a1ce02c7a9239adac0a6d9e93599046b  solstaele_a2023m9v207p108718.pdf
49857641bd94194a5829012fdfba9af848f57266  solstaele_a2023m9v207p108718.pdf
b0104fd1e714a8b7afbf84092b00009a9e4b21998edba03ad11fda00fc104b76  solstaele_a2023m9v207p108718.pdf

Title:           Impact of the W etching process on the resistive switching properties of TiN/Ti/HfO2/W memristors
Subject:         Solid State Electronics, 207 (2023) 108718. doi:10.1016/j.sse.2023.108718
Keywords:        Breakdown voltage,Dry etching,HfO2,Memristor,Resistive switching,W electrode,Wet etching
Author:          M. Saludes-Tapia
Creator:         Elsevier
Producer:        Acrobat Distiller 8.1.0 (Windows)
CreationDate:    Tue Aug  8 09:08:20 2023 CEST
ModDate:         Tue Aug  8 10:50:44 2023 CEST
Custom Metadata: yes
Metadata Stream: yes
Tagged:          yes
UserProperties:  no
Suspects:        no
Form:            none
JavaScript:      no
Pages:           4
Encrypted:       no
Page size:       595.276 x 793.701 pts
Page rot:        0
File size:       3434378 bytes
Optimized:       no
PDF version:     1.7


name                                 type              encoding         emb sub uni object ID
------------------------------------ ----------------- ---------------- --- --- --- ---------
WMXBLZ+CharisSIL                     CID TrueType      Identity-H       yes yes yes    290  0
JGILOH+STIX-Regular                  Type 1C           Custom           yes yes yes    295  0
GTZJPG+TeX_CM_Maths_Symbols          Type 1C           Builtin          yes yes yes    300  0
UFPFLV+CharisSIL-Bold                CID TrueType      Identity-H       yes yes yes    304  0
BRWWWZ+TeX_CM_Roman                  Type 1C           Builtin          yes yes yes    309  0
SIEHIN+STIX-Italic                   Type 1C           Custom           yes yes yes    313  0
GBNAGF+Univers                       Type 1C           Builtin          yes yes yes    318  0
VLUMQY+CharisSIL-Italic              CID TrueType      Identity-H       yes yes yes    322  0
WVLBTK+CharisSIL                     CID TrueType      Identity-H       yes yes yes    281  0
CUSLGF+CharisSIL-Italic              CID TrueType      Identity-H       yes yes yes    108  0
LZYZZL+TeX_CM_Maths_Italic           Type 1C           Builtin          yes yes yes     76  0


Jhove (Rel. 1.28.0, 2023-05-18)
 Date: 2026-05-06 04:12:11 CEST
 RepresentationInformation: solstaele_a2023m9v207p108718.pdf
  ReportingModule: PDF-hul, Rel. 1.12.4 (2023-03-16)
  LastModified: 2026-05-05 16:16:38 CEST
  Size: 3434378
  Format: PDF
  Version: 1.7
  Status: Well-Formed and valid
  SignatureMatches:
   PDF-hul
  MIMEtype: application/pdf
  Profile: Tagged PDF
  PDFMetadata: 
   Objects: 373
   FreeObjects: 1
   IncrementalUpdates: 0
   DocumentCatalog: 
    PageLayout: SinglePage
    PageMode: UseOutlines
    Language: en
    Outlines: 
     Item: 
      Title: Impact of the W etching process on the resistive switching properties of TiN/Ti/HfO2/W memristors
      Destination: mk:title
      Children: 
       Item: 
        Title: 1 Introduction
        Destination: mk:H1_1
       Item: 
        Title: 2 Experimental
        Destination: mk:H1_2
       Item: 
        Title: 3 Results and discussion
        Destination: mk:H1_3
       Item: 
        Title: 4 Dynamic Memdiode model
        Destination: mk:H1_4
       Item: 
        Title: 5 Conclusions
        Destination: mk:H1_5
       Item: 
        Title: Declaration of Competing Interest
        Destination: mk:HH1_2
       Item: 
        Title: Data availability
        Destination: datalink3
       Item: 
        Title: Acknowledgment
        Destination: mk:HH1_4
       Item: 
        Title: References
        Destination: mk:HH2_1
   Info: 
    Title: Impact of the W etching process on the resistive switching properties of TiN/Ti/HfO2/W memristors
