XIRVNA+EURB10 Flags: Symbolic FontBBox: -30, -247, 1178, 723 FontFile: true Font: BaseFont: HHGXKW+Rpxmi FontSubset: true FirstChar: 37 LastChar: 37 FontDescriptor: FontName: HHGXKW+Rpxmi Flags: Symbolic FontBBox: -70, -289, 949, 802 FontFile: true Font: BaseFont: VSHNAE+Rpcxr FontSubset: true FirstChar: 169 LastChar: 169 FontDescriptor: FontName: VSHNAE+Rpcxr Flags: Symbolic FontBBox: -212, -286, 1344, 973 FontFile: true Font: BaseFont: FYYAHQ+VnURWPalladioL-Bold FontSubset: true FirstChar: 161 LastChar: 243 FontDescriptor: FontName: FYYAHQ+VnURWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: RXMJXT+URWPalladioL-Roma FontSubset: true FirstChar: 2 LastChar: 151 FontDescriptor: FontName: RXMJXT+URWPalladioL-Roma Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: XHDYZV+VnURWPalladioL FontSubset: true FirstChar: 225 LastChar: 226 FontDescriptor: FontName: XHDYZV+VnURWPalladioL Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: OVNEXW+EURM10 FontSubset: true FirstChar: 22 LastChar: 22 FontDescriptor: FontName: OVNEXW+EURM10 Flags: Symbolic FontBBox: -32, -243, 1060, 720 FontFile: true Font: BaseFont: SVVJCD+Rpxr FontSubset: true FirstChar: 11 LastChar: 61 FontDescriptor: FontName: SVVJCD+Rpxr Flags: Symbolic FontBBox: -40, -283, 904, 728 FontFile: true Font: BaseFont: OHHNRZ+Pxsy FontSubset: true FirstChar: 0 LastChar: 112 FontDescriptor: FontName: OHHNRZ+Pxsy Flags: Symbolic FontBBox: -21, -994, 1292, 912 FontFile: true Font: BaseFont: MFIGJL+Rpxb FontSubset: true FirstChar: 47 LastChar: 47 FontDescriptor: FontName: MFIGJL+Rpxb Flags: Symbolic FontBBox: -57, -266, 932, 729 FontFile: true Font: BaseFont: SOSTRQ+CMR10 FontSubset: true FirstChar: 40 LastChar: 93 FontDescriptor: FontName: SOSTRQ+CMR10 Flags: Symbolic FontBBox: -40, -250, 1009, 750 FontFile: true Font: BaseFont: XKNNUY+Pxex FontSubset: true FirstChar: 16 LastChar: 112 FontDescriptor: FontName: XKNNUY+Pxex Flags: Symbolic FontBBox: -5, -3116, 1694, 792 FontFile: true Pages: Page: Sequence: 1 Annotations: Annotation: Subtype: Link Rect: 75, 757, 194, 793 Annotation: Subtype: Link Rect: 474, 757, 519, 793 Annotation: Subtype: Link Rect: 133, 660, 144, 674 Annotation: Subtype: Link Rect: 218, 660, 229, 674 Annotation: Subtype: Link Rect: 396, 660, 407, 674 Annotation: Subtype: Link Rect: 466, 595, 518, 614 Annotation: Subtype: Link Rect: 258, 233, 265, 242 ActionDest: 908 Annotation: Subtype: Link Rect: 508, 233, 515, 242 ActionDest: 908 Annotation: Subtype: Link Rect: 165, 219, 172, 229 ActionDest: 927 Annotation: Subtype: Link Rect: 288, 219, 295, 229 ActionDest: 927 Annotation: Subtype: Link Rect: 508, 206, 515, 215 ActionDest: 927 Annotation: Subtype: Link Rect: 167, 38, 232, 50 Annotation: Subtype: Link Rect: 404, 38, 519, 50 Page: Sequence: 2 Annotations: Annotation: Subtype: Link Rect: 213, 688, 220, 698 ActionDest: 927 Annotation: Subtype: Link Rect: 127, 645, 133, 657 ActionDest: 166 Annotation: Subtype: Link Rect: 467, 143, 474, 153 ActionDest: 927 Annotation: Subtype: Link Rect: 474, 143, 