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8 p, 2.0 MB Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes / Rius, Gemma (Nagoya Institute of Technology, NITech) ; Lorenzoni, Matteo (Institut de Microelectrònica de Barcelona) ; Matsui, Soichiro (Nagoya Institute of Technology, NITech) ; Tanemura, Masaki (Nagoya Institute of Technology, NITech) ; Pérez Murano, Francesc (Institut de Microelectrònica de Barcelona)
Many nanofabrication methods based on scanning probe microscopy have been developed during the last decades. Local anodic oxidation (LAO) is one of such methods: Upon application of an electric field between tip and surface under ambient conditions, oxide patterning with nanometer-scale resolution can be performed with good control of dimensions and placement. [...]
2015 - 10.3762/bjnano.6.20
Beilstein journal of nanotechnology, Vol. 6 (january 2015) , p. 215-222  

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