Impact of hydrogenation on the stability and mechanical properties of amorphous boron nitride
Kaya, Onurcan (Institut Català de Nanociència i Nanotecnologia)
Colombo, Luigi (CNMC)
Antidormi, Aleandro (Institut Català de Nanociència i Nanotecnologia)
Villena, Marco A. (King Abdullah University of Science and Technology. Department of Material Science and Engineering)
Lanza, Mario (King Abdullah University of Science and Technology. Department of Material Science and Engineering)
Cole, Ivan (RMIT University (Melbourne, Austràlia). School of Engineering)
Roche, Stephan (Institut Català de Nanociència i Nanotecnologia)

Data:	2024
Resum:	Interconnect materials with ultralow dielectric constant, and good thermal and mechanical properties are crucial for the further miniaturization of electronic devices. Recently, it has been demonstrated that ultrathin amorphous boron nitride (aBN) films have a very low dielectric constant, high density (above 2. 1 g cm), high thermal stability, and mechanical properties. The excellent properties of aBN derive from the nature and degree of disorder, which can be controlled at fabrication, allowing tuning of the physical properties for desired applications. Here, we report an improvement in the stability and mechanical properties of aBN upon hydrogen doping. With the introduction of a Gaussian approximation potential for atomistic simulations, we investigate the changing morphology of aBN with varying H doping concentrations. We found that for 8 at% of H doping, the concentration of sp -hybridized atoms reaches to a maximum which leads to an improvement of thermal stability and mechanical properties by 20%. These results will be a guideline for experimentalists and process engineers to tune the growth conditions of aBN films for numerous applications.
Ajuts:	European Commission 101034328 Agencia Estatal de Investigación PCI2021-122092-2A
Drets:	Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.
Llengua:	Anglès
Document:	Article ; recerca ; Versió publicada
Publicat a:	JPhys materials, Vol. 7, Issue 2 (March 2024) , art. 25010, ISSN 2515-7639

DOI: 10.1088/2515-7639/ad367b

10 p, 2.6 MB

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