bcc1299aca7ecb80fa7a8d08b63c2adc SenAct_a2022v345p113798.pdf 345236cf5622accde55ea4dc0a252d0db7c3ddfd SenAct_a2022v345p113798.pdf 787f0770a36041e14116ac102cc08ff14d9b57f29ecd205cf59519259c3577f6 SenAct_a2022v345p113798.pdf Title: Remote dynamic actuation of an electrostatically driven microcantilever by a wireless power transfer system Subject: Sensors and Actuators: A. Physical, 345 (2022) 113798. doi:10.1016/j.sna.2022.113798 Keywords: RF-MEMS,Wireless power transfer,Electrostatic actuation Author: Raul Ruiz Creator: Elsevier Producer: Acrobat Distiller 8.1.0 (Windows) CreationDate: Sat Aug 27 01:27:07 2022 CEST ModDate: Sat Aug 27 07:22:21 2022 CEST Tagged: yes UserProperties: no Suspects: no Form: none JavaScript: no Pages: 6 Encrypted: no Page size: 595.276 x 793.701 pts Page rot: 0 File size: 3620420 bytes Optimized: yes PDF version: 1.7 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- ARYGSS+CharisSIL CID TrueType Identity-H yes yes yes 439 0 KEGQVK+STIX-Regular Type 1C Custom yes yes yes 444 0 CXQOXV+CharisSIL-Italic CID TrueType Identity-H yes yes yes 449 0 YXTOVO+CharisSIL-Bold CID TrueType Identity-H yes yes yes 454 0 OUTUKK+TeX_CM_Roman Type 1C Builtin yes yes yes 459 0 JVZYCB+Univers Type 1C Builtin yes yes yes 463 0 FQSYNU+CharisSIL CID TrueType Identity-H yes yes yes 430 0 TPLNFK+TeX_CM_Maths_Extension Type 1C Builtin yes yes yes 168 0 VBDDZX+STIX-Bold Type 1C Custom yes yes yes 172 0 SCCWOR+TeX_CM_Maths_Symbols Type 1C Builtin yes yes yes 177 0 XGYZGM+CharisSIL-Italic CID TrueType Identity-H yes yes yes 161 0 QRQUMN+TeX_CM_Maths_Italic Type 1C Builtin yes yes yes 181 0 GFJYBA+STIX-Italic Type 1C Custom yes yes yes 185 0 FHHHEQ+STIX-BoldItalic Type 1C Custom yes yes yes 43 0 UGUKGN+TimesNewRomanPSMT CID TrueType Identity-H yes yes yes 105 0 Jhove (Rel. 1.22.1, 2019-04-17) Date: 2022-09-30 02:32:59 CEST RepresentationInformation: SenAct_a2022v345p113798.pdf ReportingModule: PDF-hul, Rel. 1.12.1 (2019-04-17) LastModified: 2022-09-29 17:28:33 CEST Size: 3620420 Format: PDF Version: 1.7 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf Profile: Linearized PDF, Tagged PDF PDFMetadata: Objects: 516 FreeObjects: 1 IncrementalUpdates: 1 DocumentCatalog: PageLayout: SinglePage PageMode: UseOutlines Language: en Outlines: Item: Title: Remote dynamic actuation of an electrostatically driven microcantilever by a wireless power transfer system Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@491cc5c9 Children: Item: Title: 1 Introduction Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@74ad1f1f Item: Title: 2 MEMSTENNA prototype and equivalent circuit model Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@6a1aab78 Item: Title: 3 Measurement setup Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@462d5aee Item: Title: 4 Test results Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@69b0fd6f Item: Title: 5 Conclusions Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@757942a1 Item: Title: Declaration of Competing Interest Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@4a87761d Item: Title: Data Availability Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@66d1af89 Item: Title: Acknowledgements Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@8646db9 Item: Title: References Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@37374a5e Info: Title: Remote dynamic actuation of an electrostatically driven microcantilever by a wireless power transfer system Author: Raul Ruiz Subject: Sensors and Actuators: A. 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Sensors and Actuators: A. Physical, 345 (2022) 113798. doi:10.1016/j.sna.2022.113798 RF-MEMS Wireless power transfer Electrostatic actuation Remote dynamic actuation of an electrostatically driven microcantilever by a wireless power transfer system Raul Ruiz Gabriel Abadal journal Sensors and Actuators: A. Physical © 2022 The Authors. 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