b4da39083dcfb778c217faa0fdcf1044 pmc_34300529.pdf d30d63e4c0c399e4afe59ef0666f0f54358cec88 pmc_34300529.pdf 8e29ca70bec4372b893be4e379671f5aa61ca8b67c391aafddbdbabedbec0682 pmc_34300529.pdf Title: Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth Subject: This paper presents a multielement annular ring ultrasound transducer formed by individual high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision axial focalization and high-performance ultrasound imaging. The prototype has five independent multielement rings fabricated by a monolithic process over CMOS, allowing for a very compact and robust design. Crosstalk between rings is under 56 dB, which guarantees an efficient beam focusing on a range between 1.4 mm and 67 m. The presented PMUT-on-CMOS annular array with an overall diameter down to 669 m achieves an output pressure in liquid of 4.84 kPa/V/mm2 at 1.5 mm away from the array when the five channels are excited together, which is the largest reported for PMUTs. Pulse-echo experiments towards high-resolution imaging are demonstrated using the central ring as a receiver. With an equivalent diameter of 149 m, this central ring provides high receiving sensitivity, 441.6 nV/Pa, higher than that of commercial hydrophones with equivalent size. A 1D ultrasound image using two channels is demonstrated, with maximum received signals of 7 mVpp when a nonintegrated amplifier is used, demonstrating the ultrasound imaging capabilities. Keywords: PMUTs; annular array; ring array; ultrasound; AlN; ultrasound imaging; pulse-echo; PMUT-on-CMOS Author: Eyglis Ledesma, Iván Zamora, Arantxa Uranga and Núria Barniol Creator: LaTeX with hyperref Producer: pdfTeX-1.40.21 CreationDate: Wed Jul 14 15:57:06 2021 CEST ModDate: Fri Jul 16 12:46:12 2021 CEST Custom Metadata: no Metadata Stream: no Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 18 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 6504781 bytes Optimized: no PDF version: 1.7 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- RKORBS+EURM10 Type 1 Builtin yes yes no 10 0 UFWLOO+URWPalladioL-Ital Type 1 Custom yes yes no 14 0 CEOXWJ+URWPalladioL-Bold Type 1 Custom yes yes no 19 0 WNCQAN+URWPalladioL-Roma Type 1 Custom yes yes no 23 0 FYYAHQ+VnURWPalladioL-Bold Type 1 Custom yes yes no 27 0 KPNHET+VnURWPalladioL Type 1 Custom yes yes no 32 0 RVSEMT+TimesNewRomanPS-BoldItalicMT Type 1C WinAnsi yes yes no 40 0 MCBCCI+SourceSansRoman-Regular Type 1C Custom yes yes no 62 0 MCBCCM+SourceSansRoman.613wght Type 1C Custom yes yes no 66 0 MCBCCO+SourceSansRoman-Bold Type 1C Custom yes yes no 70 0 EKEZOZ+PazoMath-Italic Type 1 Builtin yes yes no 82 0 GIGFZE+CMR10 Type 1 Builtin yes yes no 86 0 HARRMA+CMSY10 Type 1 Builtin yes yes no 90 0 EDMJPC+CMEX10 Type 1 Builtin yes yes no 97 0 NAHPMA+Symbol Type 1C Custom yes yes yes 120 0 NAHPLA+TimesNewRoman,Italic TrueType WinAnsi yes yes no 125 0 NAIAAA+EuclidExtra CID TrueType Identity-H yes yes yes 128 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 134 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 137 0 NAHOIC+PalatinoLinotype,Italic CID TrueType Identity-H yes yes yes 140 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 146 0 NAHPKO+TimesNewRoman CID TrueType Identity-H yes yes yes 149 0 XIRVNA+EURB10 Type 1 Builtin yes yes no 164 0 NAHPMA+Symbol Type 1C Custom yes yes yes 175 0 NAHPLA+TimesNewRoman,Italic TrueType WinAnsi yes yes no 180 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 183 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 186 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 192 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 195 0 NAHPKO+TimesNewRoman CID TrueType Identity-H yes yes yes 198 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 