Results overview: Found 3 records in 0.02 seconds.
Articles, 3 records found
Articles 3 records found  
1.
4 p, 355.8 KB Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry / Forsen, E. (Technical University of Denmark. Department of Micro and Nanotechnology) ; Abadal Berini, Gabriel (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Ghatnekar-Nilsson, S. (University of Lund. Solid State Physics and The Nanometer Consortium) ; Teva Meroño, Jordi (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Verd Martorell, Jaume (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Sandberg, R. (Technical University of Denmark. Department of Micro and Nanotechnology) ; Svendsen, W. (Technical University of Denmark. Department of Micro and Nanotechnology) ; Pérez Murano, Francesc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Esteve Tinto, Jaume (Institut de Microelectrònica de Barcelona (IMB-CNM)) ; Figueras Costa, Eduardo (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Campabadal Segura, Francesca (Institut de Microelectrònica de Barcelona (IMB-CNM)) ; Montelius, L. (University of Lund. Solid State Physics and The Nanometer Consortium) ; Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Boisen, A. (Technical University of Denmark. Department of Micro and Nanotechnology) ; American Physical Society
Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor(CMOS) chips. Fabricatedresonatorsystems have been designed to have resonance frequencies up to 1. [...]
2005 - 10.1063/1.1999838
Applied Physics Letters, Vol. 87, Issue 4 (July 2005) , p. 043507/1- 043507/3  
2.
4 p, 370.6 KB Combined laser and atomic force microscope lithography on aluminum : mask fabrication for nanoelectromechanical systems / Abadal Berini, Gabriel (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Boisen, A. (Technical University of Denmark. Mikroelektronik Centret) ; Davis, Z. J. (Technical University of Denmark. Mikroelektronik Centret) ; Hansen, O. (Technical University of Denmark. Mikroelektronik Centret) ; Grey, F. (Technical University of Denmark. Mikroelektronik Centret) ; American Physical Society
A direct-write laser system and an atomic force microscope(AFM) are combined to modify thin layers of aluminum on an oxidizedsilicon substrate, in order to fabricate conducting and robust etch masks with submicron features. [...]
1999 - 10.1063/1.124106
Applied Physics Letters, Vol. 74, Issue 21 (March 1999) , p. 3206-3208  
3.
4 p, 332.8 KB Integrated tunneling sensor for nanoelectromechanical systems / Sadewasser, Sascha (Instituto de Microelectrónica de Barcelona) ; Abadal Berini, Gabriel (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Barniol i Beumala, Núria (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Dohn, S. (Technical University of Denmark. Department of Micro and Nanotechnology) ; Boisen, A. (Technical University of Denmark. Department of Micro and Nanotechnology) ; Fonseca Chácharo, Luis Antonio (Instituto de Microelectrónica de Barcelona) ; Esteve Tinto, Jaume (Universitat Autònoma de Barcelona. Departament de Enginyeria Electrònica) ; American Physical Society
Transducers based on quantum mechanical tunneling provide an extremely sensitive sensor principle, especially for nanoelectromechanical systems. For proper operation a gap between the electrodes of below 1nm is essential, requiring the use of structures with a mobile electrode. [...]
2006 - 10.1063/1.2362593
Applied Physics Letters, Vol. 89, Issue 17 (October 2006) , p. 173101/1-173101/3  

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