    Author: M. Saludes-Tapia
    Subject: Solid State Electronics, 207 (2023) 108718. doi:10.1016/j.sse.2023.108718
    Keywords: Breakdown voltage,Dry etching,HfO2,Memristor,Resistive switching,W electrode,Wet etching
    Creator: Elsevier
    Producer: Acrobat Distiller 8.1.0 (Windows)
    CreationDate: Tue Aug 08 09:08:20 CEST 2023
    ModDate: Tue Aug 08 10:50:44 CEST 2023
   ID: 0x3e79267a503ed96dda7c2ffbd65ec125, 0x67fd7e8db38ecb741891ecc0db1d091c
   Filters: 
    FilterPipeline: FlateDecode
    FilterPipeline: DCTDecode
   Images: 
    Image: 
     NisoImageMetadata: 
      FormatName: image/jpg
      CompressionScheme: JPEG
      ImageWidth: 236
      ImageHeight: 298
      BitsPerSample: 8
      BitsPerSampleUnit: integer
    Image: 
     NisoImageMetadata: 
      FormatName: image/jpg
      CompressionScheme: JPEG
      ImageWidth: 248
      ImageHeight: 271
      BitsPerSample: 8
      BitsPerSampleUnit: integer
   Fonts: 
    Type0: 
     Font: 
      BaseFont: UFPFLV+CharisSIL-Bold
      Encoding: Identity-H
      ToUnicode: true
     Font: 
      BaseFont: WMXBLZ+CharisSIL
      Encoding: Identity-H
      ToUnicode: true
     Font: 
      BaseFont: VLUMQY+CharisSIL-Italic
      Encoding: Identity-H
      ToUnicode: true
    Type1: 
     Font: 
      BaseFont: BRWWWZ+TeX_CM_Roman
      FontSubset: true
      FirstChar: 1
      LastChar: 128
      FontDescriptor: 
       FontName: BRWWWZ+TeX_CM_Roman
       Flags: Symbolic
       FontBBox: -50, -180, 1000, 720
       FontFile3: true
      ToUnicode: true
     Font: 
      BaseFont: JGILOH+STIX-Regular
      FontSubset: true
      FirstChar: 1
      LastChar: 21
      FontDescriptor: 
       FontName: JGILOH+STIX-Regular
       Flags: Nonsymbolic
       FontBBox: -970, -486, 2208, 1023
       FontFile3: true
      EncodingDictionary: 
       BaseEncoding: WinAnsiEncoding
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: SIEHIN+STIX-Italic
      FontSubset: true
      FirstChar: 1
      LastChar: 19
      FontDescriptor: 
       FontName: SIEHIN+STIX-Italic
       Flags: Nonsymbolic, Italic
       FontBBox: -970, -305, 1429, 1023
       FontFile3: true
      EncodingDictionary: 
       BaseEncoding: WinAnsiEncoding
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: GTZJPG+TeX_CM_Maths_Symbols
      FontSubset: true
      FirstChar: 1
      LastChar: 138
      FontDescriptor: 
       FontName: GTZJPG+TeX_CM_Maths_Symbols
       Flags: Symbolic
       FontBBox: -50, -180, 1000, 720
       FontFile3: true
      ToUnicode: true
     Font: 
      BaseFont: LZYZZL+TeX_CM_Maths_Italic
      FontSubset: true
      FirstChar: 1
      LastChar: 127
      FontDescriptor: 
       FontName: LZYZZL+TeX_CM_Maths_Italic
       Flags: Symbolic
       FontBBox: -50, -180, 1000, 720
       FontFile3: true
      ToUnicode: true
     Font: 
      BaseFont: GBNAGF+Univers
      FontSubset: true
      FirstChar: 32
      LastChar: 251
      FontDescriptor: 
       FontName: GBNAGF+Univers
       Flags: Symbolic
       FontBBox: -50, -180, 1000, 720
       FontFile3: true
      ToUnicode: true
    CIDFontType2: 
     Font: 
      BaseFont: UFPFLV+CharisSIL-Bold
      CIDSystemInfo: 
       Registry: Adobe
       Registry: Identity
       Supplement: 0
      FontDescriptor: 
       FontName: UFPFLV+CharisSIL-Bold
       Flags: Nonsymbolic, ForceBold
       FontBBox: -720, -533, 1759, 1320
       FontFile2: true
     Font: 
      BaseFont: WMXBLZ+CharisSIL
      CIDSystemInfo: 
       Registry: Adobe
       Registry: Identity
       Supplement: 0
      FontDescriptor: 
       FontName: WMXBLZ+CharisSIL
       Flags: Nonsymbolic
       FontBBox: -692, -533, 1623, 1319
       FontFile2: true
     Font: 
      BaseFont: VLUMQY+CharisSIL-Italic
