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16 p, 1.1 MB Design, fabrication, and characterisation of wire grid polarizers for the deep UV spectral range / Rodriguez de Marcos, Luis (National University of Singapore. Singapore Synchrotron Light Source) ; Ong Bin, Leong (National University of Singapore. Physics Department) ; Asmara, Teguh Citra (National University of Singapore. Singapore Synchrotron Light Source) ; Heussler, Sascha Pierre (National University of Singapore. Singapore Synchrotron Light Source) ; Guerrero, Albert (Institut de Microelectrònica de Barcelona) ; Mas, Roser (Institut de Microelectrònica de Barcelona) ; Borrisé, Xavier (Institut Català de Nanociència i Nanotecnologia) ; Breese, Mark B. H. (National University of Singapore. Physics Department) ; Rusydi, Andrivo (National University of Singapore. Physics Department)
In this communication, we show preliminary results on transmissive TiO wire-grid polarizers (WGP) operating in the deep ultraviolet (DUV) range. WGP are devices based on strips of materials with large values of the modulus of the dielectric constant along with high absorption in the operational range. [...]
2018 - 10.1117/12.2314459
Proceedings of SPIE, Vol. 10691 (2018) , art. 1069124  
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