f89bd8a81d9d5549cc1a34fa6c5e4f65 pmc_34282795.pdf 5fedb1944e6cf8fe6189e6b1f5b4cd16c61573d6 pmc_34282795.pdf 63f787adeb2e675e79fe0bc65badbd4263021ff62679f13159d6b75ffb1d499a pmc_34282795.pdf Title: High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation Subject: Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 m square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 m/, respectively. Experimental results show a 6.2 m measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation. Keywords: immersed distance measurement; multi-frequency continuous waves; phase measurement; PMUT; time-of-flight; ultrasound Author: Iván Zamora, Eyglis Ledesma, Arantxa Uranga and Núria Barniol Creator: LaTeX with hyperref Producer: pdfTeX-1.40.21 CreationDate: Thu Jul 1 12:00:44 2021 CEST ModDate: Thu Jul 1 12:04:03 2021 CEST Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 11 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 3093125 bytes Optimized: no PDF version: 1.7 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- TINHZQ+EURM10 Type 1 Builtin yes yes no 10 0 VBXMKQ+URWPalladioL-Ital Type 1 Custom yes yes no 14 0 RTOEKG+URWPalladioL-Bold Type 1 Custom yes yes no 19 0 RLVJQK+URWPalladioL-Roma Type 1 Custom yes yes no 23 0 BJLVGI+CMSY10 Type 1 Builtin yes yes no 27 0 SOSTRQ+CMR10 Type 1 Builtin yes yes no 31 0 FYYAHQ+VnURWPalladioL-Bold Type 1 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IncrementalUpdates: 0 DocumentCatalog: PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: Introduction Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@44c8afef Item: Title: Method Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@7b69c6ba Item: Title: Experimental Results and Discussion Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@46daef40 Children: Item: Title: Multi-Frequency Continuous Waves (MFCW) vs. Multi-Frequency Pulsed Waves (MFPW) Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@12f41634 Item: Title: Relative Distance Measurement Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@13c27452 Item: Title: Uncertainty Analysis Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@262b2c86 Item: Title: Conclusions Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@371a67ec Item: Title: References Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@5ed828d Info: Title: High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation Author: Iván Zamora, Eyglis Ledesma, Arantxa Uranga and Núria Barniol Subject: Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 m square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 m/, respectively. Experimental results show a 6.2 m measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation. 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