Results overview: Found 2 records in 0.01 seconds.
Articles, 2 records found
Articles 2 records found  
1.
4 p, 370.6 KB Combined laser and atomic force microscope lithography on aluminum : mask fabrication for nanoelectromechanical systems / Abadal Berini, Gabriel (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Boisen, A. (Technical University of Denmark. Mikroelektronik Centret) ; Davis, Z. J. (Technical University of Denmark. Mikroelektronik Centret) ; Hansen, O. (Technical University of Denmark. Mikroelektronik Centret) ; Grey, F. (Technical University of Denmark. Mikroelektronik Centret) ; American Physical Society
A direct-write laser system and an atomic force microscope(AFM) are combined to modify thin layers of aluminum on an oxidizedsilicon substrate, in order to fabricate conducting and robust etch masks with submicron features. [...]
1999 - 10.1063/1.124106
Applied physics letters, Vol. 74, Issue 21 (March 1999) , p. 3206-3208  
2.
4 p, 279.2 KB STM-induced hydrogen desorption via a hole resonance / Stokbro, K. (Danmarks Tekniske Universitet. Mikroelektronik Centret) ; Thirstrup, C. (Surface and Interface Laboratory, RIKEN (Japó)) ; Sakurai, M. (Surface and Interface Laboratory, RIKEN (Japó)) ; Quaade, U. (Danmarks Tekniske Universitet. Mikroelektronik Centret) ; Yu-Kuang Hu, Ben (Danmarks Tekniske Universitet. Mikroelektronik Centret) ; Pérez Murano, Francesc (Universitat Autònoma de Barcelona. Departament d'Enginyeria Electrònica) ; Grey, F. (Danmarks Tekniske Universitet. Mikroelektronik Centret) ; American Physical Society
We report STM-induced desorption of H from Si(100)-H(2×1) at negative sample bias. The desorption rate exhibits a power-law dependence on current and a maximum desorption rate at −7V. The desorption is explained by vibrational heating of H due to inelastic scattering of tunneling holes with the Si-H 5σ hole resonance. [...]
1998 - 10.1103/PhysRevLett.80.2618
Physical review letters, Vol. 80, Issue 12 (March 1998) , p. 2618-2621  

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