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Articles, 3 records found

Articles	3 records found

25 p, 1.9 MB

Directional elastic wave propagation in high-aspect-ratio photoresist gratings : Liquid infiltration and aging / Alonso-Redondo, Elena (Max Planck Institute for Polymer Research) ; Gueddida, Abdellatif (Université Mohamed I. Département de Physique) ; Li, Ju (University of Pennsylvania. Department of Materials Science and Engineering) ; Graczykowski, Bartlomiej (Institut Català de Nanociència i Nanotecnologia) ; Sotomayor Torres, Clivia M. (Institut Català de Nanociència i Nanotecnologia) ; Pennec, Yan (Université de Lille. Institut d'Électronique de Microélectronique et de Nanotechnologie) ; Yang, Shu (University of Pennsylvania. Department of Materials Science and Engineering) ; Djafari-Rouhani, Bahram (Université de Lille. Institut d'Électronique de Microélectronique et de Nanotechnologie) ; Fytas, George (University of Crete. Department of Materials Science)
Determination of the mechanical properties of nanostructured soft materials and their composites in a quantitative manner is of great importance to improve the fidelity in their fabrication and to enable the subsequent reliable utility. [...]
2017 - DOI (Digital Object Identifier)

10.1039/c6nr08312a
Nanoscale, Vol. 9, Issue 8 (January 2017) , p. 2739-2747

Detailed record -

9 p, 547.3 KB

Grating couplers integrated on Mach-Zehnder interferometric biosensors operating in the visible range / Duval, Daphné (Institut Català de Nanociència i Nanotecnologia) ; Osmond, Johann (Institute of Photonic Sciences) ; Dante, Stefania (Institut Català de Nanociència i Nanotecnologia) ; Dominguez, Carlos (Institut de Microelectrònica de Barcelona) ; Lechuga, Laura M (Institut Català de Nanociència i Nanotecnologia)
We present the design, fabrication, and characterization of submicronic grating couplers integrated on SiN rib waveguide Mach-Zehnder interferometers (MZIs) for biosensing applications working in the visible spectral range for both TE and TM polarizations. [...]
2013 - DOI (Digital Object Identifier)

10.1109/JPHOT.2013.2251873
IEEE photonics journal, Vol. 5, Issue 2 (April 2013) , art. 6476622

Detailed record -

$In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry$

7 p, 1.5 MB

In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry / Kreuzer, Martin (Institut Català de Nanociència i Nanotecnologia) ; Whitworth, Guy L. (Institut Català de Nanociència i Nanotecnologia) ; Francone, Achille (Institut Català de Nanociència i Nanotecnologia) ; Gomis-Bresco, Jordi (Institut Català de Nanociència i Nanotecnologia) ; Kehagias, Nikolaos (Institut Català de Nanociència i Nanotecnologia) ; Sotomayor Torres, Clivia M. (Institut Català de Nanociència i Nanotecnologia)
We describe and discuss the optical design of a diffractometer to carry out in-line quality control during roll-to-roll nanoimprinting. The tool measures diffractograms in reflection geometry, through an aspheric lens to gain fast, non-invasive information of any changes to the critical dimensions of target grating structures. [...]
2018 - DOI (Digital Object Identifier)

10.1063/1.5011740
APL materials, Vol. 6, Issue 5 (May 2018) , art. 58502

Detailed record -

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