ecb0afcba9940f262fbaaea5a4e0aa4c  ieesenjou_a2024m7v24n13p21311-21320.pdf
74d361c7b0acd388efdb0905697b4d4fde83511c  ieesenjou_a2024m7v24n13p21311-21320.pdf
40a8361bae05bd8c8e82aeafe228f8c3b15f6752cc441b2a41b8b8b5fba226f0  ieesenjou_a2024m7v24n13p21311-21320.pdf

Title:           A Single-Chip AlScN PMUTs-on-CMOS Hydrophone
Subject:         IEEE Sensors Journal;2024;24;13;10.1109/JSEN.2024.3401455
Creator:         LaTeX with hyperref
Producer:        pdfTeX-1.40.24; modified using iText® Core 7.2.4 (AGPL version) ©2000-2022 iText Group NV
CreationDate:    Thu Jun 20 17:43:44 2024 CEST
ModDate:         Fri Jun 28 05:34:54 2024 CEST
Custom Metadata: yes
Metadata Stream: yes
Tagged:          no
UserProperties:  no
Suspects:        no
Form:            none
JavaScript:      no
Pages:           10
Encrypted:       no
Page size:       612 x 792 pts (letter)
Page rot:        0
File size:       15954184 bytes
Optimized:       no
PDF version:     1.5


name                                 type              encoding         emb sub uni object ID
------------------------------------ ----------------- ---------------- --- --- --- ---------
HRUISA+MTSYN                         Type 1            Builtin          yes yes yes     51  0
NZCQGC+RMTMIB                        Type 1            Builtin          yes yes yes     52  0
VNNWHG+NimbusSanL-BoldItal           Type 1            Custom           yes yes yes     53  0
XSCAQF+NimbusSanL-Bold               Type 1            Custom           yes yes yes     22  0
FWUGNI+RMTMI                         Type 1            Builtin          yes yes yes     54  0
KJPJUO+NimbusSanL-ReguItal           Type 1            Custom           yes yes yes     55  0
QEWNUU+MTSYB                         Type 1            Builtin          yes yes yes     56  0
RJXVBX+NimbusSanL-Regu               Type 1            Custom           yes yes yes     24  0
PPCJIU+NimbusRomNo9L-Medi            Type 1            Custom           yes yes yes     57  0
VLUGXB+NimbusRomNo9L-Regu            Type 1            Custom           yes yes yes     25  0
HFRIJR+BLEX                          Type 1            Custom           yes yes yes    445  0
KVGQPY+StandardSymL-Slant_167        Type 1            Builtin          yes yes yes    636  0
OUNYWO+NimbusRomNo9L-ReguItal        Type 1            Custom           yes yes yes     23  0
ZVSZHD+HFBRMI8                       Type 1            Builtin          yes yes yes    637  0


Jhove (Rel. 1.28.0, 2023-05-18)
 Date: 2024-07-12 02:43:45 CEST
 RepresentationInformation: ieesenjou_a2024m7v24n13p21311-21320.pdf
  ReportingModule: PDF-hul, Rel. 1.12.4 (2023-03-16)
  LastModified: 2024-07-11 15:23:58 CEST
  Size: 15954184
  Format: PDF
  Version: 1.5
  Status: Well-Formed and valid
  SignatureMatches:
   PDF-hul
  MIMEtype: application/pdf
  PDFMetadata: 
   Objects: 1197
   FreeObjects: 1
   IncrementalUpdates: 0
   DocumentCatalog: 
    PageLayout: SinglePage
    PageMode: UseNone
   Info: 
    Title: A Single-Chip AlScN PMUTs-on-CMOS Hydrophone
    Subject: IEEE Sensors Journal;2024;24;13;10.1109/JSEN.2024.3401455
    Creator: LaTeX with hyperref
    Producer: pdfTeX-1.40.24; modified using iText® Core 7.2.4 (AGPL version) ©2000-2022 iText Group NV
    CreationDate: Thu Jun 20 18:13:44 CEST 2024
    ModDate: Fri Jun 28 01:34:54 CEST 2024
    Trapped: False
   ID: 0x083eddc0dc89af5f701313849839a978, 0x59738401aeda247a0e22651a6ba441d7
   Filters: 
    FilterPipeline: FlateDecode
   Fonts: 
    Type1: 
     Font: 
      BaseFont: HRUISA+MTSYN
      FontSubset: true
      FirstChar: 0
      LastChar: 87
      FontDescriptor: 
       FontName: HRUISA+MTSYN
       Flags: Symbolic
       FontBBox: 0, -954, 1043, 900
       FontFile: true
      ToUnicode: true
     Font: 
      BaseFont: NZCQGC+RMTMIB
      FontSubset: true
      FirstChar: 22
      LastChar: 22
      FontDescriptor: 
       FontName: NZCQGC+RMTMIB
       Flags: Symbolic
       FontBBox: 0, -208, 994, 706
       FontFile: true
      ToUnicode: true
     Font: 
      BaseFont: VNNWHG+NimbusSanL-BoldItal
      FontSubset: true
      FirstChar: 65
      LastChar: 120
      FontDescriptor: 
       FontName: VNNWHG+NimbusSanL-BoldItal
       Flags: Symbolic
       FontBBox: -177, -309, 1107, 953
       FontFile: true
      EncodingDictionary: 
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: XSCAQF+NimbusSanL-Bold
      FontSubset: true
