Published articles

Published articles 1 records found  Search took 0.01 seconds. 
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4 p, 1.2 MB Correlation between the nanoscale electrical and morphological properties of crystallized hafnium oxide-based metal oxide semiconductor structures / Iglesias Santiso, Vanessa (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Porti i Pujal, Marc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Nafría i Maqueda, Montserrat (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Aymerich Humet, Xavier (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Dudek, P. (Innovations for High Performance Microelectronics (Frankfurt, Alemanya)) ; Schroeder, T. (Innovations for High Performance Microelectronics (Frankfurt, Alemanya)) ; Bersuker, G. (SEMATECH (Austin, Estats Units d'Amèrica)) ; American Physical Society
The relationship between electrical and structuralcharacteristics of polycrystalline HfO2films has been investigated by conductive atomic force microscopy under ultrahigh vacuum conditions. The results demonstrate that highly conductive and breakdown (BD) sites are concentrated mainly at the grain boundaries (GBs). [...]
2010 - 10.1063/1.3533257
Applied Physics Letters, Vol. 97, Issue 26 (December 2010) , p. 262906/1-262906/3  

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