218 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 221 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 227 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 230 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 244 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 247 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 253 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 256 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 297 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 300 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 306 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 309 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 336 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 339 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 345 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 348 0 ZZLNUL+URWPalladioL-BoldItal Type 1 Custom yes yes no 359 0 NAHPMA+Symbol Type 1C Custom yes yes yes 370 0 NAHPLA+TimesNewRoman,Italic TrueType WinAnsi yes yes no 375 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 378 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 381 0 NAHOIC+PalatinoLinotype,Italic CID TrueType Identity-H yes yes yes 384 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 390 0 NAHPKO+TimesNewRoman CID TrueType Identity-H yes yes yes 393 0 NAHPMA+Symbol Type 1C Custom yes yes yes 415 0 NAHPLA+TimesNewRoman,Italic TrueType WinAnsi yes yes no 420 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 423 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 426 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 432 0 NAHOIC+PalatinoLinotype,Italic CID TrueType Identity-H yes yes yes 435 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 441 0 NAHPKO+TimesNewRoman CID TrueType Identity-H yes yes yes 444 0 NAHPMA+Symbol Type 1C Custom yes yes yes 462 0 NAHPLA+TimesNewRoman,Italic TrueType WinAnsi yes yes no 467 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 470 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 473 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 479 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 482 0 NAHPMA+Symbol Type 1C Custom yes yes yes 493 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 498 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 501 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 507 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 510 0 NAHPMA+Symbol Type 1C Custom yes yes yes 525 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 530 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 533 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 539 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 542 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 557 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 560 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 563 0 NAHOGP+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 581 0 NAHOIA+PalatinoLinotype CID TrueType Identity-H yes yes yes 584 0 NAHOIB+PalatinoLinotype TrueType WinAnsi yes yes no 590 0 NAHOID+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 593 0 Jhove (Rel. 1.28.0, 2023-05-18) Date: 2024-10-02 03:10:02 CEST RepresentationInformation: pmc_34300529.pdf ReportingModule: PDF-hul, Rel. 1.12.4 (2023-03-16) LastModified: 2023-03-31 12:14:37 CEST Size: 6504781 Format: PDF Version: 1.7 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 775 FreeObjects: 1 IncrementalUpdates: 0 DocumentCatalog: PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: Introduction Destination: section.1 Item: Title: Materials and Methods Destination: section.2 Children: Item: Title: Multielement Ring Array Design Destination: subsection.2.1 Item: Title: Acoustic Performance Simulation for the PMUT Array Destination: subsection.2.2 Item: Title: Experimental Results and Discussion Destination: section.3 Children: Item: Title: Electrical Characterization Destination: subsection.3.1 Item: Title: Output Pressure Measurements Destination: subsection.3.2 Item: Title: Pulse-Echo Measurements Destination: subsection.3.3 Item: Title: Focusing Capabilities Destination: subsection.3.4 Item: Title: 1D Line-Scan Imaging Destination: subsection.3.5 Item: Title: Conclusions Destination: section.4 Item: Title: References Destination: section.4 Info: Title: Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth Author: Eyglis Ledesma, Iván Zamora, Arantxa Uranga and Núria Barniol Subject: This paper presents a multielement annular ring ultrasound transducer formed by individual high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision axial focalization and high-performance ultrasound imaging. The prototype has five independent multielement rings fabricated by a monolithic process over CMOS, allowing for a very compact and robust design. Crosstalk between rings is under 56 dB, which guarantees an efficient beam focusing on a range between 1.4 mm and 67 m. The presented PMUT-on-CMOS annular array with an overall diameter down to 669 m achieves an output pressure in liquid of 4.84 kPa/V/mm2 at 1.5 mm away from the array when the five channels are excited together, which is the largest reported for PMUTs. Pulse-echo experiments towards high-resolution imaging are demonstrated using the central ring as a receiver. With an equivalent diameter of 149 m, this central ring provides high receiving sensitivity, 441.6 nV/Pa, higher than that of commercial hydrophones with equivalent size. A 1D ultrasound image using two channels is demonstrated, with maximum received signals of 7 mVpp when a nonintegrated amplifier is used, demonstrating the ultrasound imaging capabilities. Keywords: PMUTs; annular array; ring array; ultrasound; AlN; ultrasound imaging; pulse-echo; PMUT-on-CMOS Creator: LaTeX with hyperref Producer: pdfTeX-1.40.21 CreationDate: Wed Jul 14 15:57:06 CEST 2021 ModDate: Fri Jul 16 12:46:12 CEST 2021 ID: 0x8fcac697f64c53e45f6390a954ce2f91, 0x8fcac697f64c53e45f6390a954ce2f91 Filters: FilterPipeline: FlateDecode Fonts: Type1: Font: BaseFont: KPNHET+VnURWPalladioL FontSubset: true FirstChar: 178 LastChar: 226 FontDescriptor: FontName: KPNHET+VnURWPalladioL Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: EDMJPC+CMEX10 FontSubset: true FirstChar: 18 LastChar: 115 FontDescriptor: FontName: EDMJPC+CMEX10 Flags: Symbolic FontBBox: -24, -2960, 1454, 772 FontFile: true Font: BaseFont: EKEZOZ+PazoMath-Italic FontSubset: true FirstChar: 98 LastChar: 114 FontDescriptor: FontName: EKEZOZ+PazoMath-Italic Flags: Symbolic FontBBox: -70, -277, 902, 733 FontFile: true Font: BaseFont: CEOXWJ+URWPalladioL-Bold FontSubset: true FirstChar: 3 LastChar: 122 FontDescriptor: FontName: CEOXWJ+URWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: XIRVNA+EURB10 FontSubset: true FirstChar: 22 LastChar: 22 FontDescriptor: FontName: XIRVNA+EURB10 Flags: Symbolic FontBBox: -30, -247, 1178, 723 FontFile: true Font: BaseFont: GIGFZE+CMR10 FontSubset: true FirstChar: 40 LastChar: 61 FontDescriptor: FontName: GIGFZE+CMR10 Flags: Symbolic FontBBox: -40, -250, 1009, 750 FontFile: true Font: BaseFont: WNCQAN+URWPalladioL-Roma FontSubset: true FirstChar: 2 LastChar: 169 FontDescriptor: FontName: WNCQAN+URWPalladioL-Roma Flags: Symbolic FontBBox: -166, -283, 1021, 943 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: ZZLNUL+URWPalladioL-BoldItal FontSubset: true FirstChar: 76 LastChar: 110 FontDescriptor: FontName: ZZLNUL+URWPalladioL-BoldItal