      FirstChar: 2
      LastChar: 250
      FontDescriptor: 
       FontName: XSCAQF+NimbusSanL-Bold
       Flags: Symbolic
       FontBBox: -173, -307, 1003, 949
       FontFile: true
      EncodingDictionary: 
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: FWUGNI+RMTMI
      FontSubset: true
      FirstChar: 18
      LastChar: 127
      FontDescriptor: 
       FontName: FWUGNI+RMTMI
       Flags: Symbolic
       FontBBox: 0, -213, 987, 680
       FontFile: true
      ToUnicode: true
     Font: 
      BaseFont: KJPJUO+NimbusSanL-ReguItal
      FontSubset: true
      FirstChar: 40
      LastChar: 122
      FontDescriptor: 
       FontName: KJPJUO+NimbusSanL-ReguItal
       Flags: Symbolic
       FontBBox: -178, -284, 1108, 953
       FontFile: true
      EncodingDictionary: 
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: OUNYWO+NimbusRomNo9L-ReguItal
      FontSubset: true
      FirstChar: 40
      LastChar: 151
      FontDescriptor: 
       FontName: OUNYWO+NimbusRomNo9L-ReguItal
       Flags: Symbolic
       FontBBox: -169, -270, 1010, 924
       FontFile: true
      EncodingDictionary: 
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: QEWNUU+MTSYB
      FontSubset: true
      FirstChar: 0
      LastChar: 2
      FontDescriptor: 
       FontName: QEWNUU+MTSYB
       Flags: Symbolic
       FontBBox: -16, -935, 1043, 896
       FontFile: true
      ToUnicode: true
     Font: 
      BaseFont: RJXVBX+NimbusSanL-Regu
      FontSubset: true
      FirstChar: 2
      LastChar: 250
      FontDescriptor: 
       FontName: RJXVBX+NimbusSanL-Regu
       Flags: Symbolic
       FontBBox: -174, -285, 1001, 953
       FontFile: true
      EncodingDictionary: 
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: PPCJIU+NimbusRomNo9L-Medi
      FontSubset: true
      FirstChar: 72
      LastChar: 72
      FontDescriptor: 
       FontName: PPCJIU+NimbusRomNo9L-Medi
       Flags: Symbolic
       FontBBox: -168, -341, 1000, 960
       FontFile: true
      EncodingDictionary: 
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: VLUGXB+NimbusRomNo9L-Regu
      FontSubset: true
      FirstChar: 2
      LastChar: 252
      FontDescriptor: 
       FontName: VLUGXB+NimbusRomNo9L-Regu
       Flags: Symbolic
       FontBBox: -168, -281, 1000, 924
       FontFile: true
      EncodingDictionary: 
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: KVGQPY+StandardSymL-Slant_167
      FontSubset: true
      FirstChar: 108
      LastChar: 108
      FontDescriptor: 
       FontName: KVGQPY+StandardSymL-Slant_167
       Flags: Symbolic
       FontBBox: -180, -293, 1090, 1010
       FontFile: true
      ToUnicode: true
     Font: 
      BaseFont: HFRIJR+BLEX
      FontSubset: true
      FirstChar: 2
      LastChar: 115
      FontDescriptor: 
       FontName: HFRIJR+BLEX
       Flags: Symbolic
       FontBBox: -23, -2954, 1454, 762
       FontFile: true
      EncodingDictionary: 
       Differences: true
      ToUnicode: true
     Font: 
      BaseFont: ZVSZHD+HFBRMI8
      FontSubset: true
      FirstChar: 22
      LastChar: 22
      FontDescriptor: 
       FontName: ZVSZHD+HFBRMI8
       Flags: Symbolic
       FontBBox: -112, -223, 1059, 750
       FontFile: true
      ToUnicode: true
   XMP: <x:xmpmeta xmlns:x="adobe:ns:meta/">
<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#">
<rdf:Description rdf:about="" xmlns:dc="http://purl.org/dc/elements/1.1/"><dc:format>application/pdf</dc:format><dc:publisher><rdf:Seq><rdf:li>IEEE</rdf:li></rdf:Seq></dc:publisher><dc:description><rdf:Alt><rdf:li>IEEE Sensors Journal;2024;24;13;10.1109/JSEN.2024.3401455</rdf:li></rdf:Alt></dc:description><dc:title><rdf:Alt><rdf:li>A Single-Chip AlScN PMUTs-on-CMOS Hydrophone</rdf:li></rdf:Alt></dc:title><dc:subject><rdf:Seq><rdf:li>Hydrophone</rdf:li><rdf:li>micro-electro-mechanical-system (MEMS) hydrophone</rdf:li><rdf:li>piezoelectric micromachined ultrasonic transducers (PMUTs)</rdf:li><rdf:li>PMUTs-on-complementary metal-oxide-semiconductor (CMOS)</rdf:li><rdf:li>receiving sensitivity (SR)</rdf:li></rdf:Seq></dc:subject><dc:creator><rdf:Seq><rdf:li>Eyglis Ledesma</rdf:li><rdf:li>Arantxa Uranga</rdf:li><rdf:li>Nuria Barniol</rdf:li></rdf:Seq></dc:creator></rdf:Description>
