1.
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29 p, 1.6 MB |
Self-assembly of block copolymers under nonisothermal annealing conditions as revealed by grazing-incidence small-angle X-ray scattering
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Fernández Regúlez, Marta (Institut de Microelectrònica de Barcelona) ;
Solano, Eduardo (ALBA Laboratori de Llum de Sincrotró) ;
Evangelio Araujo, Laura (Institut Català de Nanociència i Nanotecnologia) ;
Gottlieb, Steven (Institut de Microelectrònica de Barcelona) ;
Pinto-Gomez, Christian (Institut de Microelectrònica de Barcelona) ;
Rius, Gemma (Institut de Microelectrònica de Barcelona) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Gutiérrez-Fernández, Edgar (Consejo Superior de Investigaciones Científicas (Espanya). Instituto de Estructura de la Materia) ;
Nogales, Aurora (Consejo Superior de Investigaciones Científicas (Espanya). Instituto de Estructura de la Materia) ;
García-Gutiérrez, Mari Cruz (Consejo Superior de Investigaciones Científicas (Espanya). Instituto de Estructura de la Materia) ;
Ezquerra, Tiberio A. (Consejo Superior de Investigaciones Científicas (Espanya). Instituto de Estructura de la Materia) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)
An accurate knowledge of the parameters governing the kinetics of block copolymer self-assembly is crucial to model the time- and temperature-dependent evolution of pattern formation during annealing as well as to predict the most efficient conditions for the formation of defect-free patterns. [...]
2020 - 10.1107/S1600577520009820
Journal of Synchrotron Radiation, Vol. 27, issue 5 (Sep. 2020) , p. 1278-1288
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2.
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14 p, 1012.8 KB |
Quantification of nanomechanical properties of surfaces by higher harmonic monitoring in amplitude modulated AFM imaging
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Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia) ;
Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
Evangelio Araujo, Laura (Institut Català de Nanociència i Nanotecnologia) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia)
The determination of nanomechanical properties is an intensive topic of study in several fields of nanophysics, from surface and materials science to biology. At the same time, amplitude modulation force microscopy is one of the most established techniques for nanoscale characterization. [...]
2018 - 10.1016/j.ultramic.2018.01.013
Ultramicroscopy, Vol. 187 (April 2018) , p. 20-25
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3.
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39 p, 1.4 MB |
Role of penetrability into a brush-coated surface in directed self-assembly of block copolymers
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Evangelio Araujo, Laura (Institut Català de Nanociència i Nanotecnologia) ;
Fernández Regúlez, Marta (Institut de Microelectrònica de Barcelona) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Müller, Marcus (Georg-August University. Institute for Theoretical Physics) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)
High-density and high-resolution line and space patterns on surfaces are obtained by directed self-assembly of lamella-forming block copolymers (BCPs) using wide-stripe chemical guiding patterns. When the width of the chemical pattern is larger than the half-pitch of the BCP, the interaction energy between each BCP domain and the surface is crucial to obtain the desired segregated film morphology. [...]
2019 - 10.1021/acsami.8b19062
ACS applied materials & interfaces, Vol. 11, issue 3 (Jan. 2019) , p. 3571-3581
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4.
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6 p, 1.1 MB |
Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM
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Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona) ;
Llobet Sixto, Jordi (Institut de Microelectrònica de Barcelona) ;
Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia) ;
Sansa Perna, Marc (Institut de Microelectrònica de Barcelona) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)
In this work, the authors employed Peak Force tapping and force spectroscopy to evaluate the stress generated during the fabrication of doubly clamped, suspended silicon nanobeams with rectangular section. [...]
2016 - 10.1116/1.4967930
Journal of vacuum science and technology. B, Nanotechnology & microelectronics, Vol. 34, Issue 6 (November 2016) , art. 6KK02
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5.
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7 p, 2.0 MB |
Replication of nanoscale surface gratings via injection molding
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Muntada López, Olga (Institut de Microelectrònica de Barcelona) ;
Pina Estany, Jordi (Universitat Ramon Llull. Institut Químic de Sarrià-IQS) ;
Colominas, Carles (Universitat Ramon Llull. Institut Químic de Sarrià-IQS) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
García Granada, Andrés (Universitat Ramon Llull. Institut Químic de Sarrià-IQS)
Nanostructured gratings fabricated on silicon chips have been successfully transferred to polypropylene plastic parts by means of injection molding. Different sets of experiments were carried out along with a repeatability analysis in order to study the effect in the replication of process parameters such as maximum injection pressure, injection time, charge and polymer temperature, geometric factors such as width and separation between lines of the gratings and flow direction as well as demolding conditions. [...]
2019 - 10.1016/j.mne.2019.03.003
Micro and Nano Engineering, Vol. 3 (May 2019) , p. 37-43
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6.