Flags: Symbolic FontBBox: -170, -300, 1073, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: RKORBS+EURM10 FontSubset: true FirstChar: 12 LastChar: 29 FontDescriptor: FontName: RKORBS+EURM10 Flags: Symbolic FontBBox: -32, -243, 1060, 720 FontFile: true Font: BaseFont: HARRMA+CMSY10 FontSubset: true FirstChar: 0 LastChar: 112 FontDescriptor: FontName: HARRMA+CMSY10 Flags: Symbolic FontBBox: -29, -960, 1116, 775 FontFile: true Font: BaseFont: FYYAHQ+VnURWPalladioL-Bold FontSubset: true FirstChar: 161 LastChar: 243 FontDescriptor: FontName: FYYAHQ+VnURWPalladioL-Bold Flags: Symbolic FontBBox: -152, -301, 1000, 935 FontFile: true EncodingDictionary: Differences: true Font: BaseFont: UFWLOO+URWPalladioL-Ital FontSubset: true FirstChar: 45 LastChar: 122 FontDescriptor: FontName: UFWLOO+URWPalladioL-Ital Flags: Symbolic FontBBox: -170, -305, 1010, 941 FontFile: true EncodingDictionary: Differences: true Pages: Page: Sequence: 1 Annotations: Annotation: Subtype: Link Rect: 35, 759, 153, 795 Annotation: Subtype: Link Rect: 515, 759, 560, 795 Annotation: Subtype: Link Rect: 108, 659, 119, 673 Annotation: Subtype: Link Rect: 183, 659, 194, 673 Annotation: Subtype: Link Rect: 271, 659, 282, 673 Annotation: Subtype: Link Rect: 372, 659, 383, 673 Annotation: Subtype: Link Rect: 82, 346, 154, 355 Annotation: Subtype: Link Rect: 35, 335, 94, 343 Annotation: Subtype: Link Rect: 35, 162, 97, 184 Annotation: Subtype: Link Rect: 153, 89, 154, 98 Annotation: Subtype: Link Rect: 35, 77, 147, 86 Annotation: Subtype: Link Rect: 208, 294, 215, 302 ActionDest: 598 Annotation: Subtype: Link Rect: 218, 294, 225, 302 ActionDest: 598 Annotation: Subtype: Link Rect: 209, 281, 216, 290 ActionDest: 598 Annotation: Subtype: Link Rect: 217, 281, 224, 290 ActionDest: 598 Annotation: Subtype: Link Rect: 426, 281, 433, 290 ActionDest: 598 Annotation: Subtype: Link Rect: 433, 281, 440, 290 ActionDest: 598 Annotation: Subtype: Link Rect: 326, 218, 333, 227 ActionDest: 598 Annotation: Subtype: Link Rect: 336, 218, 348, 227 ActionDest: 598 Annotation: Subtype: Link Rect: 225, 143, 232, 152 ActionDest: 598 Annotation: Subtype: Link Rect: 233, 143, 240, 152 ActionDest: 598 Annotation: Subtype: Link Rect: 243, 143, 250, 152 ActionDest: 598 Annotation: Subtype: Link Rect: 250, 143, 257, 152 ActionDest: 598 Annotation: Subtype: Link Rect: 258, 143, 265, 152 ActionDest: 598 Annotation: Subtype: Link Rect: 432, 93, 444, 102 ActionDest: 598 Annotation: Subtype: Link Rect: 444, 92, 456, 102 ActionDest: 598 Annotation: Subtype: Link Rect: 113, 17, 241, 28 Annotation: Subtype: Link Rect: 408, 17, 558, 28 Annotation: Subtype: Link Rect: 35, 423, 87, 442 Page: Sequence: 2 Annotations: Annotation: Subtype: Link Rect: 519, 724, 531, 733 ActionDest: 598 Annotation: Subtype: Link Rect: 531, 724, 543, 733 ActionDest: 598 Annotation: Subtype: Link Rect: 544, 724, 556, 733 ActionDest: 598 Annotation: Subtype: Link Rect: 485, 711, 492, 721 ActionDest: 598 Annotation: Subtype: Link Rect: 495, 711, 502, 721 ActionDest: 598 Annotation: Subtype: Link Rect: 503, 712, 515, 721 ActionDest: 598 Annotation: Subtype: Link Rect: 515, 712, 527, 721 ActionDest: 598 Annotation: Subtype: Link Rect: 410, 674, 422, 683 ActionDest: 598 Annotation: Subtype: Link Rect: 422, 674, 434, 683 ActionDest: 598 Annotation: Subtype: Link Rect: 549, 611, 556, 620 ActionDest: 598 Annotation: Subtype: Link Rect: 322, 561, 329, 570 ActionDest: 598 Annotation: Subtype: Link Rect: 329, 561, 341, 570 ActionDest: 598 Annotation: Subtype: Link Rect: 361, 521, 368, 533 ActionDest: 79 Annotation: Subtype: Link Rect: 473, 485, 485, 495 ActionDest: 598 Annotation: Subtype: Link Rect: 413, 395, 420, 407 ActionDest: 79 Annotation: Subtype: Link Rect: 391, 357, 398, 369 ActionDest: 