<rdf:Description rdf:about="" xmlns:prism="http://prismstandard.org/namespaces/basic/3.0/"><prism:publicationName>IEEE Sensors Journal</prism:publicationName><prism:startingPage>21311</prism:startingPage><prism:coverDisplayDate>1 July1, 2024</prism:coverDisplayDate><prism:issueIdentifier>13</prism:issueIdentifier><prism:doi>10.1109/JSEN.2024.3401455</prism:doi><prism:volume>24</prism:volume><prism:endingPage>21320</prism:endingPage></rdf:Description>
<rdf:Description rdf:about="" xmlns:jav="http://www.niso.org/schemas/jav/1.0/"><jav:journal_article_version>VoR</jav:journal_article_version></rdf:Description>
</rdf:RDF></x:xmpmeta>
   Pages: 
    Page: 
     Label: 21311
     Sequence: 1
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 206, 643, 216, 658
      Annotation: 
       Subtype: Link
       Rect: 296, 643, 307, 658
      Annotation: 
       Subtype: Link
       Rect: 396, 643, 406, 658
      Annotation: 
       Subtype: Link
       Rect: 162, 311, 184, 323
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 227, 215, 249, 227
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 496, 348, 518, 360
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 346, 312, 368, 324
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 437, 312, 459, 324
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 410, 300, 432, 312
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 504, 276, 526, 288
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 473, 264, 495, 276
       ActionDest: 31
    Page: 
     Label: 21312
     Sequence: 2
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 288, 686, 310, 698
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 51, 674, 73, 685
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 143, 674, 165, 685
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 257, 674, 279, 685
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 121, 494, 143, 506
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 126, 434, 148, 446
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 193, 386, 215, 398
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 61, 243, 83, 255
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 93, 39, 115, 51
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 117, 39, 139, 51
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 141, 39, 163, 51
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 179, 39, 201, 51
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 460, 638, 482, 650
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 371, 578, 392, 590
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 407, 566, 429, 578
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 364, 542, 386, 554
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 360, 470, 382, 482
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 418, 458, 439, 470
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 400, 101, 408, 111
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 400, 101, 408, 111
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 429, 88, 441, 99
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 429, 88, 441, 99
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 498, 76, 511, 87
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 498, 76, 511, 87
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 345, 53, 355, 63
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 345, 53, 355, 63
       ActionDest: 31
    Page: 
     Label: 21313
     Sequence: 3
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 283, 620, 305, 632
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 149, 527, 171, 539
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 172, 527, 194, 539
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 261, 468, 283, 480
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 285, 444, 307, 455
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 151, 432, 173, 444
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 218, 373, 231, 384
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 221, 373, 228, 384
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 285, 348, 307, 360
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 117, 275, 124, 285
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 117, 275, 124, 285
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 245, 87, 259, 98
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 249, 87, 256, 98
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 483, 306, 504, 318
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 364, 260, 378, 270