      CIDSystemInfo: 
       Registry: Adobe
       Registry: Identity
       Supplement: 0
      FontDescriptor: 
       FontName: VLUMQY+CharisSIL-Italic
       Flags: Nonsymbolic, Italic
       FontBBox: -716, -533, 1627, 1318
       FontFile2: true
   XMP: <x:xmpmeta xmlns:x="adobe:ns:meta/" x:xmptk="XMP Core 5.1.2">
   <rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#">
      <rdf:Description rdf:about=""
            xmlns:dc="http://purl.org/dc/elements/1.1/">
         <dc:format>application/pdf</dc:format>
         <dc:identifier>10.1016/j.sse.2023.108718</dc:identifier>
         <dc:publisher>
            <rdf:Bag>
               <rdf:li>Elsevier Ltd</rdf:li>
            </rdf:Bag>
         </dc:publisher>
         <dc:description>
            <rdf:Alt>
               <rdf:li xml:lang="x-default">Solid State Electronics, 207 (2023) 108718. doi:10.1016/j.sse.2023.108718</rdf:li>
            </rdf:Alt>
         </dc:description>
         <dc:subject>
            <rdf:Bag>
               <rdf:li>Breakdown voltage</rdf:li>
               <rdf:li>Dry etching</rdf:li>
               <rdf:li>HfO2</rdf:li>
               <rdf:li>Memristor</rdf:li>
               <rdf:li>Resistive switching</rdf:li>
               <rdf:li>W electrode</rdf:li>
               <rdf:li>Wet etching</rdf:li>
            </rdf:Bag>
         </dc:subject>
         <dc:title>
            <rdf:Alt>
               <rdf:li xml:lang="x-default">Impact of the W etching process on the resistive switching properties of TiN/Ti/HfO2/W memristors</rdf:li>
            </rdf:Alt>
         </dc:title>
         <dc:creator>
            <rdf:Seq>
               <rdf:li>M. Saludes-Tapia</rdf:li>
               <rdf:li>F. Campabadal</rdf:li>
               <rdf:li>E. Miranda</rdf:li>
               <rdf:li>M.B. González</rdf:li>
            </rdf:Seq>
         </dc:creator>
      </rdf:Description>
      <rdf:Description rdf:about=""
            xmlns:prism="http://prismstandard.org/namespaces/basic/3.0/">
         <prism:aggregationType>journal</prism:aggregationType>
         <prism:publicationName>Solid State Electronics</prism:publicationName>
         <prism:copyright>© 2023 The Author(s). Published by Elsevier Ltd.</prism:copyright>
         <prism:issn>0038-1101</prism:issn>
         <prism:volume>207</prism:volume>
         <prism:coverDisplayDate>1 September 2023</prism:coverDisplayDate>
         <prism:coverDate>2023-09-01</prism:coverDate>
         <prism:pageRange>108718</prism:pageRange>
         <prism:startingPage>108718</prism:startingPage>
         <prism:doi>10.1016/j.sse.2023.108718</prism:doi>
         <prism:url>https://doi.org/10.1016/j.sse.2023.108718</prism:url>
      </rdf:Description>
      <rdf:Description rdf:about=""
            xmlns:crossmark="http://crossref.org/crossmark/1.0/">
         <crossmark:MajorVersionDate>2010-04-23</crossmark:MajorVersionDate>
         <crossmark:CrossmarkDomainExclusive>true</crossmark:CrossmarkDomainExclusive>
         <crossmark:DOI>10.1016/j.sse.2023.108718</crossmark:DOI>
         <crossmark:CrossMarkDomains>
            <rdf:Seq>
               <rdf:li>elsevier.com</rdf:li>
               <rdf:li>sciencedirect.com</rdf:li>
            </rdf:Seq>
         </crossmark:CrossMarkDomains>
      </rdf:Description>
      <rdf:Description rdf:about=""
            xmlns:ali="http://www.niso.org/schemas/ali/1.0/">
         <ali:license_ref>
            <rdf:Bag>
               <rdf:li rdf:parseType="Resource">
                  <ali:uri>http://creativecommons.org/licenses/by-nc-nd/4.0/</ali:uri>
               </rdf:li>
            </rdf:Bag>
         </ali:license_ref>
      </rdf:Description>
      <rdf:Description rdf:about=""
            xmlns:jav="http://www.niso.org/schemas/jav/1.0/">