324 Annotation: Subtype: Link Rect: 505, 332, 512, 344 ActionDest: 567 Annotation: Subtype: Link Rect: 413, 221, 425, 230 ActionDest: 598 Annotation: Subtype: Link Rect: 355, 88, 362, 100 ActionDest: 94 Page: Sequence: 3 Annotations: Annotation: Subtype: Link Rect: 544, 375, 556, 384 ActionDest: 598 Annotation: Subtype: Link Rect: 204, 237, 216, 246 ActionDest: 598 Annotation: Subtype: Link Rect: 284, 174, 291, 186 ActionDest: 94 Annotation: Subtype: Link Rect: 442, 164, 454, 173 ActionDest: 598 Page: Sequence: 4 Annotations: Annotation: Subtype: Link Rect: 217, 732, 224, 744 ActionDest: 161 Annotation: Subtype: Link Rect: 387, 365, 399, 375 ActionDest: 598 Annotation: Subtype: Link Rect: 400, 366, 412, 375 ActionDest: 598 Annotation: Subtype: Link Rect: 293, 288, 300, 300 ActionDest: 161 Annotation: Subtype: Link Rect: 243, 275, 250, 287 ActionDest: 161 Page: Sequence: 5 Annotations: Annotation: Subtype: Link Rect: 506, 694, 513, 706 ActionDest: 161 Annotation: Subtype: Link Rect: 217, 619, 224, 631 ActionDest: 161 Annotation: Subtype: Link Rect: 435, 594, 442, 606 ActionDest: 205 Annotation: Subtype: Link Rect: 270, 395, 282, 405 ActionDest: 598 Annotation: Subtype: Link Rect: 283, 396, 295, 405 ActionDest: 598 Annotation: Subtype: Link Rect: 525, 343, 532, 355 ActionDest: 94 Annotation: Subtype: Link Rect: 227, 330, 234, 342 ActionDest: 208 Annotation: Subtype: Link Rect: 540, 305, 547, 317 ActionDest: 208 Annotation: Subtype: Link Rect: 203, 270, 210, 279 ActionDest: 205 Annotation: Subtype: Link Rect: 411, 255, 418, 267 ActionDest: 205 Page: Sequence: 6 Annotations: Annotation: Subtype: Link Rect: 352, 432, 364, 441 ActionDest: 598 Annotation: Subtype: Link Rect: 365, 432, 377, 441 ActionDest: 598 Annotation: Subtype: Link Rect: 197, 392, 204, 404 ActionDest: 208 Annotation: Subtype: Link Rect: 220, 379, 227, 391 ActionDest: 208 Annotation: Subtype: Link Rect: 308, 354, 315, 366 ActionDest: 205 Annotation: Subtype: Link Rect: 209, 74, 216, 86 ActionDest: 263 Page: Sequence: 7 Annotations: Annotation: Subtype: Link Rect: 197, 644, 204, 656 ActionDest: 263 Page: Sequence: 8 Annotations: Annotation: Subtype: Link Rect: 219, 732, 226, 744 ActionDest: 263 Annotation: Subtype: Link Rect: 292, 685, 304, 694 ActionDest: 598 Annotation: Subtype: Link Rect: 197, 605, 204, 617 ActionDest: 324 Annotation: Subtype: Link Rect: 475, 570, 487, 579 ActionDest: 601 Page: Sequence: 9 Annotations: Annotation: Subtype: Link Rect: 231, 732, 238, 744 ActionDest: 324 Annotation: Subtype: Link Rect: 379, 685, 391, 694 ActionDest: 601 Annotation: Subtype: Link Rect: 440, 682, 447, 694 ActionDest: 324 Annotation: Subtype: Link Rect: 496, 619, 503, 631 ActionDest: 353 Annotation: Subtype: Link Rect: 282, 348, 294, 357 ActionDest: 601 Annotation: Subtype: Link Rect: 416, 276, 422, 289 ActionDest: 324 Annotation: Subtype: Link Rect: 248, 125, 255, 137 ActionDest: 356 Page: Sequence: 10 Annotations: Annotation: Subtype: Link Rect: 298, 454, 310, 463 ActionDest: 601 Annotation: Subtype: Link Rect: 191, 389, 198, 401 ActionDest: 356 Annotation: Subtype: Link Rect: 203, 320, 210, 332 ActionDest: 356 Annotation: Subtype: Link Rect: 239, 297, 251, 306 ActionDest: 598 Annotation: Subtype: Link Rect: 237, 70, 244, 82 ActionDest: 356 Page: Sequence: 11 Annotations: Annotation: Subtype: Link Rect: 462, 694, 469, 706 ActionDest: 263 Annotation: Subtype: Link Rect: 433, 607, 440, 620 ActionDest: 401 Annotation: Subtype: Link Rect: 226, 559, 233, 568 ActionDest: 598 Annotation: Subtype: Link Rect: 549, 559, 556, 568 ActionDest: 598 Annotation: Subtype: Link Rect: 279, 514, 289, 522 ActionDest: 601 Annotation: Subtype: Link Rect: 360, 514, 366, 522 ActionDest: 598 Annotation: Subtype: Link Rect: 438, 514, 444, 522 