1ced10ef9017c39a26706a51f0eafa8f acspho_2022m2v9n2p413.pdf 0724f0b4f974d0b336cfcce34496174c0f8c3e1f acspho_2022m2v9n2p413.pdf 42fe9aaefc06814931c4fd492a044aa2a9dba48017e0f8f84f0e2d671d5d2b9b acspho_2022m2v9n2p413.pdf Title: Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems Subject: ACS Photonics 2022.9:413-419 Keywords: cavity optomechanics,nanoelectro-opto-mechanical systems (NEOMS),silicon photonics,interdigitated transducers,microwave-to-optics conversion Author: Daniel Navarro-Urrios, Martín F. Colombano, Guillermo Arregui, Guilhem Madiot, Alessandro Pitanti, Amadeu Griol, Tapani Makkonen, Jouni Ahopelto, Clivia M. Sotomayor-Torres, and Alejandro Martínez Creator: Arbortext Advanced Print Publisher 11.2.5208/W Library-x64 Producer: Acrobat Distiller 8.1.0 (Windows); modified using iText 4.2.0 by 1T3XT CreationDate: Tue Feb 8 15:40:01 2022 CET ModDate: Thu May 11 14:07:07 2023 CEST Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 7 Encrypted: no Page size: 607.408 x 800.901 pts Page rot: 0 File size: 2999154 bytes Optimized: no PDF version: 1.3 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- IACMON+AdvOT46dcae81+22 Type 1C Custom yes yes no 58 0 IACNDO+AdvPi3 Type 1C WinAnsi yes yes no 59 0 IACMPO+AdvTTa424a9ea Type 1C WinAnsi yes yes no 60 0 IACNDP+AdvOTce3d9a73+01 Type 1C MacRoman yes yes no 61 0 IACNBO+AdvTT7b58c9e2 Type 1C WinAnsi yes yes no 62 0 IACNIB+AdvOT2e364b11+fb Type 1C Custom yes yes yes 63 0 IACNIC+AdvOT8608a8d1+22 Type 1C Custom yes yes yes 64 0 IACNEA+AdvOT51c1769e Type 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