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Item: Title: Step-wise structure. Item: Title: Tapered grating structure. Item: Title: Height sensing. Item: Title: Thermal nanoimprinted PMMA structures. Item: Title: Discussion Item: Title: Materials and Methods Children: Item: Title: Optical set-up. Item: Title: Real-time metrology. Item: Title: Stylus profilometry. Item: Title: Si grating fabrication. Item: Title: Thermal nanoimprint lithography. Item: Title: Acknowledgements Item: Title: Figure 1 Experimental setup, metrology workflow and simulations. Item: Title: Figure 2 Step-wise structures. Item: Title: Figure 3 Tapered structures. Item: Title: Figure 4 Variable height structures. Item: Title: Figure 5 Thermally nanoimprinted structures. Item: Title: Table 1 Sample description and key parameters. 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