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Title:           Towards wafer-scale 2D material sensors
Subject:         2D Materials, 12 (2025) 023002. doi: 10.1088/2053-1583/adac73
Keywords:        χχ2D materials,sensor,graphene,NEMS,MEMS,waferscale,CMOS
Author:          Peter G Steeneken,Miika Soikkeli,Sanna Arpiainen,Arto Rantala,Raivo Jaaniso,Roberto Pezone,Sten Vollebregt,Sebastian Lukas,Satender Kataria,Maurits J A Houmes,Ruslan Álvarez-Diduk,Kangho Lee,Hutomo Suryo Wasisto,Sebastian Anzinger,Marc Fueldner,Gerard J Verbiest,Farbod Alijani,Dong Hoon Shin,Ermin Malic,Richard van Rijn,Tarja K Nevanen,Alba Centeno,Amaia Zurutuza,Herre S J van der Zant,Arben Merkoçi,Georg S Duesberg,Max C Lemme
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      Title: Towards wafer-scale 2D material sensors
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        Title: 1. Introduction
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        Title: 2. Wafer-scale 2D material integration for sensors
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         Item: 
          Title: 2.1. Transfer-based and transfer-free 2D material integration
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          Title: 2.2. CMOS integration and electronic readout
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        Title: 3. 2D material sensors
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         Item: 
          Title: 3.1. Pressure sensors and microphones
         Item: 
          Title: 3.2. Gas and biosensors
         Item: 
          Title: 3.3. Sensor prototypes
       Item: 
        Title: 4. Roadmap and perspective
       Item: 
        Title: References
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    Title: Towards wafer-scale 2D material sensors
    Author: Peter G Steeneken,Miika Soikkeli,Sanna Arpiainen,Arto Rantala,Raivo Jaaniso,Roberto Pezone,Sten Vollebregt,Sebastian Lukas,Satender Kataria,Maurits J A Houmes,Ruslan Álvarez-Diduk,Kangho Lee,Hutomo Suryo Wasisto,Sebastian Anzinger,Marc Fueldner,Gerard J Verbiest,Farbod Alijani,Dong Hoon Shin,Ermin Malic,Richard van Rijn,Tarja K Nevanen,Alba Centeno,Amaia Zurutuza,Herre S J van der Zant,Arben Merkoçi,Georg S Duesberg,Max C Lemme
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  Checksum: ba629686
   Type: CRC32
  Checksum: 5e50ce03a5562affdee311b323f088bf
   Type: MD5
  Checksum: e0e8f6bbb8d7464abd2bb6fa379285af6688c282
   Type: SHA-1
  Checksum: 913466e4d14dd564c4b3e5eab92f07f2b23b2e8797379af75d8da98bf15c318c
   Type: SHA-256