481, 153 ActionDest: 927 Annotation: Subtype: Link Rect: 484, 143, 491, 153 ActionDest: 927 Annotation: Subtype: Link Rect: 272, 103, 279, 112 ActionDest: 927 Page: Sequence: 3 Annotations: Annotation: Subtype: Link Rect: 114, 661, 121, 671 ActionDest: 927 Annotation: Subtype: Link Rect: 330, 659, 337, 671 ActionDest: 206 Annotation: Subtype: Link Rect: 172, 645, 186, 657 ActionDest: 206 Annotation: Subtype: Link Rect: 383, 645, 397, 657 ActionDest: 206 Annotation: Subtype: Link Rect: 320, 632, 335, 644 ActionDest: 304 Annotation: Subtype: Link Rect: 505, 618, 519, 630 ActionDest: 414 Annotation: Subtype: Link Rect: 458, 605, 465, 617 ActionDest: 564 Annotation: Subtype: Link Rect: 311, 591, 318, 603 ActionDest: 774 Annotation: Subtype: Link Rect: 206, 501, 218, 510 ActionDest: 927 Annotation: Subtype: Link Rect: 338, 474, 350, 483 ActionDest: 927 Annotation: Subtype: Link Rect: 232, 391, 244, 400 ActionDest: 927 Annotation: Subtype: Link Rect: 231, 323, 243, 332 ActionDest: 927 Annotation: Subtype: Link Rect: 244, 323, 256, 332 ActionDest: 927 Annotation: Subtype: Link Rect: 174, 242, 186, 251 ActionDest: 927 Annotation: Subtype: Link Rect: 503, 202, 515, 211 ActionDest: 927 Annotation: Subtype: Link Rect: 396, 185, 403, 197 ActionDest: 224 Annotation: Subtype: Link Rect: 413, 120, 425, 130 ActionDest: 927 Page: Sequence: 4 Annotations: Annotation: Subtype: Link Rect: 390, 442, 397, 454 ActionDest: 224 Annotation: Subtype: Link Rect: 224, 391, 231, 400 ActionDest: 304 Annotation: Subtype: Link Rect: 438, 158, 449, 167 ActionDest: 927 Page: Sequence: 5 Annotations: Annotation: Subtype: Link Rect: 387, 486, 394, 498 ActionDest: 304 Annotation: Subtype: Link Rect: 377, 446, 384, 457 ActionDest: 304 Page: Sequence: 6 Annotations: Annotation: Subtype: Link Rect: 367, 729, 379, 738 ActionDest: 927 Annotation: Subtype: Link Rect: 379, 729, 391, 738 ActionDest: 927 Annotation: Subtype: Link Rect: 196, 661, 208, 671 ActionDest: 927 Annotation: Subtype: Link Rect: 209, 661, 221, 671 ActionDest: 927 Annotation: Subtype: Link Rect: 452, 621, 464, 630 ActionDest: 927 Annotation: Subtype: Link Rect: 465, 621, 477, 630 ActionDest: 927 Annotation: Subtype: Link Rect: 477, 621, 489, 630 ActionDest: 927 Annotation: Subtype: Link Rect: 224, 607, 231, 617 ActionDest: 927 Annotation: Subtype: Link Rect: 231, 607, 243, 617 ActionDest: 927 Annotation: Subtype: Link Rect: 126, 562, 133, 574 ActionDest: 365 Annotation: Subtype: Link Rect: 458, 424, 465, 435 ActionDest: 365 Annotation: Subtype: Link Rect: 281, 170, 293, 179 ActionDest: 927 Page: Sequence: 7 Annotations: Annotation: Subtype: Link Rect: 422, 545, 429, 557 ActionDest: 365 Annotation: Subtype: Link Rect: 268, 257, 280, 266 ActionDest: 927 Annotation: Subtype: Link Rect: 191, 241, 198, 253 ActionDest: 414 Page: Sequence: 8 Annotations: Annotation: Subtype: Link Rect: 138, 506, 145, 518 ActionDest: 414 Annotation: Subtype: Link Rect: 214, 208, 226, 217 ActionDest: 927 Annotation: Subtype: Link Rect: 131, 163, 138, 175 ActionDest: 