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9 p, 644.4 KB Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics / Lanza, Mario (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Iglesias Santiso, Vanessa (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Porti i Pujal, Marc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Nafría i Maqueda, Montserrat (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Aymerich Humet, Xavier (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica)
In this study, atomic force microscopy-related techniques have been used to investigate, at the nanoscale, how the polycrystallization of an Al₂O₃-based gate stack, after a thermal annealing process, affects the variability of its electrical properties. [...]
2011 - 10.1186/1556-276X-6-108
Nanoscale Research Letters, Vol. 6 (January 2011) , art. 108  
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