8478f80b45260d2b18c78be7518742e0 pmc_34640228.pdf 1d32a84f045d9904ffffa84bc6e205df75a5f9bc pmc_34640228.pdf bf80def13eb4641c7d978f2ef8bc655e1dff10f05bf538370e6eaefa8da84255 pmc_34640228.pdf Title: Status and Prospects of Cubic Silicon Carbide Power Electronics Device Technology Subject: Wide bandgap (WBG) semiconductors are becoming more widely accepted for use in power electronics due to their superior electrical energy efficiencies and improved power densities. Although WBG cubic silicon carbide (3C-SiC) displays a modest bandgap compared to its commercial counterparts (4H-silicon carbide and gallium nitride), this material has excellent attributes as the WBG semiconductor of choice for low-resistance, reliable diode and MOS devices. At present the material remains firmly in the research domain due to numerous technological impediments that hamper its widespread adoption. The most obvious obstacle is defect-free 3C-SiC; presently, 3C-SiC bulk and heteroepitaxial (on-silicon) display high defect densities such as stacking faults and antiphase boundaries. Moreover, heteroepitaxy 3C-SiC-on-silicon means low temperature processing budgets are imposed upon the system (max. temperature limited to ~1400 C) limiting selective doping realisation. This paper will give a brief overview of some of the scientific aspects associated with 3C-SiC processing technology in addition to focussing on the latest state of the art results. A particular focus will be placed upon key process steps such as Schottky and ohmic contacts, ion implantation and MOS processing including reliability. Finally, the paper will discuss some device prototypes (diodes and MOSFET) and draw conclusions around the prospects for 3C-SiC devices based upon the processing technology presented. Keywords: 3C-SiC; cubic silicon carbide; power electronics Author: Fan Li, Fabrizio Roccaforte, Giuseppe Greco, Patrick Fiorenza, Francesco La Via, Amador Pérez-Tomas, Jonathan Edward Evans, Craig Arthur Fisher, Finn Alec Monaghan, Philip Andrew Mawby and Mike Jennings Creator: LaTeX with hyperref Producer: pdfTeX-1.40.21 CreationDate: Mon Oct 11 08:58:01 2021 CEST ModDate: Mon Oct 11 09:00:39 2021 CEST Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 22 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 4263490 bytes Optimized: no PDF version: 1.7 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- FDDOOY+VnURWPalladioL Type 1 Custom yes yes no 10 0 BXYREB+URWPalladioL-Ital Type 1 Custom yes yes no 15 0 YBQPAN+URWPalladioL-Bold Type 1 Custom yes yes no 20 0 YIUQQC+URWPalladioL-Roma Type 1 Custom yes yes no 24 0 NZAPJD+CMSY10 Type 1 Builtin yes yes no 28 0 BTFGED+VnURWPalladioL-Bold Type 1 Custom yes yes no 32 0 YOTXCC+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 41 0 MCBCCI+SourceSansRoman-Regular Type 1C Custom yes yes no 63 0 MCBCCM+SourceSansRoman.613wght Type 1C Custom yes yes no 67 0 MCBCCO+SourceSansRoman-Bold Type 1C Custom yes yes no 71 0 PTVOAX+EURM10 Type 1 Builtin yes yes no 83 0 SGEQPS+PazoMath Type 1 Builtin yes yes no 90 0 GQNMRP+CMEX10 Type 1 Builtin yes yes no 97 0 JHYTSG+CMR10 Type 1 Builtin yes yes no 101 0 ARJFVU+PazoMath-Italic Type 1 Builtin yes yes no 126 0 UUADDT+PazoMath-BoldItalic Type 1 Builtin yes yes no 139 0 UEUJES+URWPalladioL-BoldItal Type 1 Custom yes yes no 143 0 TSEGZF+PazoMath-Bold Type 1 Builtin yes yes no 147 0 Jhove (Rel. 1.22.1, 2019-04-17) Date: 2022-03-22 02:42:01 CET RepresentationInformation: pmc_34640228.pdf ReportingModule: PDF-hul, Rel. 1.12.1 (2019-04-17) LastModified: 2022-01-10 08:36:06 CET Size: 4263490 Format: PDF Version: 1.7 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 565 FreeObjects: 1 IncrementalUpdates: 0 DocumentCatalog: PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: Introduction Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@7b69c6ba Item: Title: Cubic Silicon Carbide (3C-SiC): Structure