492 Page: Sequence: 9 Annotations: Annotation: Subtype: Link Rect: 126, 480, 133, 492 ActionDest: 492 Annotation: Subtype: Link Rect: 410, 95, 422, 107 ActionDest: 564 Page: Sequence: 10 Annotations: Annotation: Subtype: Link Rect: 129, 515, 141, 527 ActionDest: 564 Annotation: Subtype: Link Rect: 226, 95, 238, 107 ActionDest: 635 Page: Sequence: 11 Annotations: Annotation: Subtype: Link Rect: 128, 323, 140, 335 ActionDest: 635 Page: Sequence: 12 Annotations: Annotation: Subtype: Link Rect: 129, 699, 141, 711 ActionDest: 701 Annotation: Subtype: Link Rect: 476, 371, 487, 382 ActionDest: 701 Page: Sequence: 13 Annotations: Annotation: Subtype: Link Rect: 371, 742, 383, 752 ActionDest: 927 Annotation: Subtype: Link Rect: 127, 686, 139, 698 ActionDest: 774 Annotation: Subtype: Link Rect: 388, 332, 400, 344 ActionDest: 818 Annotation: Subtype: Link Rect: 418, 264, 430, 276 ActionDest: 818 Annotation: Subtype: Link Rect: 237, 251, 249, 262 ActionDest: 818 Page: Sequence: 14 Annotations: Annotation: Subtype: Link Rect: 122, 182, 129, 194 ActionDest: 897 Page: Sequence: 15 Annotations: Annotation: Subtype: Link Rect: 283, 684, 293, 692 ActionDest: 927 Annotation: Subtype: Link Rect: 339, 684, 349, 692 ActionDest: 935 Annotation: Subtype: Link Rect: 400, 684, 406, 692 ActionDest: 927 Annotation: Subtype: Link Rect: 465, 684, 475, 692 ActionDest: 927 Annotation: Subtype: Link Rect: 318, 347, 325, 359 ActionDest: 908 Page: Sequence: 16 Annotations: Annotation: Subtype: Link Rect: 272, 725, 282, 732 ActionDest: 927 Annotation: Subtype: Link Rect: 318, 725, 327, 732 ActionDest: 927 Annotation: Subtype: Link Rect: 369, 725, 378, 732 ActionDest: 927 Annotation: Subtype: Link Rect: 426, 725, 436, 732 ActionDest: 927 Annotation: Subtype: Link Rect: 477, 725, 487, 732 ActionDest: 927 Annotation: Subtype: Link Rect: 313, 143, 351, 154 Annotation: Subtype: Link Rect: 357, 143, 393, 154 Page: Sequence: 17 Annotations: Annotation: Subtype: Link Rect: 359, 727, 396, 738 Annotation: Subtype: Link Rect: 181, 651, 219, 661 Annotation: Subtype: Link Rect: 225, 651, 261, 661 Annotation: Subtype: Link Rect: 232, 611, 270, 622 Annotation: Subtype: Link Rect: 276, 611, 312, 622 Annotation: Subtype: Link Rect: 396, 572, 433, 583 Annotation: Subtype: Link Rect: 351, 546, 389, 557 Annotation: Subtype: Link Rect: 395, 546, 431, 557 Annotation: Subtype: Link Rect: 307, 417, 344, 428 Annotation: Subtype: Link Rect: 284, 379, 321, 389 Annotation: Subtype: Link Rect: 479, 301, 516, 312 Annotation: Subtype: Link Rect: 100, 289, 136, 299 Annotation: Subtype: Link Rect: 400, 146, 438, 157 Annotation: Subtype: Link Rect: 218, 69, 256, 80 Page: Sequence: 18 Annotations: Annotation: Subtype: Link Rect: 223, 714, 261, 725 Annotation: Subtype: Link Rect: 267, 714, 303, 725 Annotation: Subtype: Link Rect: 76, 672, 166, 703 Annotation: Subtype: Link Rect: 234, 667, 407, 677 Checksum: 916c60f2 Type: CRC32 Checksum: 8f57e77618d7d7484a54910743fba7e4 Type: MD5 Checksum: 011af8edd320270de84aebb11fba9610ec30455c Type: SHA-1