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1.
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6 p, 1.1 MB |
Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM
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Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona) ;
Llobet Sixto, Jordi (Institut de Microelectrònica de Barcelona) ;
Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia) ;
Sansa Perna, Marc (Institut de Microelectrònica de Barcelona) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)
In this work, the authors employed Peak Force tapping and force spectroscopy to evaluate the stress generated during the fabrication of doubly clamped, suspended silicon nanobeams with rectangular section. [...]
2016 -  10.1116/1.4967930
Journal of vacuum science and technology. B, Nanotechnology & microelectronics, Vol. 34, Issue 6 (November 2016) , art. 6KK02
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2.
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7 p, 2.0 MB |
Replication of nanoscale surface gratings via injection molding
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Muntada López, Olga (Institut de Microelectrònica de Barcelona) ;
Pina Estany, Jordi (Institut Químic de Sarrià) ;
Colominas, Carles (Institut Químic de Sarrià) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
García Granada, Andrés (Institut Químic de Sarrià)
Nanostructured gratings fabricated on silicon chips have been successfully transferred to polypropylene plastic parts by means of injection molding. Different sets of experiments were carried out along with a repeatability analysis in order to study the effect in the replication of process parameters such as maximum injection pressure, injection time, charge and polymer temperature, geometric factors such as width and separation between lines of the gratings and flow direction as well as demolding conditions. [...]
2019 - 10.1016/j.mne.2019.03.003
Micro and Nano Engineering, Vol. 3 (May 2019) , p. 37-43
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3.
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11 p, 3.8 MB |
Self-assembly morphology of block copolymers in sub-10 nm topographical guiding patterns
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Gottlieb, Steven (Institut de Microelectrònica de Barcelona) ;
Rösner, Benedikt (Paul Scherrer Institut (Suïssa)) ;
Evangelio Araujo, Laura (Institut de Microelectrònica de Barcelona) ;
Fernández Regúlez, Marta (Institut de Microelectrònica de Barcelona) ;
Nogales, Aurora (Instituto de Estructura de la Materia) ;
García Gutiérrez, Mari Cruz (Instituto de Estructura de la Materia) ;
Keller, Thomas F. (Universität Hamburg) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Ezquerra, Tiberio A. (Instituto de Estructura de la Materia) ;
David, Christian (Paul Scherrer Institut (Suïssa)) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)
In this paper, we investigate the directed self-assembly of block copolymers in topographical guiding patterns with feature sizes in the range of the block copolymer half-pitch. In particular, we present the self-assembly of an 11. [...]
2019 - 10.1039/c8me00046h
Molecular systems design and engineering, Vol. 4, Issue 1 (February 2019) , p. 175-185
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4.
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6 p, 1.5 MB |
Resonant tunnelling features in a suspended silicon nanowire single-hole transistor
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Llobet Sixto, Jordi (Institut de Microelectrònica de Barcelona) ;
Krali, Emiljana (Imperial College London. Department of Electrical and Electronic Engineering) ;
Wang, Chen (Imperial College London. Department of Electrical and Electronic Engineering) ;
Arbiol i Cobos, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Jones, Mervyn E. (Imperial College London. Department of Electrical and Electronic Engineering) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
Durrani, Zahid A. K. (Imperial College London. Department of Electrical and Electronic Engineering) ;
ALBA Laboratori de Llum de Sincrotró
Suspended silicon nanowires have significant potential for a broad spectrum of device applications. A suspended p-type Si nanowire incorporating Si nanocrystal quantum dots has been used to form a single-hole transistor. [...]
2015 - 10.1063/1.4936757
Applied physics letters, Vol. 107, issue 22 (Nov. 2015) , art. 223501
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5.
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10 p, 2.5 MB |
A statistical analysis of nanocavities replication applied to injection moulding
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Pina Estany, Jordi (Institut Químic de Sarrià) ;
Colominas, Carles (Institut Químic de Sarrià) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia) ;
Llobet Sixto, Jordi (Institut de Microelectrònica de Barcelona) ;
Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
Puigoriol-Forcada, Josep Maria (Institut Químic de Sarrià) ;
Ruso, D. (Flubetech SL) ;
García Granada, Andrés (Institut Químic de Sarrià)
The purpose of this paper is to investigate both theoretically and experimentally how nanocavities are replicated in the injection moulding manufacturing process. The objective is to obtain a methodology for efficiently replicate nanocavities. [...]
2017 - 10.1016/j.icheatmasstransfer.2016.11.003
International communications in heat and mass transfer, Vol. 81 (Feb. 2017) , p. 131-140
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6.
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10 p, 6.7 MB |
Identifying the nature of surface chemical modification for directed self-assembly of block copolymers
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Evangelio Araujo, Laura (Institut Català de Nanociència i Nanotecnologia) ;
Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia) ;
Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona) ;
Gorgoi, Michaela (Helmholtz-Zentrum Berlin. Energy Materials In-situ Laboratory) ;
Espinosa, Francisco Miguel (Instituto de Ciencia de Materiales de Madrid) ;
García, Ricardo (Instituto de Ciencia de Materiales de Madrid) ;
Pérez-Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia)
In recent years, block copolymer lithography has emerged as a viable alternative technology for advanced lithography. In chemical-epitaxy-directed self-assembly, the interfacial energy between the substrate and each block copolymer domain plays a key role on the final ordering. [...]
2017 - 10.3762/bjnano.8.198
Beilstein journal of nanotechnology, Vol. 8 (Sep. 2017) , p. 1972-1981
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7.
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9 p, 1.3 MB |
Functional dependence of resonant harmonics on nanomechanical parameters in dynamic mode atomic force microscopy
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Gramazio, Federico (Institut Català de Nanociència i Nanotecnologia) ;
Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona) ;
Pérez-Murano, Francesc (Institut de Microelectrònica de Barcelona) ;
Rull Trinidad, Enrique (Technische Universiteit Delft) ;
Staufer, Urs (Technische Universiteit Delft) ;
Fraxedas, Jordi (Institut Català de Nanociència i Nanotecnologia)
We present a combined theoretical and experimental study of the dependence of resonant higher harmonics of rectangular cantilevers of an atomic force microscope (AFM) as a function of relevant parameters such as the cantilever force constant, tip radius and free oscillation amplitude as well as the stiffness of the sample's surface. [...]
2017 - 10.3762/bjnano.8.90
Beilstein journal of nanotechnology, Vol. 8 (April 2017) , p. 883-891
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8.
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9.
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8 p, 2.0 MB |
Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes
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Rius, Gemma (Nagoya Institute of Technology, NITech) ;
Lorenzoni, Matteo (Instituto de Microelectrónica de Barcelona) ;
Matsui, Soichiro (Nagoya Institute of Technology, NITech) ;
Tanemura, Masaki (Nagoya Institute of Technology, NITech) ;
Pérez Murano, Francesc (Instituto de Microelectrónica de Barcelona)
Many nanofabrication methods based on scanning probe microscopy have been developed during the last decades. Local anodic oxidation (LAO) is one of such methods: Upon application of an electric field between tip and surface under ambient conditions, oxide patterning with nanometer-scale resolution can be performed with good control of dimensions and placement. [...]
2015 - 10.3762/bjnano.6.20
Beilstein journal of nanotechnology, Vol. 6 (january 2015) , p. 215-222
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