         <jav:journal_article_version>VoR</jav:journal_article_version>
      </rdf:Description>
      <rdf:Description rdf:about=""
            xmlns:pdfx="http://ns.adobe.com/pdfx/1.3/">
         <XlEDuyPn8ogeNoweGogiMzcNNnPz8lwiJmdmGnd6QotaOmwyKndmKo9eQnM2SotaOmdiTma/>
         <pdfx:doi>10.1016/j.sse.2023.108718</pdfx:doi>
         <pdfx:robots>noindex</pdfx:robots>
         <pdfx:CrossmarkMajorVersionDate>2010-04-23</pdfx:CrossmarkMajorVersionDate>
         <pdfx:CrossmarkDomainExclusive>true</pdfx:CrossmarkDomainExclusive>
         <pdfx:CreationDate--Text>8th August 2023</pdfx:CreationDate--Text>
         <pdfx:CrossMarkDomains>
            <rdf:Seq>
               <rdf:li>sciencedirect.com</rdf:li>
               <rdf:li>elsevier.com</rdf:li>
            </rdf:Seq>
         </pdfx:CrossMarkDomains>
      </rdf:Description>
      <rdf:Description rdf:about=""
            xmlns:xmp="http://ns.adobe.com/xap/1.0/">
         <xmp:CreatorTool>Elsevier</xmp:CreatorTool>
         <xmp:ModifyDate>2023-08-08T08:50:44</xmp:ModifyDate>
         <xmp:CreateDate>2023-08-08T07:08:20</xmp:CreateDate>
         <xmp:MetadataDate>2023-08-08T08:50:44</xmp:MetadataDate>
      </rdf:Description>
      <rdf:Description rdf:about=""
            xmlns:xmpRights="http://ns.adobe.com/xap/1.0/rights/">
         <xmpRights:Marked>True</xmpRights:Marked>
      </rdf:Description>
      <rdf:Description rdf:about=""
            xmlns:pdf="http://ns.adobe.com/pdf/1.3/">
         <pdf:CreationDate--Text>8th August 2023</pdf:CreationDate--Text>
         <pdf:Producer>Acrobat Distiller 8.1.0 (Windows)</pdf:Producer>
         <pdf:Keywords>Breakdown voltage,Dry etching,HfO2,Memristor,Resistive switching,W electrode,Wet etching</pdf:Keywords>
      </rdf:Description>
      <rdf:Description rdf:about=""
            xmlns:xmpMM="http://ns.adobe.com/xap/1.0/mm/">
         <xmpMM:DocumentID>uuid:1b499bed-4ce8-4c0c-b682-0d58baae1cbe</xmpMM:DocumentID>
         <xmpMM:InstanceID>uuid:b6ed5266-03cb-4855-90c0-636283357f42</xmpMM:InstanceID>
      </rdf:Description>
   </rdf:RDF>
</x:xmpmeta>
   Pages: 
    Page: 
     Label: 1
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 120, 576, 126, 587
       Flags: Print
       Destination: 266
      Annotation: 
       Subtype: Link
       Rect: 126, 579, 130, 584
       Flags: Print
       Destination: 266
      Annotation: 
       Subtype: Link
       Rect: 126, 571, 209, 582
       Flags: Print
       Destination: 266
      Annotation: 
       Subtype: Link
       Rect: 209, 571, 273, 582
       Flags: Print
       Destination: 266
      Annotation: 
       Subtype: Link
       Rect: 273, 571, 353, 582
       Flags: Print
       Destination: 266
      Annotation: 
       Subtype: Link
       Rect: 353, 571, 357, 582
       Flags: Print
       Destination: 266
      Annotation: 
       Subtype: Link
       Rect: 144, 284, 155, 292
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 85, 263, 97, 271
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 135, 201, 147, 209
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 119, 169, 139, 177
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 342, 295, 353, 303
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 508, 253, 520, 261
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 458, 242, 478, 250
       Flags: Print
       Destination: 1
      Annotation: 
       Subtype: Link
       Rect: 448, 159, 459, 167
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 98, 104, 210, 111
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 321, 722, 369, 730
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 281, 667, 390, 675
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 37, 87, 176, 94
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 297, 749, 300, 757
