Published articles

Published articles 1 records found  Search took 0.01 seconds. 
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7 p, 3.6 MB CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology / Muñoz Gamarra, Jose Luis (Universitat Autònoma de Barcelona. Departament de Enginyeria Electrònica) ; Uranga del Monte, Aránzazu (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. [...]
2016 - 10.3390/mi7020030
Micromachines, Vol. 7 Núm. 2 (February 2016) , p. 1-7  

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