Published articles

Published articles 1 records found  Search took 0.02 seconds. 
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6 p, 1.7 MB Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology / Muñoz Gamarra, Jose Luis (Universitat Autònoma de Barcelona. Departament de Enginyeria Electrònica) ; Uranga del Monte, Aránzazu (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
We report experimental demonstrations of contact-mode nano-electromechanical switches obtained using a capacitor module based on metal-insulator-metal configuration of a standard commercial complementary metal oxide semiconductor technology. [...]
2014 - 10.1063/1.4882918
Applied physics letters, Vol. 104, Issue 24 (June 2014) , p. 243105-1/243105-5  

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