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23 p, 1.1 MB Order quantification of hexagonal periodic arrays fabricated by in situ solvent-assisted nanoimprint lithography of block copolymers / Delgado Simao, Claudia (Institut Català de Nanociència i Nanotecnologia) ; Khunsin, Worawut (Institut Català de Nanociència i Nanotecnologia) ; Kehagias, Nikolaos (Institut Català de Nanociència i Nanotecnologia) ; Salaun, Mathieu (Centre national de la recherche scientifique. Laboratoire des Technologies de la Microélectronique) ; Zelsmann, Marc (Centre national de la recherche scientifique. Laboratoire des Technologies de la Microélectronique) ; Morris, Michael A. (Tyndall National Institute. School of Chemistry) ; Sotomayor Torres, Clivia M. (Institut Català de Nanociència i Nanotecnologia)
Directed self-assembly of block copolymer polystyrene-b-polyethylene oxide (PS-b-PEO) thin film was achieved by a one-pot methodology of solvent vapor assisted nanoimprint lithography (SAIL). Simultaneous solvent-anneal and imprinting of a PS-b-PEO thin film on silicon without surface pre-treatments yielded a 250 nm line grating decorated with 20 nm diameter nanodots array over a large surface area of up to 4' wafer scale. [...]
2014 - 10.1088/0957-4484/25/17/175703
Nanotechnology, Vol. 25, Issue 17 (May 2014) , art. 175703  
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