and Material Properties for Power Electronic Application Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@46daef40 Item: Title: Processing Technology for 3C-SiC Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@12f41634 Children: Item: Title: Schottky Contact Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@13c27452 Item: Title: Ion Implantation and Activation Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@262b2c86 Item: Title: Ohmic Contact Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@371a67ec Item: Title: MOS Processing Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@5ed828d Item: Title: 3C-SiC Device Prototypes Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@50d0686 Children: Item: Title: Schottky Diode Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@7a3d45bd Item: Title: PiN Diode Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@1e7c7811 Item: Title: MOSFET Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@77ec78b9 Item: Title: Conclusions Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@1a3869f4 Item: Title: References Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@a38d7a3 Info: Title: Status and Prospects of Cubic Silicon Carbide Power Electronics Device Technology Author: Fan Li, Fabrizio Roccaforte, Giuseppe Greco, Patrick Fiorenza, Francesco La Via, Amador Pérez-Tomas, Jonathan Edward Evans, Craig Arthur Fisher, Finn Alec Monaghan, Philip Andrew Mawby and Mike Jennings Subject: Wide bandgap (WBG) semiconductors are becoming more widely accepted for use in power electronics due to their superior electrical energy efficiencies and improved power densities. Although WBG cubic silicon carbide (3C-SiC) displays a modest bandgap compared to its commercial counterparts (4H-silicon carbide and gallium nitride), this material has excellent attributes as the WBG semiconductor of choice for low-resistance, reliable diode and MOS devices. At present the material remains firmly in the research domain due to numerous technological impediments that hamper its widespread adoption. The most obvious obstacle is defect-free 3C-SiC; presently, 3C-SiC bulk and heteroepitaxial (on-silicon) display high defect densities such as stacking faults and antiphase boundaries. Moreover, heteroepitaxy 3C-SiC-on-silicon means low temperature processing budgets are imposed upon the system (max. temperature limited to ~1400 C) limiting selective doping realisation. This paper will give a brief overview of some of the scientific aspects associated with 3C-SiC processing technology in addition to focussing on the latest state of the art results. A particular focus will be placed upon key process steps such as Schottky and ohmic contacts, ion implantation and MOS processing including reliability. Finally, the paper will discuss some device prototypes (diodes and MOSFET) and draw conclusions around the prospects for 3C-SiC devices based upon the processing technology presented. Keywords: 3C-SiC; cubic silicon carbide; power electronics Creator: LaTeX with hyperref Producer: pdfTeX-1.40.21 CreationDate: Mon Oct 11 08:58:01 CEST 2021 ModDate: Mon Oct 11 09:00:39 CEST 2021 ID: 0x7736810f0f136f5e027f1dabc6d32fe7, 0x7736810f0f136f5e027f1dabc6d32fe7 Filters: FilterPipeline: FlateDecode Fonts: Type1: Font: BaseFont: BTFGED+VnURWPalladioL-Bold FontSubset: true FirstChar: 178 LastChar: 178 FontDescriptor: FontName: BTFGED+VnURWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: GQNMRP+CMEX10 FontSubset: true FirstChar: 32 LastChar: 33 FontDescriptor: FontName: GQNMRP+CMEX10 Flags: Symbolic FontBBox: -24, -2960, 1454, 772 FontFile: true Font: BaseFont: JHYTSG+CMR10 FontSubset: true FirstChar: 61 LastChar: 61 FontDescriptor: FontName: JHYTSG+CMR10 Flags: Symbolic FontBBox: -40, -250, 1009, 750 FontFile: true Font: BaseFont: FDDOOY+VnURWPalladioL FontSubset: true FirstChar: 160 LastChar: 225 FontDescriptor: FontName: FDDOOY+VnURWPalladioL Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: UUADDT+PazoMath-BoldItalic FontSubset: true FirstChar: 109 LastChar: 114 FontDescriptor: FontName: UUADDT+PazoMath-BoldItalic Flags: Symbolic FontBBox: -64, -272, 868, 740 FontFile: true Font: BaseFont: BXYREB+URWPalladioL-Ital FontSubset: true FirstChar: 38 LastChar: 121 FontDescriptor: FontName: BXYREB+URWPalladioL-Ital Flags: Symbolic FontBBox: -170, -305, 1010, 941 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: UEUJES+URWPalladioL-BoldItal FontSubset: true FirstChar: 66 LastChar: 116 FontDescriptor: FontName: UEUJES+URWPalladioL-BoldItal Flags: Symbolic FontBBox: -170, -300, 1073, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: PTVOAX+EURM10 FontSubset: true FirstChar: 12 LastChar: 25 FontDescriptor: FontName: PTVOAX+EURM10 Flags: Symbolic FontBBox: -32, -243, 1060, 720 FontFile: true Font: BaseFont: TSEGZF+PazoMath-Bold FontSubset: true FirstChar: 87 LastChar: 87 FontDescriptor: FontName: TSEGZF+PazoMath-Bold Flags: Symbolic FontBBox: -10, -266, 829, 695 FontFile: true Font: BaseFont: YBQPAN+URWPalladioL-Bold FontSubset: true FirstChar: 3 LastChar: 122 FontDescriptor: FontName: YBQPAN+URWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: YIUQQC+URWPalladioL-Roma FontSubset: true FirstChar: 2 LastChar: 246 FontDescriptor: FontName: YIUQQC+URWPalladioL-Roma Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: SGEQPS+PazoMath FontSubset: true FirstChar: 70 LastChar: 87 FontDescriptor: FontName: SGEQPS+PazoMath Flags: Symbolic FontBBox: -40, -283, 878, 946 FontFile: true Font: BaseFont: NZAPJD+CMSY10 FontSubset: true FirstChar: 0 LastChar: 25 FontDescriptor: FontName: NZAPJD+CMSY10 Flags: Symbolic FontBBox: -29, -960, 1116, 775 FontFile: true Font: BaseFont: ARJFVU+PazoMath-Italic FontSubset: true FirstChar: 109 LastChar: 114 FontDescriptor: FontName: ARJFVU+PazoMath-Italic Flags: Symbolic FontBBox: -70, -277, 902, 733 FontFile: true Pages: Page: Sequence: 1 Annotations: Annotation: Subtype: Link Rect: 35, 759, 169, 795 Annotation: Subtype: Link Rect: 515, 759, 560, 795 Annotation: Subtype: Link Rect: 170, 659, 181, 673 Annotation: Subtype: Link Rect: 265, 659, 276, 673 Annotation: Subtype: Link Rect: 359, 659, 370, 673 Annotation: Subtype: Link Rect: 456, 659, 467, 673 Annotation: Subtype: Link Rect: 258, 647, 269, 661 Annotation: Subtype: Link Rect: 249, 634, 260, 648 Annotation: Subtype: Link Rect: 111, 371, 154, 379 Annotation: Subtype: Link Rect: 35, 358, 154, 367 Annotation: Subtype: Link Rect: 35, 348, 74, 355 Annotation: Subtype: Link Rect: 35, 162, 97, 184 Annotation: Subtype: Link Rect: 153, 89, 154, 98 Annotation: Subtype: Link Rect: 35, 77, 147, 86 Annotation: Subtype: Link Rect: 497, 155, 504, 164 ActionDest: 197 Annotation: Subtype: Link Rect: 549, 143, 556, 152 ActionDest: 197 Annotation: Subtype: Link Rect: 414, 105, 421, 114 ActionDest: 197 Annotation: Subtype: Link Rect: 120, 17, 255, 28 Annotation: Subtype: Link Rect: 402, 17, 558, 28 Annotation: Subtype: Link Rect: 35, 470, 87, 489 Page: Sequence: 2 Annotations: Annotation: Subtype: Link Rect: 427, 498, 434, 507 ActionDest: 197 Annotation: Subtype: Link Rect: 320, 448, 327, 457 ActionDest: 197 Annotation: Subtype: Link Rect: 511, 347, 518, 356 ActionDest: 197 Annotation: Subtype: Link Rect: 482, 174, 489, 183 ActionDest: 197 Annotation: Subtype: Link Rect: 518, 161, 525, 170 ActionDest: 197 Annotation: Subtype: Link Rect: 395, 98, 402, 107 ActionDest: 197 Annotation: Subtype: Link Rect: 403, 98, 415, 107 ActionDest: 197 Annotation: Subtype: Link Rect: 397, 70, 404, 82 ActionDest: 87 Page: Sequence: 3 Annotations: Annotation: Subtype: Link Rect: 305, 287, 317, 296 ActionDest: 197 Annotation: Subtype: Link Rect: 192, 162, 204, 171 ActionDest: 197 Annotation: Subtype: Link Rect: 332, 162, 339, 171 ActionDest: 197 Annotation: Subtype: Link Rect: 387, 159, 