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 368, 260, 375, 270
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 557, 188, 564, 199
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 557, 188, 564, 199
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 415, 176, 429, 187
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 419, 176, 426, 187
       ActionDest: 62
    Page: 
     Label: 21314
     Sequence: 4
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 117, 698, 131, 709
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 120, 698, 127, 709
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 70, 602, 92, 614
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 114, 568, 126, 578
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 114, 568, 126, 578
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 207, 450, 229, 462
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 226, 450, 248, 462
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 115, 438, 129, 449
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 118, 438, 125, 449
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 129, 414, 151, 426
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 209, 170, 231, 182
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 232, 170, 254, 182
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 282, 147, 301, 157
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 282, 147, 289, 157
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 421, 325, 442, 337
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 340, 278, 358, 289
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 340, 278, 347, 289
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 340, 51, 358, 62
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 340, 51, 347, 62
       ActionDest: 63
    Page: 
     Label: 21315
     Sequence: 5
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 125, 349, 147, 361
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 255, 349, 277, 361
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 216, 182, 234, 193
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 216, 182, 223, 193
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 67, 51, 85, 62
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 67, 51, 74, 62
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 106, 51, 120, 62
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 487, 467, 505, 478
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 487, 467, 493, 478
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 431, 391, 452, 402
       ActionDest: 4
      Annotation: 
       Subtype: Link
       Rect: 442, 358, 447, 366
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 442, 358, 447, 366
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 477, 308, 490, 319
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 480, 308, 487, 319
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 473, 298, 479, 307
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 473, 298, 479, 307
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 496, 87, 514, 98
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 496, 87, 503, 98
       ActionDest: 65
    Page: 
     Label: 21316
     Sequence: 6
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 79, 230, 97, 241
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 79, 230, 86, 241
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 118, 147, 125, 157
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 118, 147, 125, 157
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 216, 123, 223, 134
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 216, 123, 223, 134
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 276, 87, 295, 98
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 276, 87, 283, 98
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 294, 39, 301, 50
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 294, 39, 301, 50
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 432, 428, 445, 440
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 435, 428, 442, 440
       ActionDest: 65
      Annotation: 
       Subtype: Link
       Rect: 550, 147, 564, 157
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 553, 147, 560, 157
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 510, 110, 532, 122
       ActionDest: 4
    Page: 
     Label: 21317
