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15 p, 4.1 MB Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors / Torres, Francesc 1948- (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Sobreviela, Guillermo ; Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Uranga del Monte, Aránzazu (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Riverola, Martín
Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. [...]
2016 - 10.3390/s16101690
Sensors (Basel, Switzerland), Vol. 16 Núm. 10 (October 2016) , art. 1690  
Detailed record - Creative Commons

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