394, 171 ActionDest: 87 Annotation: Subtype: Link Rect: 431, 159, 438, 171 ActionDest: 94 Page: Sequence: 4 Annotations: Annotation: Subtype: Link Rect: 308, 273, 320, 282 ActionDest: 197 Annotation: Subtype: Link Rect: 192, 248, 204, 257 ActionDest: 197 Annotation: Subtype: Link Rect: 205, 248, 217, 257 ActionDest: 197 Annotation: Subtype: Link Rect: 495, 223, 507, 232 ActionDest: 197 Annotation: Subtype: Link Rect: 510, 223, 522, 232 ActionDest: 197 Annotation: Subtype: Link Rect: 467, 82, 474, 94 ActionDest: 108 Page: Sequence: 5 Annotations: Annotation: Subtype: Link Rect: 191, 367, 198, 377 ActionDest: 114 Annotation: Subtype: Link Rect: 253, 304, 265, 314 ActionDest: 197 Annotation: Subtype: Link Rect: 405, 267, 417, 276 ActionDest: 197 Annotation: Subtype: Link Rect: 485, 191, 497, 201 ActionDest: 197 Annotation: Subtype: Link Rect: 241, 167, 253, 175 ActionDest: 197 Annotation: Subtype: Link Rect: 402, 151, 409, 165 ActionDest: 114 Annotation: Subtype: Link Rect: 372, 126, 379, 138 ActionDest: 114 Page: Sequence: 6 Annotations: Annotation: Subtype: Link Rect: 491, 497, 502, 505 ActionDest: 197 Annotation: Subtype: Link Rect: 530, 415, 541, 423 ActionDest: 197 Annotation: Subtype: Link Rect: 530, 399, 541, 408 ActionDest: 197 Annotation: Subtype: Link Rect: 530, 376, 541, 385 ActionDest: 197 Annotation: Subtype: Link Rect: 530, 346, 541, 355 ActionDest: 197 Annotation: Subtype: Link Rect: 530, 310, 541, 319 ActionDest: 197 Annotation: Subtype: Link Rect: 530, 278, 541, 286 ActionDest: 197 Annotation: Subtype: Link Rect: 530, 262, 541, 271 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 231, 541, 240 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 199, 541, 208 ActionDest: 197 Annotation: Subtype: Link Rect: 530, 178, 541, 186 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 157, 541, 165 ActionDest: 200 Page: Sequence: 7 Annotations: Annotation: Subtype: Link Rect: 461, 682, 473, 691 ActionDest: 200 Annotation: Subtype: Link Rect: 364, 606, 376, 615 ActionDest: 200 Annotation: Subtype: Link Rect: 377, 606, 389, 615 ActionDest: 200 Annotation: Subtype: Link Rect: 283, 594, 295, 603 ActionDest: 200 Annotation: Subtype: Link Rect: 298, 594, 310, 603 ActionDest: 200 Annotation: Subtype: Link Rect: 330, 493, 342, 502 ActionDest: 200 Annotation: Subtype: Link Rect: 350, 456, 362, 465 ActionDest: 200 Annotation: Subtype: Link Rect: 365, 456, 377, 465 ActionDest: 200 Annotation: Subtype: Link Rect: 301, 443, 312, 452 ActionDest: 200 Annotation: Subtype: Link Rect: 421, 406, 433, 414 ActionDest: 200 Annotation: Subtype: Link Rect: 499, 405, 510, 414 ActionDest: 200 Annotation: Subtype: Link Rect: 511, 406, 523, 414 ActionDest: 200 Annotation: Subtype: Link Rect: 286, 368, 298, 377 ActionDest: 200 Annotation: Subtype: Link Rect: 251, 267, 263, 276 ActionDest: 200 Annotation: Subtype: Link Rect: 253, 242, 265, 251 ActionDest: 200 Annotation: Subtype: Link Rect: 237, 230, 249, 239 ActionDest: 200 Annotation: Subtype: Link Rect: 544, 230, 556, 239 ActionDest: 200 Annotation: Subtype: Link Rect: 354, 192, 366, 201 ActionDest: 200 Annotation: Subtype: Link Rect: 366, 192, 378, 201 ActionDest: 200 Annotation: Subtype: Link Rect: 311, 179, 323, 189 ActionDest: 200 Annotation: Subtype: Link Rect: 323, 179, 335, 189 ActionDest: 200 Annotation: Subtype: Link Rect: 321, 139, 328, 151 ActionDest: 123 Page: Sequence: 8 Annotations: Annotation: Subtype: Link Rect: 530, 663, 541, 671 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 592, 541, 601 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 537, 541, 545 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 510, 541, 518 ActionDest: 203 Annotation: Subtype: Link Rect: 530, 483, 541, 491 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 446, 541, 454 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 404, 541, 412 ActionDest: 203 Annotation: Subtype: Link Rect: 