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Title:           Two-step ALD process for non-oxide ceramic deposition: the example of boron nitride
Subject:         Journal of Physics: Materials, 7 (2024) 035006. doi: 10.1088/2515-7639/ad561e
Keywords:        atomic layer deposition,boron nitride,thin film,polymer derived ceramics
Author:          Ali Hossain,Thomas Souvignet,Neil R Innis,Wenjun Hao,Olivier Boisron,Ileana Florea,Peng Xiao,Marianna Sledzinska,Catherine Journet,Catherine Marichy
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     Item: 
      Title: Two-step ALD process for non-oxide ceramic deposition: the example of boron nitride
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       Item: 
        Title: 1. Introduction
       Item: 
        Title: 2. Method
        Children: 
         Item: 
          Title: 2.1. Two-step ALD of BN
         Item: 
          Title: 2.2. Characterization of the planar substrates coated with BN layer
       Item: 
        Title: 3. Results and discussion
        Children: 
         Item: 
          Title: 3.1. ALD parameters
         Item: 
          Title: 3.2. Polyborazine and BN thin films on inorganic substrates
       Item: 
        Title: 4. Conclusion
       Item: 
        Title: References
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      Annotation: 
       Subtype: Link
       Rect: 149, 350, 176, 359
      Annotation: 
       Subtype: Link
       Rect: 347, 340, 355, 349
      Annotation: 
       Subtype: Link
       Rect: 356, 340, 380, 349
      Annotation: 
       Subtype: Link
       Rect: 175, 320, 187, 329
      Annotation: 
       Subtype: Link
       Rect: 188, 320, 215, 329
  Checksum: 6ff6b3c5
   Type: CRC32
  Checksum: 1c04a50092978d7bf8b917be8fa4d94b
   Type: MD5
  Checksum: 81adc25fe34964c1a9464ead683cbcb82e429c33
   Type: SHA-1
  Checksum: a7ed3d7f5be8d800aed00ab8af090d9b4a5237fd67d62f5e9c77239063819147
   Type: SHA-256