Published articles

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4 p, 1003.7 KB Degradation of polycrystalline HfO2-based gate dielectrics under nanoscale electrical stress / Iglesias Santiso, Vanessa (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Lanza Martínez, Mario (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Zhang, K. (Peking University. Department of Electronics) ; Bayerl, Albin (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Porti i Pujal, Marc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Nafría i Maqueda, Montserrat (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Aymerich Humet, Xavier (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Benstetter, G. (University of Applied Sciences Deggendorf. Electrical Engineering Department) ; Shen, Z. Y. (Peking University. Department of Electronics) ; Bersuker, G. (SEMATECH (Austin, Estats Units d'Amèrica))
The evolution of the electrical properties of HfO2/SiO2/Si dielectric stacks under electrical stress has been investigated using atomic force microscope-based techniques. The current through the grain boundaries (GBs), which is found to be higher than thorough the grains, is correlated to a higher density of positively charged defects at the GBs. [...]
2011 - 10.1063/1.3637633
Applied Physics Letters, Vol. 99, Issue 10 (September 2011) , p. 103510/1-103510/3  

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