530, 377, 541, 385 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 334, 541, 342 ActionDest: 200 Annotation: Subtype: Link Rect: 530, 307, 541, 315 ActionDest: 200 Annotation: Subtype: Link Rect: 461, 238, 473, 247 ActionDest: 203 Annotation: Subtype: Link Rect: 339, 138, 351, 147 ActionDest: 200 Annotation: Subtype: Link Rect: 524, 138, 536, 147 ActionDest: 203 Annotation: Subtype: Link Rect: 544, 113, 556, 122 ActionDest: 203 Page: Sequence: 9 Annotations: Annotation: Subtype: Link Rect: 315, 735, 327, 744 ActionDest: 200 Annotation: Subtype: Link Rect: 367, 672, 378, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 379, 672, 390, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 393, 672, 405, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 423, 672, 435, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 435, 672, 447, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 449, 672, 461, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 483, 672, 494, 681 ActionDest: 200 Annotation: Subtype: Link Rect: 494, 672, 506, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 506, 672, 518, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 518, 672, 530, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 530, 672, 541, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 544, 672, 556, 681 ActionDest: 203 Annotation: Subtype: Link Rect: 197, 659, 209, 669 ActionDest: 200 Annotation: Subtype: Link Rect: 209, 659, 221, 669 ActionDest: 203 Annotation: Subtype: Link Rect: 221, 659, 233, 669 ActionDest: 203 Annotation: Subtype: Link Rect: 274, 659, 285, 669 ActionDest: 203 Annotation: Subtype: Link Rect: 307, 659, 319, 669 ActionDest: 203 Annotation: Subtype: Link Rect: 342, 659, 354, 669 ActionDest: 200 Annotation: Subtype: Link Rect: 405, 659, 416, 669 ActionDest: 203 Annotation: Subtype: Link Rect: 286, 622, 298, 631 ActionDest: 203 Annotation: Subtype: Link Rect: 546, 544, 553, 556 ActionDest: 130 Annotation: Subtype: Link Rect: 267, 506, 274, 518 ActionDest: 130 Annotation: Subtype: Link Rect: 327, 421, 339, 430 ActionDest: 203 Annotation: Subtype: Link Rect: 339, 421, 351, 430 ActionDest: 203 Annotation: Subtype: Link Rect: 215, 100, 227, 109 ActionDest: 200 Annotation: Subtype: Link Rect: 227, 100, 239, 109 ActionDest: 203 Annotation: Subtype: Link Rect: 396, 74, 408, 84 ActionDest: 203 Annotation: Subtype: Link Rect: 408, 74, 420, 84 ActionDest: 203 Page: Sequence: 10 Annotations: Annotation: Subtype: Link Rect: 231, 722, 242, 731 ActionDest: 200 Annotation: Subtype: Link Rect: 500, 682, 507, 696 ActionDest: 136 Annotation: Subtype: Link Rect: 511, 632, 518, 644 ActionDest: 136 Annotation: Subtype: Link Rect: 289, 607, 296, 619 ActionDest: 136 Annotation: Subtype: Link Rect: 515, 278, 526, 286 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 239, 526, 247 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 222, 526, 231 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 206, 526, 215 ActionDest: 200 Annotation: Subtype: Link Rect: 515, 166, 526, 174 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 125, 526, 134 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 109, 526, 117 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 93, 526, 101 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 77, 526, 85 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 61, 526, 69 ActionDest: 200 Page: Sequence: 11 Annotations: Annotation: Subtype: Link Rect: 515, 698, 526, 707 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 682, 526, 691 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 666, 526, 674 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 650, 526, 658 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 602, 526, 610 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 545, 526, 553 ActionDest: 200 Annotation: Subtype: Link Rect: 515, 520, 526, 529 