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Title:           Design and fabrication of an opto-mechanical antenna in the NIR range
Subject:         Micro and Nano Engineering, 23 (2024) 100241. doi:10.1016/j.mne.2024.100241
Keywords:        Opto-mechanical antenna,NIR optical detector,Plasmonic optical nanoantenna,MEMS/NEMS resonators
Author:          Daniyal Khosh Maram
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        Title: 1 Introduction
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            Title: 4.2.1 Design of the optimum nanoantenna
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            Title: 4.2.3 Tolerance analysis of the NEMSTENNA opto-mechanical response
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        Title: Declaration of competing interest
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   Type: CRC32
  Checksum: b955ed4bb75019fc21b36548af276373
   Type: MD5
  Checksum: f0c1a8fde6e9d91b4ca3237324e9bbb79df03796
   Type: SHA-1
  Checksum: 0309bf6a3b17daacd4f6c881f85cc282f9888e84824f48df88315c5cebbb2a9a
   Type: SHA-256