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9 p, 957.5 KB Defects in nano-imprint lithography line patterns : computational modelling and measurement accuracy / Constantoudis, Vassilios (Institute of Nanoscience and Nanotechnology (Grècia)) ; Whitworth, Guy L. (Institut Català de Nanociència i Nanotecnologia) ; Kehagias, Nikolaos (Institut Català de Nanociència i Nanotecnologia) ; Papavieros, George (Aristotle University of Thessaloniki. Physics Department) ; Sotomayor Torres, Clivia M. (Institut Català de Nanociència i Nanotecnologia) ; Gogolides, Evangelos (Institute of Nanoscience and Nanotechnology (Grècia))
NIL patterns frequently suffer from the presence of defects such as missing lines or dots which degrade their properties and functionality. Due to their low density and nanosize, the measurement of their fraction is challenging nanometrology trade-off between resolution and measurement range. [...]
2019 - 10.1117/12.2523931
Proceedings of SPIE, Vol. 10958 (2019) , art. 109581K  

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