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Physical, 334 (2022) 113334. doi:10.1016/j.sna.2021.113334 Keywords: Piezoelectric; AlN; Bulk acoustic wave; Ultrasonic microsensors; HBAR; Pulse-echo; Time-of-flight; Microfluidics; Author: Jesus Yanez Creator: Elsevier Producer: Unknown CreationDate: Wed Jan 19 05:46:31 2022 CET ModDate: Wed Jan 19 05:50:05 2022 CET Tagged: yes UserProperties: no Suspects: no Form: AcroForm JavaScript: no Pages: 11 Encrypted: no Page size: 595.276 x 793.701 pts Page rot: 0 File size: 4932846 bytes Optimized: yes PDF version: 1.7 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- PKREKO+UniversLTStd Type 1C Custom yes yes yes 669 0 YCGAVO+Gulliver Type 1C Custom yes yes yes 670 0 GPOWGC+STIXGeneral-Regular Type 1C Custom yes yes yes 671 0 MVHKYE+Gulliver-Italic Type 1C Custom yes yes yes 672 0 TSHKKA+GulliverSCOsF Type 1C Custom yes yes yes 673 0 EQOYKM+Gulliver-Bold Type 1C Custom yes yes yes 686 0 ESUAHA+TimesNewRoman CID TrueType Identity-H yes yes yes 693 0 PUEXWG+STIXGeneral-Italic Type 1C Custom yes yes yes 135 0 WOCWKH+STIXTwoText Type 1 Custom yes yes no 131 0 GIHKJJ+Gulliver-Italic Type 1 Custom yes yes no 6 0 PKOZXU+Gulliver Type 1 Custom yes yes no 9 0 RJOCNV+STIXTwoText Type 1 Custom yes yes no 127 0 YJUUNC+Gulliver-Italic Type 1 Custom yes yes no 13 0 YDNWST+Gulliver Type 1 Custom yes yes no 16 0 LQWTKB+Gulliver-Italic Type 1 Custom yes yes no 20 0 LQSVVF+STIXTwoText-Italic Type 1 Custom yes yes no 24 0 PFVGVY+Gulliver-Italic Type 1 Custom yes yes no 27 0 ARBFUA+Gulliver-Italic Type 1 Custom yes yes no 31 0 NTWVKH+Gulliver Type 1 Custom yes yes no 34 0 UUWGGD+Gulliver-Italic Type 1 Custom yes yes no 38 0 CDMIWU+Gulliver-Italic Type 1 Custom yes yes no 47 0 HOQAIG+Gulliver Type 1 Custom yes yes no 50 0 KMQIIV+Gulliver-Italic Type 1 Custom yes yes no 54 0 LQZTKA+Gulliver Type 1 Custom yes yes no 57 0 GZTSTB+Gulliver-Italic Type 1 Custom yes yes no 61 0 EPKDCN+Gulliver Type 1 Custom yes yes no 64 0 OUYRPH+Gulliver-Italic Type 1 Custom yes yes no 68 0 ROMNNY+Gulliver Type 1 Custom yes yes no 71 0 Jhove (Rel. 1.22.1, 2019-04-17) Date: 2022-02-17 02:23:56 CET RepresentationInformation: SenAct_a2022v334p113334.pdf ReportingModule: PDF-hul, Rel. 1.12.1 (2019-04-17) LastModified: 2022-02-16 18:14:48 CET Size: 4932846 Format: PDF Version: 1.7 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf Profile: Linearized PDF, Tagged PDF PDFMetadata: Objects: 750 FreeObjects: 1 IncrementalUpdates: 1 DocumentCatalog: PageLayout: SinglePage PageMode: UseOutlines Language: en Outlines: Item: Title: Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-... Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@1b26f7b2 Children: Item: Title: 1. Introduction Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@491cc5c9 Item: Title: 2. Principle of operation and FEM simulations Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@74ad1f1f Children: Item: Title: 2.1. Detection mechanism and system description Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@6a1aab78 Item: Title: 2.2. Microsystem design and acoustic pressure distribution at the detection surface Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@462d5aee Item: Title: 3. Fabrication and operating frequencies Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@69b0fd6f Children: Item: Title: 3.1. Fabrication Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@757942a1 Item: Title: 3.2. Operating frequency Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@4a87761d Item: Title: 4. Experimental part and discussion Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@66d1af89 Children: Item: Title: 4.1. Presence of liquids in microchannels and impedance imaging (fingerprint sensor) Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@8646db9 Item: Title: 4.2. Identification and classification of liquids by their specific acoustic impedance Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@37374a5e Item: Title: 4.3. Detection of concentration change in solutions Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@4671e53b Item: Title: 5. Conclusion Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@2db7a79b Item: Title: Author contributions Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@6950e31 Item: Title: Declaration of Competing Interest Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@b7dd107 Item: Title: Acknowledgments Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@42eca56e Item: Title: References Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@52f759d7 Info: Title: Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme Author: Jesus Yanez Subject: Sensors and Actuators: A. 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Physical, 334 (2022) 113334. doi:10.1016/j.sna.2021.113334 Piezoelectric AlN Bulk acoustic wave Ultrasonic microsensors HBAR Pulse-echo Time-of-flight Microfluidics Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme Jesus Yanez Arantxa Uranga Nuria Barniol journal Sensors and Actuators: A. Physical © 2022 The Authors. 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