Order quantification of hexagonal periodic arrays fabricated by in situ solvent-assisted nanoimprint lithography of block copolymers
Delgado Simao, Claudia (Institut Català de Nanociència i Nanotecnologia)
Khunsin, Worawut (Institut Català de Nanociència i Nanotecnologia)
Kehagias, Nikolaos (Institut Català de Nanociència i Nanotecnologia)
Salaun, Mathieu (Centre national de la recherche scientifique. Laboratoire des Technologies de la Microélectronique)
Zelsmann, Marc (Centre national de la recherche scientifique. Laboratoire des Technologies de la Microélectronique)
Morris, Michael A. (Tyndall National Institute. School of Chemistry)
Sotomayor Torres, Clivia M. (Institut Català de Nanociència i Nanotecnologia)

Data:	2014
Resum:	Directed self-assembly of block copolymer polystyrene-b-polyethylene oxide (PS-b-PEO) thin film was achieved by a one-pot methodology of solvent vapor assisted nanoimprint lithography (SAIL). Simultaneous solvent-anneal and imprinting of a PS-b-PEO thin film on silicon without surface pre-treatments yielded a 250 nm line grating decorated with 20 nm diameter nanodots array over a large surface area of up to 4' wafer scale. The grazing-incidence small-angle x-ray scattering diffraction pattern showed the fidelity of the NIL stamp pattern replication and confirmed the periodicity of the BCP of 40 nm. The order of the hexagonally arranged nanodot lattice was quantified by SEM image analysis using the opposite partner method and compared to conventionally solvent-annealed block copolymer films. The imprint-based SAIL methodology thus demonstrated an improvement in ordering of the nanodot lattice of up to 50%, and allows significant time and cost reduction in the processing of these structures.
Ajuts:	European Commission 245565 European Commission 257375 Ministerio de Economía y Competitividad MAT2012-31392
Drets:	Tots els drets reservats.
Llengua:	Anglès
Document:	Article ; recerca ; Versió acceptada per publicar
Publicat a:	Nanotechnology, Vol. 25, Issue 17 (May 2014) , art. 175703, ISSN 1361-6528

DOI: 10.1088/0957-4484/25/17/175703

Postprint 23 p, 1.1 MB

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