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 504, 526, 513 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 488, 526, 497 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 472, 526, 480 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 456, 526, 464 ActionDest: 200 Annotation: Subtype: Link Rect: 515, 440, 526, 448 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 423, 526, 432 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 383, 526, 392 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 359, 526, 368 ActionDest: 203 Annotation: Subtype: Link Rect: 515, 343, 526, 351 ActionDest: 200 Annotation: Subtype: Link Rect: 293, 233, 305, 242 ActionDest: 203 Annotation: Subtype: Link Rect: 202, 207, 214, 217 ActionDest: 203 Annotation: Subtype: Link Rect: 551, 142, 558, 154 ActionDest: 158 Annotation: Subtype: Link Rect: 503, 130, 510, 142 ActionDest: 158 Page: Sequence: 12 Annotations: Annotation: Subtype: Link Rect: 524, 429, 535, 437 ActionDest: 203 Annotation: Subtype: Link Rect: 390, 343, 401, 353 ActionDest: 203 Annotation: Subtype: Link Rect: 402, 344, 414, 353 ActionDest: 203 Annotation: Subtype: Link Rect: 481, 331, 492, 340 ActionDest: 203 Annotation: Subtype: Link Rect: 493, 331, 505, 340 ActionDest: 203 Annotation: Subtype: Link Rect: 395, 293, 407, 302 ActionDest: 203 Annotation: Subtype: Link Rect: 407, 293, 419, 302 ActionDest: 203 Annotation: Subtype: Link Rect: 218, 278, 226, 290 ActionDest: 164 Annotation: Subtype: Link Rect: 220, 256, 232, 265 ActionDest: 203 Annotation: Subtype: Link Rect: 431, 168, 443, 177 ActionDest: 203 Page: Sequence: 13 Annotations: Annotation: Subtype: Link Rect: 350, 483, 357, 495 ActionDest: 164 Annotation: Subtype: Link Rect: 448, 69, 455, 81 ActionDest: 173 Page: Sequence: 14 Annotations: Annotation: Subtype: Link Rect: 507, 669, 514, 681 ActionDest: 173 Annotation: Subtype: Link Rect: 387, 647, 399, 656 ActionDest: 203 Annotation: Subtype: Link Rect: 468, 421, 482, 433 ActionDest: 108 Annotation: Subtype: Link Rect: 299, 386, 311, 395 ActionDest: 203 Annotation: Subtype: Link Rect: 430, 346, 442, 358 ActionDest: 173 Annotation: Subtype: Link Rect: 401, 186, 412, 194 ActionDest: 203 Annotation: Subtype: Link Rect: 361, 148, 373, 160 ActionDest: 173 Annotation: Subtype: Link Rect: 211, 136, 223, 148 ActionDest: 173 Annotation: Subtype: Link Rect: 454, 123, 466, 135 ActionDest: 173 Annotation: Subtype: Link Rect: 379, 111, 391, 123 ActionDest: 173 Annotation: Subtype: Link Rect: 454, 98, 466, 110 ActionDest: 173 Annotation: Subtype: Link Rect: 541, 86, 553, 98 ActionDest: 173 Page: Sequence: 15 Annotations: Annotation: Subtype: Link Rect: 213, 707, 220, 719 ActionDest: 182 Annotation: Subtype: Link Rect: 523, 625, 534, 633 ActionDest: 203 Annotation: Subtype: Link Rect: 523, 604, 534, 612 ActionDest: 203 Annotation: Subtype: Link Rect: 523, 577, 534, 585 ActionDest: 203 Annotation: Subtype: Link Rect: 523, 508, 534, 517 ActionDest: 207 Annotation: Subtype: Link Rect: 523, 435, 534, 443 ActionDest: 203 Annotation: Subtype: Link Rect: 523, 342, 534, 351 ActionDest: 203 Annotation: Subtype: Link Rect: 523, 239, 534, 248 ActionDest: 207 Annotation: Subtype: Link Rect: 523, 203, 534, 211 ActionDest: 207 Annotation: Subtype: Link Rect: 249, 116, 261, 125 ActionDest: 207 Annotation: Subtype: Link Rect: 238, 65, 250, 74 ActionDest: 207 Annotation: Subtype: Link Rect: 251, 65, 263, 74 ActionDest: 207 Page: Sequence: 16 Annotations: Annotation: Subtype: Link Rect: 544, 735, 556, 744 ActionDest: 207 Annotation: Subtype: Link Rect: 278, 710, 290, 719 ActionDest: 197 Annotation: Subtype: Link Rect: 201, 672, 213, 681 ActionDest: 207 Annotation: Subtype: Link Rect: 294, 647, 306, 656 ActionDest: 207 Annotation: Subtype: Link Rect: 514, 634, 521, 643 ActionDest: 197 Annotation: Subtype: Link Rect: 327, 584, 334, 593 ActionDest: 197 Annotation: Subtype: Link Rect: 294, 534, 306, 543 