     Sequence: 7
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 149, 304, 156, 315
       ActionDest: 29
      Annotation: 
       Subtype: Link
       Rect: 149, 304, 156, 315
       ActionDest: 29
      Annotation: 
       Subtype: Link
       Rect: 97, 159, 111, 169
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 101, 159, 108, 169
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 136, 89, 141, 98
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 136, 89, 141, 98
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 118, 41, 127, 50
       ActionDest: 30
      Annotation: 
       Subtype: Link
       Rect: 118, 41, 127, 50
       ActionDest: 30
      Annotation: 
       Subtype: Link
       Rect: 450, 410, 457, 421
       ActionDest: 30
      Annotation: 
       Subtype: Link
       Rect: 450, 410, 457, 421
       ActionDest: 30
      Annotation: 
       Subtype: Link
       Rect: 495, 314, 502, 325
       ActionDest: 30
      Annotation: 
       Subtype: Link
       Rect: 495, 314, 502, 325
       ActionDest: 30
      Annotation: 
       Subtype: Link
       Rect: 508, 255, 527, 265
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 508, 255, 527, 265
       ActionDest: 63
    Page: 
     Label: 21318
     Sequence: 8
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 361, 135, 372, 146
       ActionDest: 30
      Annotation: 
       Subtype: Link
       Rect: 361, 135, 372, 146
       ActionDest: 30
    Page: 
     Label: 21319
     Sequence: 9
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 73, 359, 85, 367
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 73, 359, 85, 367
       ActionDest: 31
      Annotation: 
       Subtype: Link
       Rect: 51, 57, 69, 67
       ActionDest: 36
      Annotation: 
       Subtype: Link
       Rect: 314, 465, 332, 475
       ActionDest: 36
      Annotation: 
       Subtype: Link
       Rect: 314, 446, 332, 456
       ActionDest: 36
      Annotation: 
       Subtype: Link
       Rect: 314, 417, 332, 427
       ActionDest: 36
      Annotation: 
       Subtype: Link
       Rect: 314, 388, 332, 398
       ActionDest: 36
      Annotation: 
       Subtype: Link
       Rect: 314, 368, 332, 378
       ActionDest: 36
      Annotation: 
       Subtype: Link
       Rect: 314, 340, 332, 350
       ActionDest: 36
      Annotation: 
       Subtype: Link
       Rect: 314, 312, 332, 322
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 314, 292, 332, 302
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 310, 272, 328, 282
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 310, 235, 328, 245
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 310, 198, 328, 208
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 310, 152, 328, 162
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 310, 132, 328, 142
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 310, 94, 328, 104
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 310, 66, 328, 76
       ActionDest: 61
    Page: 
     Label: 21320
     Sequence: 10
     Annotations: 
      Annotation: 
       Subtype: Link
       Rect: 47, 722, 65, 732
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 47, 703, 65, 713
       ActionDest: 61
      Annotation: 
       Subtype: Link
       Rect: 47, 667, 65, 677
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 47, 639, 65, 649
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 47, 594, 65, 604
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 47, 575, 65, 585
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 47, 547, 65, 557
       ActionDest: 62
      Annotation: 
       Subtype: Link
       Rect: 47, 529, 65, 539
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 47, 493, 65, 503
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 47, 456, 65, 466
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 47, 420, 65, 430
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 47, 401, 65, 411
       ActionDest: 64
      Annotation: 
       Subtype: Link
       Rect: 47, 382, 65, 392
       ActionDest: 63
      Annotation: 
       Subtype: Link
       Rect: 47, 355, 65, 365
       ActionDest: 36
  Checksum: 2dff81d2
   Type: CRC32
  Checksum: ecb0afcba9940f262fbaaea5a4e0aa4c
   Type: MD5
  Checksum: 74d361c7b0acd388efdb0905697b4d4fde83511c
   Type: SHA-1
  Checksum: 40a8361bae05bd8c8e82aeafe228f8c3b15f6752cc441b2a41b8b8b5fba226f0
   Type: SHA-256