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4 p, 414.9 KB Local oxidation of silicon surfaces by dynamic force microscopy : nanofabrication and water bridge formation / García, Ricardo (Instituto de Microelectrónica de Madrid) ; Calleja, M. (Instituto de Microelectrónica de Madrid) ; Pérez Murano, Francesc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; American Physical Society
Local oxidation of siliconsurfaces by atomic force microscopy is a very promising lithographic approach at nanometer scale. Here, we study the reproducibility, voltage dependence, and kinetics when the oxidation is performed by dynamic force microscopy modes. [...]
1998 - 10.1063/1.121340
Applied physics letters, Vol. 72, Issue 18 (May 1998) , p. 2295-2297  
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