ActionDest: 197 Annotation: Subtype: Link Rect: 388, 509, 400, 518 ActionDest: 200 Annotation: Subtype: Link Rect: 400, 508, 412, 518 ActionDest: 200 Annotation: Subtype: Link Rect: 413, 508, 425, 518 ActionDest: 203 Annotation: Subtype: Link Rect: 242, 496, 254, 505 ActionDest: 203 Annotation: Subtype: Link Rect: 255, 496, 267, 505 ActionDest: 207 Annotation: Subtype: Link Rect: 200, 421, 212, 430 ActionDest: 207 Annotation: Subtype: Link Rect: 213, 421, 225, 430 ActionDest: 207 Annotation: Subtype: Link Rect: 523, 408, 530, 417 ActionDest: 197 Annotation: Subtype: Link Rect: 531, 408, 543, 417 ActionDest: 207 Annotation: Subtype: Link Rect: 543, 408, 555, 417 ActionDest: 207 Annotation: Subtype: Link Rect: 324, 395, 336, 405 ActionDest: 200 Annotation: Subtype: Link Rect: 542, 368, 554, 380 ActionDest: 185 Annotation: Subtype: Link Rect: 260, 345, 267, 354 ActionDest: 197 Annotation: Subtype: Link Rect: 529, 345, 541, 354 ActionDest: 207 Annotation: Subtype: Link Rect: 544, 345, 556, 354 ActionDest: 207 Annotation: Subtype: Link Rect: 253, 305, 265, 317 ActionDest: 185 Annotation: Subtype: Link Rect: 520, 305, 533, 317 ActionDest: 185 Page: Sequence: 17 Annotations: Annotation: Subtype: Link Rect: 190, 682, 202, 691 ActionDest: 200 Annotation: Subtype: Link Rect: 202, 682, 214, 691 ActionDest: 203 Annotation: Subtype: Link Rect: 215, 682, 227, 691 ActionDest: 207 Annotation: Subtype: Link Rect: 227, 682, 239, 691 ActionDest: 207 Annotation: Subtype: Link Rect: 393, 644, 405, 653 ActionDest: 207 Annotation: Subtype: Link Rect: 405, 644, 422, 653 ActionDest: 207 Annotation: Subtype: Link Rect: 435, 606, 452, 615 ActionDest: 207 Annotation: Subtype: Link Rect: 432, 594, 444, 603 ActionDest: 203 Annotation: Subtype: Link Rect: 452, 543, 469, 553 ActionDest: 207 Annotation: Subtype: Link Rect: 353, 481, 370, 490 ActionDest: 207 Annotation: Subtype: Link Rect: 271, 393, 283, 402 ActionDest: 203 Annotation: Subtype: Link Rect: 410, 393, 422, 402 ActionDest: 203 Annotation: Subtype: Link Rect: 422, 393, 434, 402 ActionDest: 203 Annotation: Subtype: Link Rect: 341, 343, 353, 352 ActionDest: 207 Annotation: Subtype: Link Rect: 196, 317, 208, 327 ActionDest: 200 Annotation: Subtype: Link Rect: 359, 315, 366, 327 ActionDest: 191 Annotation: Subtype: Link Rect: 527, 241, 538, 249 ActionDest: 203 Annotation: Subtype: Link Rect: 524, 214, 540, 222 ActionDest: 207 Annotation: Subtype: Link Rect: 527, 187, 538, 195 ActionDest: 203 Annotation: Subtype: Link Rect: 527, 160, 538, 168 ActionDest: 203 Annotation: Subtype: Link Rect: 527, 132, 538, 141 ActionDest: 200 Annotation: Subtype: Link Rect: 524, 111, 540, 119 ActionDest: 207 Page: Sequence: 18 Page: Sequence: 19 Annotations: Annotation: Subtype: Link Rect: 155, 707, 192, 717 Annotation: Subtype: Link Rect: 199, 707, 235, 717 Annotation: Subtype: Link Rect: 518, 672, 555, 683 Annotation: Subtype: Link Rect: 468, 637, 506, 648 Annotation: Subtype: Link Rect: 390, 615, 427, 625 Annotation: Subtype: Link Rect: 348, 591, 385, 602 Annotation: Subtype: Link Rect: 59, 558, 97, 568 Annotation: Subtype: Link Rect: 59, 477, 97, 487 Annotation: Subtype: Link Rect: 234, 465, 477, 476 Annotation: Subtype: Link Rect: 441, 430, 478, 441 Annotation: Subtype: Link Rect: 59, 408, 97, 418 Annotation: Subtype: Link Rect: 383, 384, 420, 395 Annotation: Subtype: Link Rect: 171, 350, 208, 361 Annotation: Subtype: Link Rect: 346, 327, 384, 338 Annotation: Subtype: Link Rect: 163, 304, 200, 315 Annotation: Subtype: Link Rect: 59, 282, 97, 292 Annotation: Subtype: Link Rect: 164, 258, 202, 269 Annotation: Subtype: Link Rect: 345, 212, 383, 223 Annotation: Subtype: Link Rect: 59, 189, 97, 200 Annotation: Subtype: Link Rect: 203, 166, 240, 177 Annotation: Subtype: Link Rect: 59, 132, 97, 142 Annotation: Subtype: Link Rect: 59, 109, 97, 119 Annotation: Subtype: Link Rect: 59, 86, 97, 96 Annotation: Subtype: Link Rect: 166, 