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11 p, 3.8 MB |
Self-assembly morphology of block copolymers in sub-10 nm topographical guiding patterns
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Gottlieb, Steven (Institut de Microelectrònica de Barcelona) ;
Rösner, Benedikt (Paul Scherrer Institut (Suïssa)) ;
Evangelio Araujo, Laura (Institut de Microelectrònica de Barcelona) ;
Fernández Regúlez, Marta (Institut de Microelectrònica de Barcelona) ;
Nogales, Aurora (Consejo Superior de Investigaciones Científicas (Espanya). Instituto de Estructura de la Materia) ;
García-Gutiérrez, Mari Cruz (Consejo Superior de Investigaciones Científicas (Espanya). Instituto de Estructura de la Materia) ;
Keller, Thomas F. (Universität Hamburg) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Ezquerra, Tiberio A. (Consejo Superior de Investigaciones Científicas (Espanya). Instituto de Estructura de la Materia) ;
David, Christian (Paul Scherrer Institut (Suïssa)) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)
In this paper, we investigate the directed self-assembly of block copolymers in topographical guiding patterns with feature sizes in the range of the block copolymer half-pitch. In particular, we present the self-assembly of an 11. [...]
2019 - 10.1039/c8me00046h
Molecular systems design and engineering, Vol. 4, Issue 1 (February 2019) , p. 175-185
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7.
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6 p, 1.5 MB |
Resonant tunnelling features in a suspended silicon nanowire single-hole transistor
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Llobet Sixto, Jordi (Institut de Microelectrònica de Barcelona) ;
Krali, Emiljana (Imperial College London. Department of Electrical and Electronic Engineering) ;
Wang, Chen (Imperial College London. Department of Electrical and Electronic Engineering) ;
Arbiol i Cobos, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Jones, Mervyn E. (Imperial College London. Department of Electrical and Electronic Engineering) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
Durrani, Zahid A. K. (Imperial College London. Department of Electrical and Electronic Engineering) ;
ALBA Laboratori de Llum de Sincrotró
Suspended silicon nanowires have significant potential for a broad spectrum of device applications. A suspended p-type Si nanowire incorporating Si nanocrystal quantum dots has been used to form a single-hole transistor. [...]
2015 - 10.1063/1.4936757
Applied physics letters, Vol. 107, issue 22 (Nov. 2015) , art. 223501
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8.
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10 p, 2.5 MB |
A statistical analysis of nanocavities replication applied to injection moulding
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Pina Estany, Jordi (Universitat Ramon Llull. Institut Químic de Sarrià-IQS) ;
Colominas, Carles (Universitat Ramon Llull. Institut Químic de Sarrià-IQS) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Llobet Sixto, Jordi (Institut de Microelectrònica de Barcelona) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
Puigoriol-Forcada, Josep Maria (Universitat Ramon Llull. Institut Químic de Sarrià-IQS) ;
Ruso, D. (Flubetech SL) ;
García Granada, Andrés (Universitat Ramon Llull. Institut Químic de Sarrià-IQS)
The purpose of this paper is to investigate both theoretically and experimentally how nanocavities are replicated in the injection moulding manufacturing process. The objective is to obtain a methodology for efficiently replicate nanocavities. [...]
2017 - 10.1016/j.icheatmasstransfer.2016.11.003
International communications in heat and mass transfer, Vol. 81 (Feb. 2017) , p. 131-140
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9.
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10 p, 6.7 MB |
Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
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Evangelio Araujo, Laura (Institut Català de Nanociència i Nanotecnologia) ;
Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia) ;
Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona) ;
Gorgoi, Michaela (Helmholtz-Zentrum Berlin. Energy Materials In-situ Laboratory) ;
Espinosa, Francisco Miguel (Instituto de Ciencia de Materiales de Madrid) ;
García, Ricardo (Instituto de Ciencia de Materiales de Madrid) ;
Pérez-Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia)
In recent years, block copolymer lithography has emerged as a viable alternative technology for advanced lithography. In chemical-epitaxy-directed self-assembly, the interfacial energy between the substrate and each block copolymer domain plays a key role on the final ordering. [...]
2017 - 10.3762/bjnano.8.198
Beilstein journal of nanotechnology, Vol. 8 (Sep. 2017) , p. 1972-1981
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10.
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9 p, 1.3 MB |
Functional dependence of resonant harmonics on nanomechanical parameters in dynamic mode atomic force microscopy
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Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia) ;
Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona) ;
Pérez-Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
Rull Trinidad, Enrique (Technische Universiteit Delft) ;
Staufer, Urs (Technische Universiteit Delft) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia)
We present a combined theoretical and experimental study of the dependence of resonant higher harmonics of rectangular cantilevers of an atomic force microscope (AFM) as a function of relevant parameters such as the cantilever force constant, tip radius and free oscillation amplitude as well as the stiffness of the sample's surface. [...]
2017 - 10.3762/bjnano.8.90
Beilstein journal of nanotechnology, Vol. 8 (April 2017) , p. 883-891
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