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32 p, 5.3 MB Tailored height gradients in vertical nanowire arrays via mechanical and electronic modulation of metal-assisted chemical etching / Otte Ortiz, Marinus Albertus (Institut Català de Nanociència i Nanotecnologia) ; Solís Tinoco, Verónica Iraís (Institut Català de Nanociència i Nanotecnologia) ; Prieto, Pilar (Instituto de Microelectrónica de Madrid) ; Borrisé Nogué, Xavier (Institut Català de Nanociència i Nanotecnologia) ; Lechuga, Laura M. (Institut Català de Nanociència i Nanotecnologia) ; González, M.U. (Instituto de Microelectrónica de Madrid) ; Sepúlveda Martínez, Borja (Institut Català de Nanociència i Nanotecnologia)
In current top-down nanofabrication methodologies the design freedom is generally constrained to the two lateral dimensions, and is only limited by the resolution of the employed nanolithographic technique. [...]
2015 - 10.1002/smll.201500175
Small, Vol. 11, Issue 33 (September 2015) , p. 4201-4208  

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