207c38b18727240111ad11863a0d9ba3 sensors-23-08945.pdf 49ea61d871bc8473090c78c743fd49a01010ab87 sensors-23-08945.pdf fbb3af795cb56c1c476c535fd77f61a0a2fa3834b88e713dbcd13438d5ac46e9 sensors-23-08945.pdf Title: Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection Subject: This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a commercial CMOS technology (0.35 m CMOS-AMS) and monolithically integrated with conditioning and readout circuitry. Sensing is performed through the resonance frequency change due to the addition of water onto the clamped-clamped beam coming from the moisture created by the evaporation of water in the human body. The sensitivity and high-speed response to the addition of water onto the metal bridge, as well as the quick dewetting of the surface, make it suitable for low-power human activity sensing. Keywords: CMOS; humidity sensor; low power; MEMS; monolithic integration; resonators; non-contact detection Author: Francesc Torres, Arantxa Uranga and Núria Barniol Creator: LaTeX with hyperref Producer: pdfTeX-1.40.21 CreationDate: Fri Nov 3 07:11:43 2023 CET ModDate: Fri Nov 3 07:15:20 2023 CET Tagged: no UserProperties: no Suspects: no Form: none JavaScript: no Pages: 13 Encrypted: no Page size: 595.276 x 841.89 pts (A4) Page rot: 0 File size: 3490500 bytes Optimized: no PDF version: 1.7 name type encoding emb sub uni object ID ------------------------------------ ----------------- ---------------- --- --- --- --------- OVNEXW+EURM10 Type 1 Builtin yes yes no 10 0 XOJZWF+URWPalladioL-Bold Type 1 Custom yes yes no 14 0 YIYDQW+URWPalladioL-Roma Type 1 Custom yes yes no 19 0 NZKKET+URWPalladioL-Ital Type 1 Custom yes yes no 23 0 ENLEMO+VnURWPalladioL-Bold Type 1 Custom yes yes no 27 0 DRZUJM+VnURWPalladioL Type 1 Custom yes yes no 32 0 RVSEMT+TimesNewRomanPS-BoldItalicMT Type 1C 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KJCCAP+PalatinoLinotype CID TrueType Identity-H yes yes yes 1456 0 KJCCBA+PalatinoLinotype TrueType WinAnsi yes yes no 1462 0 KJCCBC+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 1465 0 KJCCJP+PalatinoLinotype TrueType MacRoman yes yes no 1468 0 KJCCAO+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 1486 0 KJCCAP+PalatinoLinotype CID TrueType Identity-H yes yes yes 1489 0 KJCCBA+PalatinoLinotype TrueType WinAnsi yes yes no 1495 0 KJCCBC+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 1498 0 KJCCJP+PalatinoLinotype TrueType MacRoman yes yes no 1501 0 KJCCAO+PalatinoLinotype,Bold TrueType WinAnsi yes yes no 1517 0 KJCCAP+PalatinoLinotype CID TrueType Identity-H yes yes yes 1520 0 KJCCBA+PalatinoLinotype TrueType WinAnsi yes yes no 1526 0 KJCCBC+PalatinoLinotype,Italic TrueType WinAnsi yes yes no 1529 0 KJCCJP+PalatinoLinotype TrueType MacRoman yes yes no 1532 0 Jhove (Rel. 1.22.1, 2019-04-17) Date: 2023-11-22 02:33:10 CET RepresentationInformation: sensors-23-08945.pdf ReportingModule: PDF-hul, Rel. 1.12.1 (2019-04-17) LastModified: 2023-11-08 15:11:20 CET Size: 3490500 Format: PDF Version: 1.7 Status: Well-Formed and valid SignatureMatches: PDF-hul MIMEtype: application/pdf PDFMetadata: Objects: 1663 FreeObjects: 1 IncrementalUpdates: 0 DocumentCatalog: PageLayout: SinglePage PageMode: UseNone Outlines: Item: Title: Introduction Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@4d3167f4 Item: Title: Sensor Design and Fabrication Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@ed9d034 Item: Title: Results Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@6121c9d6 Children: Item: Title: Foam Measurements Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@87f383f Item: Title: Sensor Calibration (Phase Shift versus Distance) Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@4eb7f003 Item: Title: Application: Finger Movement Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@eafc191 Children: Item: Title: Phase Shift Detection Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@612fc6eb Item: Title: Finger Movement: Magnitude Shift Detection Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@1060b431 Item: Title: Breath Detection Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@612679d6 Item: Title: Conclusions Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@11758f2a Item: Title: References Destination: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject@e720b71 Info: Title: Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection Author: Francesc Torres, Arantxa Uranga and Núria Barniol Subject: This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a commercial CMOS technology (0.35 m CMOS-AMS) and monolithically integrated with conditioning and readout circuitry. Sensing is performed through the resonance frequency change due to the addition of water onto the clamped-clamped beam coming from the moisture created by the evaporation of water in the human body. The sensitivity and high-speed response to the addition of water onto the metal bridge, as well as the quick dewetting of the surface, make it suitable for low-power human activity sensing. 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