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 229, 748, 364, 760
      Annotation: 
       Subtype: Link
       Rect: 499, 616, 528, 645
      Annotation: 
       Subtype: Link
       Rect: 425, 57, 557, 69
      Annotation: 
       Subtype: Link
       Rect: 37, 48, 72, 59
    Page: 
     Label: 2
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 239, 489, 260, 497
       Flags: Print
       Destination: 1
      Annotation: 
       Subtype: Link
       Rect: 206, 479, 226, 487
       Flags: Print
       Destination: 1
      Annotation: 
       Subtype: Link
       Rect: 73, 353, 94, 361
       Flags: Print
       Destination: 1
      Annotation: 
       Subtype: Link
       Rect: 40, 332, 60, 340
       Flags: Print
       Destination: 1
      Annotation: 
       Subtype: Link
       Rect: 82, 322, 101, 330
       Flags: Print
       Destination: 1
      Annotation: 
       Subtype: Link
       Rect: 74, 291, 95, 299
       Flags: Print
       Destination: 1
      Annotation: 
       Subtype: Link
       Rect: 112, 259, 123, 267
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 103, 187, 122, 195
       Flags: Print
       Destination: 1
      Annotation: 
       Subtype: Link
       Rect: 318, 410, 339, 418
       Flags: Print
       Destination: 34
      Annotation: 
       Subtype: Link
       Rect: 355, 357, 377, 365
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 475, 326, 495, 334
       Flags: Print
       Destination: 34
      Annotation: 
       Subtype: Link
       Rect: 306, 169, 327, 177
       Flags: Print
       Destination: 34
    Page: 
     Label: 3
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 191, 241, 202, 249
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 156, 178, 172, 186
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 37, 126, 84, 134
       Flags: Print
       Destination: 34
      Annotation: 
       Subtype: Link
       Rect: 186, 115, 207, 123
       Flags: Print
       Destination: 34
      Annotation: 
       Subtype: Link
       Rect: 40, 94, 83, 102
       Flags: Print
       Destination: 34
      Annotation: 
       Subtype: Link
       Rect: 40, 63, 59, 71
       Flags: Print
       Destination: 34
      Annotation: 
       Subtype: Link
       Rect: 201, 53, 221, 61
       Flags: Print
       Destination: 34
      Annotation: 
       Subtype: Link
       Rect: 361, 50, 382, 58
       Flags: Print
       Destination: 63
    Page: 
     Label: 4
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 146, 442, 162, 450
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 49, 306, 73, 314
       Flags: Print
       Destination: 63
      Annotation: 
       Subtype: Link
       Rect: 322, 153, 445, 160
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 322, 145, 452, 152
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 322, 137, 482, 144
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 322, 129, 474, 136
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 322, 121, 484, 128
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 322, 113, 489, 120
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 322, 105, 454, 112
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 322, 98, 462, 104
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 322, 90, 488, 96
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 323, 82, 486, 88
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 323, 74, 455, 80
       Flags: Print
      Annotation: 
       Subtype: Link
       Rect: 323, 66, 501, 72
       Flags: Print
  Checksum: 911c00c6
   Type: CRC32
  Checksum: a1ce02c7a9239adac0a6d9e93599046b
   Type: MD5
  Checksum: 49857641bd94194a5829012fdfba9af848f57266
   Type: SHA-1
  Checksum: b0104fd1e714a8b7afbf84092b00009a9e4b21998edba03ad11fda00fc104b76
   Type: SHA-256