Home > Search Results: Espinosa, Francisco Miguel
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10 p, 6.7 MB Identifying the nature of surface chemical modification for directed self-assembly of block copolymers / Evangelio Araujo, Laura (Institut Català de Nanociència i Nanotecnologia) ; Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia) ; Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona) ; Gorgoi, Michaela (Helmholtz-Zentrum Berlin. Energy Materials In-situ Laboratory) ; Espinosa, Francisco Miguel (Instituto de Ciencia de Materiales de Madrid) ; García, Ricardo (Instituto de Ciencia de Materiales de Madrid) ; Pérez-Murano, Francesc (Institut de Microelectrònica de Barcelona) ; Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia)
In recent years, block copolymer lithography has emerged as a viable alternative technology for advanced lithography. In chemical-epitaxy-directed self-assembly, the interfacial energy between the substrate and each block copolymer domain plays a key role on the final ordering. [...]
2017 - 10.3762/bjnano.8.198
Beilstein journal of nanotechnology, Vol. 8 (Sep. 2017) , p. 1972-1981  
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