ActionDest: 598 Annotation: Subtype: Link Rect: 266, 325, 273, 334 ActionDest: 598 Annotation: Subtype: Link Rect: 259, 191, 266, 201 ActionDest: 598 Annotation: Subtype: Link Rect: 443, 179, 450, 188 ActionDest: 598 Page: Sequence: 12 Annotations: Annotation: Subtype: Link Rect: 448, 735, 460, 744 ActionDest: 601 Annotation: Subtype: Link Rect: 523, 707, 530, 719 ActionDest: 405 Annotation: Subtype: Link Rect: 219, 432, 226, 444 ActionDest: 452 Annotation: Subtype: Link Rect: 424, 394, 431, 406 ActionDest: 356 Annotation: Subtype: Link Rect: 388, 359, 400, 368 ActionDest: 601 Annotation: Subtype: Link Rect: 417, 275, 429, 284 ActionDest: 598 Annotation: Subtype: Link Rect: 421, 212, 433, 221 ActionDest: 601 Annotation: Subtype: Link Rect: 365, 200, 377, 209 ActionDest: 601 Annotation: Subtype: Link Rect: 453, 185, 464, 197 ActionDest: 452 Annotation: Subtype: Link Rect: 217, 134, 229, 146 ActionDest: 452 Page: Sequence: 13 Annotations: Annotation: Subtype: Link Rect: 270, 96, 282, 108 ActionDest: 515 Annotation: Subtype: Link Rect: 344, 96, 356, 108 ActionDest: 515 Annotation: Subtype: Link Rect: 257, 58, 270, 70 ActionDest: 515 Annotation: Subtype: Link Rect: 543, 58, 556, 70 ActionDest: 515 Page: Sequence: 14 Annotations: Annotation: Subtype: Link Rect: 549, 340, 556, 352 ActionDest: 405 Annotation: Subtype: Link Rect: 218, 303, 230, 315 ActionDest: 547 Annotation: Subtype: Link Rect: 240, 253, 252, 265 ActionDest: 547 Annotation: Subtype: Link Rect: 302, 190, 314, 202 ActionDest: 547 Page: Sequence: 15 Annotations: Annotation: Subtype: Link Rect: 197, 373, 209, 385 ActionDest: 567 Annotation: Subtype: Link Rect: 403, 310, 410, 322 ActionDest: 405 Annotation: Subtype: Link Rect: 219, 298, 231, 310 ActionDest: 567 Annotation: Subtype: Link Rect: 210, 222, 222, 234 ActionDest: 567 Page: Sequence: 16 Page: Sequence: 17 Annotations: Annotation: Subtype: Link Rect: 498, 609, 536, 620 Annotation: Subtype: Link Rect: 473, 551, 510, 562 Annotation: Subtype: Link Rect: 516, 551, 552, 562 Annotation: Subtype: Link Rect: 189, 517, 227, 528 Annotation: Subtype: Link Rect: 325, 459, 363, 470 Annotation: Subtype: Link Rect: 369, 459, 405, 470 Annotation: Subtype: Link Rect: 477, 436, 515, 447 Annotation: Subtype: Link Rect: 521, 436, 557, 447 Annotation: Subtype: Link Rect: 462, 413, 499, 424 Annotation: Subtype: Link Rect: 505, 413, 541, 424 Annotation: Subtype: Link Rect: 59, 379, 97, 389 Annotation: Subtype: Link Rect: 423, 355, 461, 366 Annotation: Subtype: Link Rect: 221, 332, 259, 343 Annotation: Subtype: Link Rect: 490, 309, 528, 320 Annotation: Subtype: Link Rect: 264, 287, 302, 297 Annotation: Subtype: Link Rect: 227, 263, 265, 274 Annotation: Subtype: Link Rect: 293, 240, 331, 251 Annotation: Subtype: Link Rect: 300, 217, 338, 228 Annotation: Subtype: Link Rect: 178, 137, 216, 148 Annotation: Subtype: Link Rect: 59, 115, 97, 125 Annotation: Subtype: Link Rect: 312, 91, 350, 102 Annotation: Subtype: Link Rect: 356, 91, 392, 102 Annotation: Subtype: Link Rect: 234, 57, 272, 67 Page: Sequence: 18 Annotations: Annotation: Subtype: Link Rect: 497, 652, 535, 663 Annotation: Subtype: Link Rect: 159, 630, 197, 640 Annotation: Subtype: Link Rect: 203, 630, 239, 640 Annotation: Subtype: Link Rect: 118, 572, 155, 582 Annotation: Subtype: Link Rect: 162, 572, 198, 582 Annotation: Subtype: Link Rect: 313, 560, 560, 571 Annotation: Subtype: Link Rect: 163, 549, 201, 559 Annotation: Subtype: Link Rect: 400, 537, 560, 548 Annotation: Subtype: Link Rect: 56, 525, 341, 536 Checksum: 0d0be9c0 Type: CRC32 Checksum: b4da39083dcfb778c217faa0fdcf1044 Type: MD5 Checksum: d30d63e4c0c399e4afe59ef0666f0f54358cec88 Type: SHA-1 Checksum: 8e29ca70bec4372b893be4e379671f5aa61ca8b67c391aafddbdbabedbec0682 Type: SHA-256