63, 204, 73 Page: Sequence: 20 Annotations: Annotation: Subtype: Link Rect: 184, 722, 222, 732 Annotation: Subtype: Link Rect: 95, 699, 133, 709 Annotation: Subtype: Link Rect: 415, 675, 453, 686 Annotation: Subtype: Link Rect: 186, 641, 224, 651 Annotation: Subtype: Link Rect: 234, 606, 271, 617 Annotation: Subtype: Link Rect: 59, 572, 97, 582 Annotation: Subtype: Link Rect: 193, 538, 231, 548 Annotation: Subtype: Link Rect: 59, 503, 97, 513 Annotation: Subtype: Link Rect: 175, 480, 213, 490 Annotation: Subtype: Link Rect: 299, 457, 337, 467 Annotation: Subtype: Link Rect: 402, 433, 439, 444 Annotation: Subtype: Link Rect: 213, 410, 251, 421 Annotation: Subtype: Link Rect: 341, 376, 378, 387 Annotation: Subtype: Link Rect: 253, 342, 291, 352 Annotation: Subtype: Link Rect: 512, 318, 550, 329 Annotation: Subtype: Link Rect: 59, 285, 97, 295 Annotation: Subtype: Link Rect: 387, 262, 424, 272 Annotation: Subtype: Link Rect: 247, 238, 285, 249 Annotation: Subtype: Link Rect: 234, 215, 271, 226 Annotation: Subtype: Link Rect: 363, 192, 401, 203 Annotation: Subtype: Link Rect: 260, 169, 298, 180 Annotation: Subtype: Link Rect: 318, 146, 356, 157 Annotation: Subtype: Link Rect: 331, 123, 369, 134 Annotation: Subtype: Link Rect: 95, 100, 132, 111 Annotation: Subtype: Link Rect: 193, 77, 231, 88 Page: Sequence: 21 Annotations: Annotation: Subtype: Link Rect: 301, 721, 338, 732 Annotation: Subtype: Link Rect: 59, 687, 97, 697 Annotation: Subtype: Link Rect: 136, 653, 173, 663 Annotation: Subtype: Link Rect: 464, 629, 502, 640 Annotation: Subtype: Link Rect: 140, 607, 178, 617 Annotation: Subtype: Link Rect: 233, 583, 270, 594 Annotation: Subtype: Link Rect: 59, 561, 97, 571 Annotation: Subtype: Link Rect: 500, 537, 538, 548 Annotation: Subtype: Link Rect: 118, 515, 155, 525 Annotation: Subtype: Link Rect: 143, 492, 181, 502 Annotation: Subtype: Link Rect: 203, 468, 241, 479 Annotation: Subtype: Link Rect: 494, 445, 531, 456 Annotation: Subtype: Link Rect: 492, 422, 529, 433 Annotation: Subtype: Link Rect: 177, 364, 215, 375 Annotation: Subtype: Link Rect: 111, 330, 148, 341 Annotation: Subtype: Link Rect: 514, 318, 552, 329 Annotation: Subtype: Link Rect: 323, 272, 361, 283 Annotation: Subtype: Link Rect: 131, 250, 169, 260 Annotation: Subtype: Link Rect: 249, 226, 286, 237 Annotation: Subtype: Link Rect: 233, 192, 270, 203 Annotation: Subtype: Link Rect: 475, 169, 512, 180 Annotation: Subtype: Link Rect: 104, 135, 142, 145 Annotation: Subtype: Link Rect: 95, 112, 133, 122 Annotation: Subtype: Link Rect: 59, 77, 97, 88 Page: Sequence: 22 Annotations: Annotation: Subtype: Link Rect: 456, 721, 493, 732 Annotation: Subtype: Link Rect: 86, 687, 123, 697 Annotation: Subtype: Link Rect: 491, 663, 529, 674 Annotation: Subtype: Link Rect: 59, 641, 97, 651 Annotation: Subtype: Link Rect: 513, 617, 551, 628 Annotation: Subtype: Link Rect: 389, 594, 426, 605 Annotation: Subtype: Link Rect: 95, 561, 133, 571 Annotation: Subtype: Link Rect: 263, 537, 301, 548 Annotation: Subtype: Link Rect: 104, 492, 141, 502 Annotation: Subtype: Link Rect: 380, 468, 417, 479 Annotation: Subtype: Link Rect: 367, 445, 404, 456 Annotation: Subtype: Link Rect: 202, 410, 239, 421 Annotation: Subtype: Link Rect: 257, 388, 295, 398 Annotation: Subtype: Link Rect: 59, 354, 97, 364 Annotation: Subtype: Link Rect: 131, 331, 169, 341 Annotation: Subtype: Link Rect: 257, 307, 294, 318 Annotation: Subtype: Link Rect: 248, 272, 286, 283 Annotation: Subtype: Link Rect: 507, 215, 544, 226 Annotation: Subtype: Link Rect: 207, 192, 244, 203 Annotation: Subtype: Link Rect: 255, 169, 293, 180 Annotation: Subtype: Link Rect: 362, 146, 400, 157 Annotation: Subtype: Link Rect: 432, 123, 470, 134 Annotation: Subtype: Link Rect: 288, 100, 326, 111 Checksum: 976effeb Type: CRC32 Checksum: 8478f80b45260d2b18c78be7518742e0 Type: MD5 Checksum: 1d32a84f045d9904ffffa84bc6e205df75a5f9bc Type: SHA-1